JPS56135808A - Manufacture of glass waveguide path for optical circuit - Google Patents

Manufacture of glass waveguide path for optical circuit

Info

Publication number
JPS56135808A
JPS56135808A JP3900580A JP3900580A JPS56135808A JP S56135808 A JPS56135808 A JP S56135808A JP 3900580 A JP3900580 A JP 3900580A JP 3900580 A JP3900580 A JP 3900580A JP S56135808 A JPS56135808 A JP S56135808A
Authority
JP
Japan
Prior art keywords
layer
core part
glass
substrate
transparent glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3900580A
Other languages
Japanese (ja)
Inventor
Taiji Murakami
Nobuo Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3900580A priority Critical patent/JPS56135808A/en
Publication of JPS56135808A publication Critical patent/JPS56135808A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To precisely control the sectional shape and dimensions of a core part and control the refractive index with high accuracy by forming a transparent glass layer on a glass substrate with grooves for the core part formed, removing the layer except the core part, and forming a transparent glass layer. CONSTITUTION:Thick metallic film 6 is formed on the smooth surface of glass substrate 5 and etched after a desired pattern. Using this film 6 as a mask substrate 5 is subjected to reactive sputter etching to form grooves for a core part, and residual film 6 is removed. Substrate 5 is then put in a reactor, and by feeding Si, Ge, P, B and Ti halides and O2 or steam, glass fine particle layer 7 is deposited and converted into transparent glass layer 8 by heating. After removing layer 8 except glass for the core part by etching, substrate 5 is put in a reactor, and by introducing Si, Ge, P, B and Ti halides, fluorides and O2, glass fine particle layer 9 is deposited and heated to form transparent glass layer 10.
JP3900580A 1980-03-28 1980-03-28 Manufacture of glass waveguide path for optical circuit Pending JPS56135808A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3900580A JPS56135808A (en) 1980-03-28 1980-03-28 Manufacture of glass waveguide path for optical circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3900580A JPS56135808A (en) 1980-03-28 1980-03-28 Manufacture of glass waveguide path for optical circuit

Publications (1)

Publication Number Publication Date
JPS56135808A true JPS56135808A (en) 1981-10-23

Family

ID=12540996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3900580A Pending JPS56135808A (en) 1980-03-28 1980-03-28 Manufacture of glass waveguide path for optical circuit

Country Status (1)

Country Link
JP (1) JPS56135808A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187316A (en) * 1984-10-05 1986-05-02 Nippon Telegr & Teleph Corp <Ntt> Manufacture of buried silicon film
US4931077A (en) * 1987-06-25 1990-06-05 U.S. Philips Corp. Method of manufacturing a planar optical component

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223355A (en) * 1975-08-18 1977-02-22 Nippon Telegr & Teleph Corp <Ntt> Process for fabricating a flush type light wave guiding path
JPS5370839A (en) * 1976-12-07 1978-06-23 Fujitsu Ltd Production of optical wave guide circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223355A (en) * 1975-08-18 1977-02-22 Nippon Telegr & Teleph Corp <Ntt> Process for fabricating a flush type light wave guiding path
JPS5370839A (en) * 1976-12-07 1978-06-23 Fujitsu Ltd Production of optical wave guide circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187316A (en) * 1984-10-05 1986-05-02 Nippon Telegr & Teleph Corp <Ntt> Manufacture of buried silicon film
US4931077A (en) * 1987-06-25 1990-06-05 U.S. Philips Corp. Method of manufacturing a planar optical component

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