JPS5370777A - Dielectric isolating method - Google Patents
Dielectric isolating methodInfo
- Publication number
- JPS5370777A JPS5370777A JP14743076A JP14743076A JPS5370777A JP S5370777 A JPS5370777 A JP S5370777A JP 14743076 A JP14743076 A JP 14743076A JP 14743076 A JP14743076 A JP 14743076A JP S5370777 A JPS5370777 A JP S5370777A
- Authority
- JP
- Japan
- Prior art keywords
- isolating method
- dielectric isolating
- island regions
- converting
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain dielectic-isolated single crystal island regions of good thickness accuracy by converting the Si layer encircling the island regions formed within a semiconductor layer to porous layers through anodization, thereafter converting these to insulation layers.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14743076A JPS593851B2 (en) | 1976-12-07 | 1976-12-07 | Dielectric separation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14743076A JPS593851B2 (en) | 1976-12-07 | 1976-12-07 | Dielectric separation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5370777A true JPS5370777A (en) | 1978-06-23 |
JPS593851B2 JPS593851B2 (en) | 1984-01-26 |
Family
ID=15430131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14743076A Expired JPS593851B2 (en) | 1976-12-07 | 1976-12-07 | Dielectric separation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS593851B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515291A (en) * | 1978-07-20 | 1980-02-02 | Matsushita Electric Ind Co Ltd | Manufacturing method for semiconductor device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60118648U (en) * | 1984-01-20 | 1985-08-10 | 吉田工業株式会社 | container with cap |
JPS60118647U (en) * | 1984-01-20 | 1985-08-10 | 吉田工業株式会社 | container with cap |
JPS60118649U (en) * | 1984-01-23 | 1985-08-10 | 吉田工業株式会社 | container with cap |
JPH0311159Y2 (en) * | 1985-08-27 | 1991-03-19 |
-
1976
- 1976-12-07 JP JP14743076A patent/JPS593851B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515291A (en) * | 1978-07-20 | 1980-02-02 | Matsushita Electric Ind Co Ltd | Manufacturing method for semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS593851B2 (en) | 1984-01-26 |
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