JPS6449251A - Manufacture of groove-shaped capacitor - Google Patents
Manufacture of groove-shaped capacitorInfo
- Publication number
- JPS6449251A JPS6449251A JP62206740A JP20674087A JPS6449251A JP S6449251 A JPS6449251 A JP S6449251A JP 62206740 A JP62206740 A JP 62206740A JP 20674087 A JP20674087 A JP 20674087A JP S6449251 A JPS6449251 A JP S6449251A
- Authority
- JP
- Japan
- Prior art keywords
- groove
- silicon
- film
- substrate
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052710 silicon Inorganic materials 0.000 abstract 6
- 239000010703 silicon Substances 0.000 abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 5
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To obtain a groove-shaped capacitor of high breakdown strength by a method wherein a part other than an inner wall part inside a groove in a silicon substrate is oxidized selectively so as to form a second silicon oxide film and a silicon nitride film, while a first silicon oxide film and the second silicon oxide film are removed in order to easily form a rounded part at an edge part of an opening of the groove. CONSTITUTION:After a laminated film composed of a first silicon oxide film 6 and a silicon nitride film 7 has been formed on a silicon substrate 1 having a groove, the silicon film 7 and the silicon film 6 which have been formed in parts other than an inner wall part of the groove are removed selectively. The substrate 1 including the groove is oxidized, and a second silicon oxide film 8 is formed on the substrate 1 in parts other than the inner wall part of the groove. The silicon film 7 and the silicon films 6, 8 are removed. A dielectric film 9 to be used for a capacitor is formed on the substrate 1 including the inner wall part of the groove. A conductive layer 10 to be used as one electrode for the capacitor is formed on the dielectric film 9. By this setup, a rounded part at an edge part of an opening of the groove can be formed easily; the groove-shaped capacitor of high breakdown strength can thus be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206740A JP2794565B2 (en) | 1987-08-20 | 1987-08-20 | Manufacturing method of groove type capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206740A JP2794565B2 (en) | 1987-08-20 | 1987-08-20 | Manufacturing method of groove type capacitor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6449251A true JPS6449251A (en) | 1989-02-23 |
JP2794565B2 JP2794565B2 (en) | 1998-09-10 |
Family
ID=16528317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62206740A Expired - Fee Related JP2794565B2 (en) | 1987-08-20 | 1987-08-20 | Manufacturing method of groove type capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2794565B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007144199A (en) * | 2006-12-18 | 2007-06-14 | Atsugi Color Genzosho:Kk | Sleep-time snore preventing device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4244456B2 (en) | 1999-08-04 | 2009-03-25 | 株式会社デンソー | Manufacturing method of semiconductor device, manufacturing method of insulated gate bipolar transistor, and insulated gate bipolar transistor |
US6864532B2 (en) | 2000-01-14 | 2005-03-08 | Denso Corporation | Semiconductor device and method for manufacturing the same |
ITMI20010039A1 (en) | 2000-01-14 | 2002-07-11 | Denso Corp | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING ITSELF |
JP4200626B2 (en) | 2000-02-28 | 2008-12-24 | 株式会社デンソー | Method for manufacturing insulated gate type power device |
-
1987
- 1987-08-20 JP JP62206740A patent/JP2794565B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007144199A (en) * | 2006-12-18 | 2007-06-14 | Atsugi Color Genzosho:Kk | Sleep-time snore preventing device |
Also Published As
Publication number | Publication date |
---|---|
JP2794565B2 (en) | 1998-09-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |