JPS52116184A - Semiconductor type displacement/conversion unit and its manufacture - Google Patents
Semiconductor type displacement/conversion unit and its manufactureInfo
- Publication number
- JPS52116184A JPS52116184A JP3263076A JP3263076A JPS52116184A JP S52116184 A JPS52116184 A JP S52116184A JP 3263076 A JP3263076 A JP 3263076A JP 3263076 A JP3263076 A JP 3263076A JP S52116184 A JPS52116184 A JP S52116184A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- conversion unit
- type displacement
- semiconductor type
- distortion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
PURPOSE: The insulating material and semiconductor material are formed through lamination to one main surface of semiconductor single crystal on the other main surface of which the distortion response region is formed, and this surface is adhered to distortion measuring material coated by metal film. As a result, the distortion which remains after adhesion is eliminated to obtain linear output.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3263076A JPS52116184A (en) | 1976-03-26 | 1976-03-26 | Semiconductor type displacement/conversion unit and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3263076A JPS52116184A (en) | 1976-03-26 | 1976-03-26 | Semiconductor type displacement/conversion unit and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52116184A true JPS52116184A (en) | 1977-09-29 |
Family
ID=12364159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3263076A Pending JPS52116184A (en) | 1976-03-26 | 1976-03-26 | Semiconductor type displacement/conversion unit and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52116184A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54102884A (en) * | 1978-01-30 | 1979-08-13 | Hitachi Ltd | Semiconductor displacement coverter |
-
1976
- 1976-03-26 JP JP3263076A patent/JPS52116184A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54102884A (en) * | 1978-01-30 | 1979-08-13 | Hitachi Ltd | Semiconductor displacement coverter |
JPS6222469B2 (en) * | 1978-01-30 | 1987-05-18 | Hitachi Ltd |
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