JPS56113107A - Preparation for plane waveguide lens - Google Patents

Preparation for plane waveguide lens

Info

Publication number
JPS56113107A
JPS56113107A JP1584380A JP1584380A JPS56113107A JP S56113107 A JPS56113107 A JP S56113107A JP 1584380 A JP1584380 A JP 1584380A JP 1584380 A JP1584380 A JP 1584380A JP S56113107 A JPS56113107 A JP S56113107A
Authority
JP
Japan
Prior art keywords
layer
projecting
clad layer
clad
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1584380A
Other languages
Japanese (ja)
Inventor
Takafumi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1584380A priority Critical patent/JPS56113107A/en
Publication of JPS56113107A publication Critical patent/JPS56113107A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G02B6/1245—Geodesic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To enable to remove the restriction of materials, and further to prevent the disorder of phase, by piling a projecting layer consisting of a prescribed other material on the clad layer whose surface is plane, and piling an optical waveguide layer whose refractive index is larger than that of said clad layer, on said projecting layer. CONSTITUTION:A clad layer 32 consisting of an SiO2 film is formed on the Si substrate. Subsequently, metallic mask 41 such as chrome, etc. having the opening of a prescribed shape such as a circle, etc. is superposed, molten quartz SiO2 is piled vertically on the surface of the clad layer 32 by means of spattering, and a projecting layer 34 having the spherical surface is formed on the lower part of the opening of a circle, etc. After that, the metallic mask 41 is removed, glass whose refractive index is higher than that of the clad layer 32 is piled on the blad layer 32 having the projecting layer 34 by means of spattering, and an optical waveguide layer 33 is formed.
JP1584380A 1980-02-12 1980-02-12 Preparation for plane waveguide lens Pending JPS56113107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1584380A JPS56113107A (en) 1980-02-12 1980-02-12 Preparation for plane waveguide lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1584380A JPS56113107A (en) 1980-02-12 1980-02-12 Preparation for plane waveguide lens

Publications (1)

Publication Number Publication Date
JPS56113107A true JPS56113107A (en) 1981-09-05

Family

ID=11900101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1584380A Pending JPS56113107A (en) 1980-02-12 1980-02-12 Preparation for plane waveguide lens

Country Status (1)

Country Link
JP (1) JPS56113107A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61188504A (en) * 1985-02-18 1986-08-22 Matsushita Electric Ind Co Ltd Preparation of optical waveguide lens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61188504A (en) * 1985-02-18 1986-08-22 Matsushita Electric Ind Co Ltd Preparation of optical waveguide lens

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