JPS55132937A - Defect detector - Google Patents

Defect detector

Info

Publication number
JPS55132937A
JPS55132937A JP4149179A JP4149179A JPS55132937A JP S55132937 A JPS55132937 A JP S55132937A JP 4149179 A JP4149179 A JP 4149179A JP 4149179 A JP4149179 A JP 4149179A JP S55132937 A JPS55132937 A JP S55132937A
Authority
JP
Japan
Prior art keywords
projector
main
tip
disposed
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4149179A
Other languages
English (en)
Inventor
Yoshinobu Kashiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP4149179A priority Critical patent/JPS55132937A/ja
Publication of JPS55132937A publication Critical patent/JPS55132937A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4149179A 1979-04-04 1979-04-04 Defect detector Pending JPS55132937A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4149179A JPS55132937A (en) 1979-04-04 1979-04-04 Defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4149179A JPS55132937A (en) 1979-04-04 1979-04-04 Defect detector

Publications (1)

Publication Number Publication Date
JPS55132937A true JPS55132937A (en) 1980-10-16

Family

ID=12609813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4149179A Pending JPS55132937A (en) 1979-04-04 1979-04-04 Defect detector

Country Status (1)

Country Link
JP (1) JPS55132937A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157037A (ja) * 1984-01-26 1985-08-17 Hajime Sangyo Kk 物体の表面検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036189A (ja) * 1973-07-31 1975-04-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036189A (ja) * 1973-07-31 1975-04-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157037A (ja) * 1984-01-26 1985-08-17 Hajime Sangyo Kk 物体の表面検査装置
JPH0570101B2 (ja) * 1984-01-26 1993-10-04 Hajime Sangyo

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