JPS5272186A - Production of mis type semiconductor device - Google Patents
Production of mis type semiconductor deviceInfo
- Publication number
- JPS5272186A JPS5272186A JP14875675A JP14875675A JPS5272186A JP S5272186 A JPS5272186 A JP S5272186A JP 14875675 A JP14875675 A JP 14875675A JP 14875675 A JP14875675 A JP 14875675A JP S5272186 A JPS5272186 A JP S5272186A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- type semiconductor
- mis type
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the decrease in the dielectric strength of a gate by making the gate electrode in the same form as that of a gate insulating film on P type substrate and etching the surface, then covering the surface with a PSG film and performing thermal diffusion.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14875675A JPS5272186A (en) | 1975-12-12 | 1975-12-12 | Production of mis type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14875675A JPS5272186A (en) | 1975-12-12 | 1975-12-12 | Production of mis type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5272186A true JPS5272186A (en) | 1977-06-16 |
Family
ID=15459922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14875675A Pending JPS5272186A (en) | 1975-12-12 | 1975-12-12 | Production of mis type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5272186A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5530873A (en) * | 1978-08-28 | 1980-03-04 | Fujitsu Ltd | High withstand field-effect transistor of mis type |
JPS6098667A (en) * | 1983-11-02 | 1985-06-01 | Seiko Epson Corp | Semiconductor device |
-
1975
- 1975-12-12 JP JP14875675A patent/JPS5272186A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5530873A (en) * | 1978-08-28 | 1980-03-04 | Fujitsu Ltd | High withstand field-effect transistor of mis type |
JPS6314502B2 (en) * | 1978-08-28 | 1988-03-31 | Fujitsu Ltd | |
JPS6098667A (en) * | 1983-11-02 | 1985-06-01 | Seiko Epson Corp | Semiconductor device |
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