JPS5681966A - Input protecting circuit for semiconductor device - Google Patents
Input protecting circuit for semiconductor deviceInfo
- Publication number
- JPS5681966A JPS5681966A JP15948979A JP15948979A JPS5681966A JP S5681966 A JPS5681966 A JP S5681966A JP 15948979 A JP15948979 A JP 15948979A JP 15948979 A JP15948979 A JP 15948979A JP S5681966 A JPS5681966 A JP S5681966A
- Authority
- JP
- Japan
- Prior art keywords
- region
- substrate
- type
- regions
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To obtain a circuit usable for MNOS and C-MOS elements by forming a region floated potentially additionally to a semiconductor substrate provided with source and drain regions as an input protecting circuit. CONSTITUTION:P<+> type source and drain regions 5 and 6 are diffused in an N type Si substrate 1 at ground potential, and a gate Si3N4 film 8 is coated through a gate SiO2 film 7 being extremely thin on the substrate 11 exposed therebetween. Subsequently, the regions 5 and 6 are spaced, and are provided with P type region 2 used as floating state without connecting to any potential point at the substrate 1, an N<+> type region 3 is provided therein, and a shallow N<-> type region 4 is diffused in the surface layer of the region 2 surrounding the region 3. Thus, a diode D1 is formed between the regions 3 and 4, and a diode D2 is formed between the egion 3 and the substrate 1, an SiO2 film 10 is covered on the entire surface as an input protective circuit, a window is opened, and an input voltage applying metal wire 9 is connected to the region 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15948979A JPS5681966A (en) | 1979-12-08 | 1979-12-08 | Input protecting circuit for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15948979A JPS5681966A (en) | 1979-12-08 | 1979-12-08 | Input protecting circuit for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5681966A true JPS5681966A (en) | 1981-07-04 |
Family
ID=15694879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15948979A Pending JPS5681966A (en) | 1979-12-08 | 1979-12-08 | Input protecting circuit for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5681966A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58178560A (en) * | 1982-04-13 | 1983-10-19 | Nec Corp | Semiconductor device |
JPS5965461A (en) * | 1982-10-06 | 1984-04-13 | Toshiba Corp | Semiconductor device |
JPS59100579A (en) * | 1982-12-01 | 1984-06-09 | Matsushita Electronics Corp | Semiconductor device |
JPS6021561A (en) * | 1983-07-15 | 1985-02-02 | Nec Corp | Semiconductor protection device |
JPS6230361A (en) * | 1985-07-31 | 1987-02-09 | Nec Corp | Cmos input protecting circuit |
JP2010212710A (en) * | 2010-04-26 | 2010-09-24 | Fuji Electric Systems Co Ltd | Semiconductor device |
-
1979
- 1979-12-08 JP JP15948979A patent/JPS5681966A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58178560A (en) * | 1982-04-13 | 1983-10-19 | Nec Corp | Semiconductor device |
JPH0237113B2 (en) * | 1982-04-13 | 1990-08-22 | Nippon Electric Co | |
JPS5965461A (en) * | 1982-10-06 | 1984-04-13 | Toshiba Corp | Semiconductor device |
JPS59100579A (en) * | 1982-12-01 | 1984-06-09 | Matsushita Electronics Corp | Semiconductor device |
JPS6021561A (en) * | 1983-07-15 | 1985-02-02 | Nec Corp | Semiconductor protection device |
JPH0244156B2 (en) * | 1983-07-15 | 1990-10-02 | Nippon Electric Co | |
JPS6230361A (en) * | 1985-07-31 | 1987-02-09 | Nec Corp | Cmos input protecting circuit |
JP2010212710A (en) * | 2010-04-26 | 2010-09-24 | Fuji Electric Systems Co Ltd | Semiconductor device |
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