JPS5565910A - Production of optical branching and coupling device - Google Patents

Production of optical branching and coupling device

Info

Publication number
JPS5565910A
JPS5565910A JP13793378A JP13793378A JPS5565910A JP S5565910 A JPS5565910 A JP S5565910A JP 13793378 A JP13793378 A JP 13793378A JP 13793378 A JP13793378 A JP 13793378A JP S5565910 A JPS5565910 A JP S5565910A
Authority
JP
Japan
Prior art keywords
glass substrate
glass
substrate
grooves
coupling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13793378A
Other languages
Japanese (ja)
Inventor
Junji Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd filed Critical Komatsu Electronic Metals Co Ltd
Priority to JP13793378A priority Critical patent/JPS5565910A/en
Publication of JPS5565910A publication Critical patent/JPS5565910A/en
Pending legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To readily form the optical guide without producing any cracks by forming the grooves of the specified patterns on a glass substrate then placing the granular guartz glass material of the specified refractive index in said grooves and making the same to molten glass. CONSTITUTION:Acid-resistant resist 2 is coated on a glass substrate 1, and a speicified mask is formed thereon. Next, desired patterns are formed on the glass substrate through said mask, after which the acid-resistant resist 2 is removed. Thence, granular, preferably spherical quartz glass materials 3 having the refractive index higher than that of the substrate 1 are placed in the grooves formed to the desired patterns, after which the glass substrate 1 is heated to melt the glass materials 3, whereby an optical waveguide 4 is formed and the optical branching and coupling device is obtained. After the molting, the top surface of the glass substrate is polished, and if necessary, the film 5 of the same quality as that of the glass substrate is put on the top of the substrate.
JP13793378A 1978-11-10 1978-11-10 Production of optical branching and coupling device Pending JPS5565910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13793378A JPS5565910A (en) 1978-11-10 1978-11-10 Production of optical branching and coupling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13793378A JPS5565910A (en) 1978-11-10 1978-11-10 Production of optical branching and coupling device

Publications (1)

Publication Number Publication Date
JPS5565910A true JPS5565910A (en) 1980-05-17

Family

ID=15210079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13793378A Pending JPS5565910A (en) 1978-11-10 1978-11-10 Production of optical branching and coupling device

Country Status (1)

Country Link
JP (1) JPS5565910A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375312A (en) * 1980-08-07 1983-03-01 Hughes Aircraft Company Graded index waveguide structure and process for forming same
JPH01191804A (en) * 1988-01-28 1989-08-01 Teijin Seiki Co Ltd Optical waveguide and its manufacture
US4896930A (en) * 1987-03-19 1990-01-30 Hitachi, Ltd. Optical functional device of an optical waveguide type
US5480764A (en) * 1992-11-27 1996-01-02 Lockheed Missiles And Space Comapny, Inc. Gray scale microfabrication for integrated optical devices

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375312A (en) * 1980-08-07 1983-03-01 Hughes Aircraft Company Graded index waveguide structure and process for forming same
US4896930A (en) * 1987-03-19 1990-01-30 Hitachi, Ltd. Optical functional device of an optical waveguide type
JPH01191804A (en) * 1988-01-28 1989-08-01 Teijin Seiki Co Ltd Optical waveguide and its manufacture
US5480764A (en) * 1992-11-27 1996-01-02 Lockheed Missiles And Space Comapny, Inc. Gray scale microfabrication for integrated optical devices

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