JPS6461391A - Reactor tube for vapor-phase growth - Google Patents
Reactor tube for vapor-phase growthInfo
- Publication number
- JPS6461391A JPS6461391A JP21943787A JP21943787A JPS6461391A JP S6461391 A JPS6461391 A JP S6461391A JP 21943787 A JP21943787 A JP 21943787A JP 21943787 A JP21943787 A JP 21943787A JP S6461391 A JPS6461391 A JP S6461391A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- inlets
- inlet
- phase growth
- reactor tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To obtain a multi-layered thin film of semiconductor crystals of high quality, by dividing the gas inlet into 2 or more inlets and making the relative location between the added inlets and the susceptor variable in the reaction tube for vapor-phase epitaxial growth to form semiconductor crystal thin films. CONSTITUTION:In the vapor-phase growth reaction tube 1 where the gas inlet 4 is set at one end, while the outlet, at the other, and the base supporter 2 can be inserted into the tube, one or more additional gas inlets (e.g., 5) other than the inlet 4 are provided and the relative location between the additional inlet 5 and the supporter 2 is made variable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21943787A JPS6461391A (en) | 1987-09-01 | 1987-09-01 | Reactor tube for vapor-phase growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21943787A JPS6461391A (en) | 1987-09-01 | 1987-09-01 | Reactor tube for vapor-phase growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6461391A true JPS6461391A (en) | 1989-03-08 |
Family
ID=16735389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21943787A Pending JPS6461391A (en) | 1987-09-01 | 1987-09-01 | Reactor tube for vapor-phase growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6461391A (en) |
-
1987
- 1987-09-01 JP JP21943787A patent/JPS6461391A/en active Pending
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