JPS5272186A - Production of mis type semiconductor device - Google Patents

Production of mis type semiconductor device

Info

Publication number
JPS5272186A
JPS5272186A JP14875675A JP14875675A JPS5272186A JP S5272186 A JPS5272186 A JP S5272186A JP 14875675 A JP14875675 A JP 14875675A JP 14875675 A JP14875675 A JP 14875675A JP S5272186 A JPS5272186 A JP S5272186A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
type semiconductor
mis type
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14875675A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Yoshiki Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14875675A priority Critical patent/JPS5272186A/en
Publication of JPS5272186A publication Critical patent/JPS5272186A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the decrease in the dielectric strength of a gate by making the gate electrode in the same form as that of a gate insulating film on P type substrate and etching the surface, then covering the surface with a PSG film and performing thermal diffusion.
COPYRIGHT: (C)1977,JPO&Japio
JP14875675A 1975-12-12 1975-12-12 Production of mis type semiconductor device Pending JPS5272186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14875675A JPS5272186A (en) 1975-12-12 1975-12-12 Production of mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14875675A JPS5272186A (en) 1975-12-12 1975-12-12 Production of mis type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5272186A true JPS5272186A (en) 1977-06-16

Family

ID=15459922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14875675A Pending JPS5272186A (en) 1975-12-12 1975-12-12 Production of mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5272186A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5530873A (en) * 1978-08-28 1980-03-04 Fujitsu Ltd High withstand field-effect transistor of mis type
JPS6098667A (en) * 1983-11-02 1985-06-01 Seiko Epson Corp Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5530873A (en) * 1978-08-28 1980-03-04 Fujitsu Ltd High withstand field-effect transistor of mis type
JPS6314502B2 (en) * 1978-08-28 1988-03-31 Fujitsu Ltd
JPS6098667A (en) * 1983-11-02 1985-06-01 Seiko Epson Corp Semiconductor device

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