JPS6488240A - Inspection of photosensitive material - Google Patents
Inspection of photosensitive materialInfo
- Publication number
- JPS6488240A JPS6488240A JP24436887A JP24436887A JPS6488240A JP S6488240 A JPS6488240 A JP S6488240A JP 24436887 A JP24436887 A JP 24436887A JP 24436887 A JP24436887 A JP 24436887A JP S6488240 A JPS6488240 A JP S6488240A
- Authority
- JP
- Japan
- Prior art keywords
- light
- polarized light
- receiving part
- discoloration
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE:To detect a discoloration defect with high accuracy, in a inspection method for performing inspection by irradiating a photosensitive material with light having polarized light of a wavelength characteristic not substantially sensitizing said material, by using P-polarized light as the polarized light. CONSTITUTION:A light source 10, an ND filter 34, a rotary scanner 35, a magnifying reflected light receiving part 40 and a regular reflected light receiving part 41 are mounted on the title apparatus. A photosensitive material A is scanned by the light having P-polarized light from the light source 10 through the filter 34, the scanner 35 and an Ftheta lens 36 and the reflected light from the material A is detected by the light receiving parts 40, 41. Then, the P- polarized light is allowed to be incident to the flaw place 50 due to discoloration of the material A to form diffused reflected light which is, in turn, received by the light receiving part 40. Therefore, the flaw due to discoloration generated not only on the surface of the material A but also in the material A can be detected with high accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24436887A JPH0731133B2 (en) | 1987-09-30 | 1987-09-30 | Inspection method for photosensitive materials |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24436887A JPH0731133B2 (en) | 1987-09-30 | 1987-09-30 | Inspection method for photosensitive materials |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6488240A true JPS6488240A (en) | 1989-04-03 |
JPH0731133B2 JPH0731133B2 (en) | 1995-04-10 |
Family
ID=17117655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24436887A Expired - Lifetime JPH0731133B2 (en) | 1987-09-30 | 1987-09-30 | Inspection method for photosensitive materials |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0731133B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5182850A (en) * | 1991-01-25 | 1993-02-02 | Seiko Epson Corporation | Parts assembling device |
JPH06281589A (en) * | 1993-03-26 | 1994-10-07 | Mitsui Mining & Smelting Co Ltd | Defect evaluating apparatus |
-
1987
- 1987-09-30 JP JP24436887A patent/JPH0731133B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5182850A (en) * | 1991-01-25 | 1993-02-02 | Seiko Epson Corporation | Parts assembling device |
JPH06281589A (en) * | 1993-03-26 | 1994-10-07 | Mitsui Mining & Smelting Co Ltd | Defect evaluating apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0731133B2 (en) | 1995-04-10 |
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