JPS536579A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS536579A
JPS536579A JP8058976A JP8058976A JPS536579A JP S536579 A JPS536579 A JP S536579A JP 8058976 A JP8058976 A JP 8058976A JP 8058976 A JP8058976 A JP 8058976A JP S536579 A JPS536579 A JP S536579A
Authority
JP
Japan
Prior art keywords
semiconductor device
sosmos
coplaner
sio
designing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8058976A
Other languages
Japanese (ja)
Other versions
JPS5534587B2 (en
Inventor
Shinji Onga
Yoshio Nishi
Kazumichi Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8058976A priority Critical patent/JPS536579A/en
Publication of JPS536579A publication Critical patent/JPS536579A/en
Publication of JPS5534587B2 publication Critical patent/JPS5534587B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a SOSMOS of high mobility by designing the channel direction on a (001) Si layer in the [100] Si direction and isolating elements with an SiO2 film by a coplaner method.
COPYRIGHT: (C)1978,JPO&Japio
JP8058976A 1976-07-07 1976-07-07 Semiconductor device Granted JPS536579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8058976A JPS536579A (en) 1976-07-07 1976-07-07 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8058976A JPS536579A (en) 1976-07-07 1976-07-07 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS536579A true JPS536579A (en) 1978-01-21
JPS5534587B2 JPS5534587B2 (en) 1980-09-08

Family

ID=13722519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8058976A Granted JPS536579A (en) 1976-07-07 1976-07-07 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS536579A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0046011A2 (en) * 1980-07-18 1982-02-17 Fujitsu Limited Semiconductor memory device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568771U (en) * 1978-11-06 1980-05-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0046011A2 (en) * 1980-07-18 1982-02-17 Fujitsu Limited Semiconductor memory device
EP0046011B1 (en) * 1980-07-18 1986-12-30 Fujitsu Limited Semiconductor memory device

Also Published As

Publication number Publication date
JPS5534587B2 (en) 1980-09-08

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