JPS5527670A - Pressure-electric signal converter - Google Patents
Pressure-electric signal converterInfo
- Publication number
- JPS5527670A JPS5527670A JP10114678A JP10114678A JPS5527670A JP S5527670 A JPS5527670 A JP S5527670A JP 10114678 A JP10114678 A JP 10114678A JP 10114678 A JP10114678 A JP 10114678A JP S5527670 A JPS5527670 A JP S5527670A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- pressure
- protecting film
- thermal expansion
- signal converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10114678A JPS5527670A (en) | 1978-08-18 | 1978-08-18 | Pressure-electric signal converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10114678A JPS5527670A (en) | 1978-08-18 | 1978-08-18 | Pressure-electric signal converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5527670A true JPS5527670A (en) | 1980-02-27 |
Family
ID=14292927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10114678A Pending JPS5527670A (en) | 1978-08-18 | 1978-08-18 | Pressure-electric signal converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5527670A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138383A (ja) * | 1983-01-28 | 1984-08-08 | Fujikura Ltd | 半導体圧力センサ |
JPS60253279A (ja) * | 1984-05-29 | 1985-12-13 | Toyota Central Res & Dev Lab Inc | 半導体歪み測定器 |
-
1978
- 1978-08-18 JP JP10114678A patent/JPS5527670A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138383A (ja) * | 1983-01-28 | 1984-08-08 | Fujikura Ltd | 半導体圧力センサ |
JPS60253279A (ja) * | 1984-05-29 | 1985-12-13 | Toyota Central Res & Dev Lab Inc | 半導体歪み測定器 |
JPH0337750B2 (ja) * | 1984-05-29 | 1991-06-06 | Toyoda Chuo Kenkyusho Kk |
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