JPS5557807A - Production of diffraction grating - Google Patents

Production of diffraction grating

Info

Publication number
JPS5557807A
JPS5557807A JP13054478A JP13054478A JPS5557807A JP S5557807 A JPS5557807 A JP S5557807A JP 13054478 A JP13054478 A JP 13054478A JP 13054478 A JP13054478 A JP 13054478A JP S5557807 A JPS5557807 A JP S5557807A
Authority
JP
Japan
Prior art keywords
grating
metal film
diffraction grating
mask
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13054478A
Other languages
Japanese (ja)
Other versions
JPH0435726B2 (en
Inventor
Shigeo Yamashita
Tadashi Fukuzawa
Michiharu Nakamura
Junichi Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13054478A priority Critical patent/JPS5557807A/en
Publication of JPS5557807A publication Critical patent/JPS5557807A/en
Publication of JPH0435726B2 publication Critical patent/JPH0435726B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images

Abstract

PURPOSE:To obtain the diffraction grating of superior performance by subsequently laminating a metal layer and photosensitive resin layer on the surface of inorganic material, forming a diffraction grating in the resin layer and etching the metal layer with said diffraction grating as a mask thence etching the inorganic material with the metal film as a mask. CONSTITUTION:For example, a glass substrate 10 is vacuum-evaporated thereon with a metal film 6 of Al or the like, on which is then coated and formed a photosensitive resin layer. A grating 15 is formed by radiating laser light followed by developing, thence with the grating 15 as a mask the metal film is ion-etched to form a metal grating 16. With the grating 16 as a mask, the substrate 1 is worked by reactive plasma etching to obtain a grating 17 thereon. The metal film 6 is removed to complete a glass diffraction grating 17. Since the metal film 6 reflects the laser 14, production of ghosts in the photosensitvie resin layer as with conventional methods wherein no metal film 6 is used is obviated and the patterns of the photosensitive resin will not collapse at the etching of the metal film. In addition, the good directivity of the reactive plasma etching enables the precision diffraction grating to be obtained.
JP13054478A 1978-10-25 1978-10-25 Production of diffraction grating Granted JPS5557807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13054478A JPS5557807A (en) 1978-10-25 1978-10-25 Production of diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13054478A JPS5557807A (en) 1978-10-25 1978-10-25 Production of diffraction grating

Publications (2)

Publication Number Publication Date
JPS5557807A true JPS5557807A (en) 1980-04-30
JPH0435726B2 JPH0435726B2 (en) 1992-06-12

Family

ID=15036812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13054478A Granted JPS5557807A (en) 1978-10-25 1978-10-25 Production of diffraction grating

Country Status (1)

Country Link
JP (1) JPS5557807A (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137118A (en) * 1980-03-29 1981-10-26 Rikagaku Kenkyusho Production of lamellar diffraction grating
JPS60103308A (en) * 1983-11-11 1985-06-07 Pioneer Electronic Corp Manufacture of micro fresnel lens
JPS60103307A (en) * 1983-11-11 1985-06-07 Pioneer Electronic Corp Manufacture of micro fresnel lens
US5436764A (en) * 1992-04-21 1995-07-25 Matsushita Electric Industrial Co., Ltd. Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
JP2011022547A (en) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd Method of forming diffraction grating
US8711482B2 (en) 2009-12-04 2014-04-29 Panasonic Corporation Pressing mold for optical lenses and method for manufacturing glass optical lenses
CN104459854A (en) * 2013-09-22 2015-03-25 清华大学 Preparation method of metal grating
US9827209B2 (en) * 2015-02-09 2017-11-28 Microsoft Technology Licensing, Llc Display system
US10018844B2 (en) 2015-02-09 2018-07-10 Microsoft Technology Licensing, Llc Wearable image display system
US10254942B2 (en) 2014-07-31 2019-04-09 Microsoft Technology Licensing, Llc Adaptive sizing and positioning of application windows
US10317677B2 (en) 2015-02-09 2019-06-11 Microsoft Technology Licensing, Llc Display system
US10592080B2 (en) 2014-07-31 2020-03-17 Microsoft Technology Licensing, Llc Assisted presentation of application windows
US10678412B2 (en) 2014-07-31 2020-06-09 Microsoft Technology Licensing, Llc Dynamic joint dividers for application windows
US11086216B2 (en) 2015-02-09 2021-08-10 Microsoft Technology Licensing, Llc Generating electronic components
CN116603700A (en) * 2022-02-08 2023-08-18 成都拓米双都光电有限公司 Preparation method of support grid plate

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137118A (en) * 1980-03-29 1981-10-26 Rikagaku Kenkyusho Production of lamellar diffraction grating
JPS60103308A (en) * 1983-11-11 1985-06-07 Pioneer Electronic Corp Manufacture of micro fresnel lens
JPS60103307A (en) * 1983-11-11 1985-06-07 Pioneer Electronic Corp Manufacture of micro fresnel lens
US5436764A (en) * 1992-04-21 1995-07-25 Matsushita Electric Industrial Co., Ltd. Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
JP2011022547A (en) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd Method of forming diffraction grating
US8711482B2 (en) 2009-12-04 2014-04-29 Panasonic Corporation Pressing mold for optical lenses and method for manufacturing glass optical lenses
CN104459854A (en) * 2013-09-22 2015-03-25 清华大学 Preparation method of metal grating
US10254942B2 (en) 2014-07-31 2019-04-09 Microsoft Technology Licensing, Llc Adaptive sizing and positioning of application windows
US10592080B2 (en) 2014-07-31 2020-03-17 Microsoft Technology Licensing, Llc Assisted presentation of application windows
US10678412B2 (en) 2014-07-31 2020-06-09 Microsoft Technology Licensing, Llc Dynamic joint dividers for application windows
US9827209B2 (en) * 2015-02-09 2017-11-28 Microsoft Technology Licensing, Llc Display system
US10018844B2 (en) 2015-02-09 2018-07-10 Microsoft Technology Licensing, Llc Wearable image display system
US10317677B2 (en) 2015-02-09 2019-06-11 Microsoft Technology Licensing, Llc Display system
US11086216B2 (en) 2015-02-09 2021-08-10 Microsoft Technology Licensing, Llc Generating electronic components
CN116603700A (en) * 2022-02-08 2023-08-18 成都拓米双都光电有限公司 Preparation method of support grid plate

Also Published As

Publication number Publication date
JPH0435726B2 (en) 1992-06-12

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