JPS5370777A - Dielectric isolating method - Google Patents

Dielectric isolating method

Info

Publication number
JPS5370777A
JPS5370777A JP14743076A JP14743076A JPS5370777A JP S5370777 A JPS5370777 A JP S5370777A JP 14743076 A JP14743076 A JP 14743076A JP 14743076 A JP14743076 A JP 14743076A JP S5370777 A JPS5370777 A JP S5370777A
Authority
JP
Japan
Prior art keywords
isolating method
dielectric isolating
island regions
converting
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14743076A
Other languages
Japanese (ja)
Other versions
JPS593851B2 (en
Inventor
Kaoru Inoue
Takashi Hirao
Shigetoshi Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14743076A priority Critical patent/JPS593851B2/en
Publication of JPS5370777A publication Critical patent/JPS5370777A/en
Publication of JPS593851B2 publication Critical patent/JPS593851B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To obtain dielectic-isolated single crystal island regions of good thickness accuracy by converting the Si layer encircling the island regions formed within a semiconductor layer to porous layers through anodization, thereafter converting these to insulation layers.
COPYRIGHT: (C)1978,JPO&Japio
JP14743076A 1976-12-07 1976-12-07 Dielectric separation method Expired JPS593851B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14743076A JPS593851B2 (en) 1976-12-07 1976-12-07 Dielectric separation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14743076A JPS593851B2 (en) 1976-12-07 1976-12-07 Dielectric separation method

Publications (2)

Publication Number Publication Date
JPS5370777A true JPS5370777A (en) 1978-06-23
JPS593851B2 JPS593851B2 (en) 1984-01-26

Family

ID=15430131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14743076A Expired JPS593851B2 (en) 1976-12-07 1976-12-07 Dielectric separation method

Country Status (1)

Country Link
JP (1) JPS593851B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515291A (en) * 1978-07-20 1980-02-02 Matsushita Electric Ind Co Ltd Manufacturing method for semiconductor device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118648U (en) * 1984-01-20 1985-08-10 吉田工業株式会社 container with cap
JPS60118647U (en) * 1984-01-20 1985-08-10 吉田工業株式会社 container with cap
JPS60118649U (en) * 1984-01-23 1985-08-10 吉田工業株式会社 container with cap
JPH0311159Y2 (en) * 1985-08-27 1991-03-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515291A (en) * 1978-07-20 1980-02-02 Matsushita Electric Ind Co Ltd Manufacturing method for semiconductor device

Also Published As

Publication number Publication date
JPS593851B2 (en) 1984-01-26

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