JPS57173705A - Method for checking mask for printed substrate - Google Patents
Method for checking mask for printed substrateInfo
- Publication number
- JPS57173705A JPS57173705A JP5864381A JP5864381A JPS57173705A JP S57173705 A JPS57173705 A JP S57173705A JP 5864381 A JP5864381 A JP 5864381A JP 5864381 A JP5864381 A JP 5864381A JP S57173705 A JPS57173705 A JP S57173705A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- light
- concave
- pattern
- convex parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE:To avoid the detection of the concave and convex parts, on which a pattern is not described, as defective product, in checking of the mask for the printed substrate, by adjusting the scattering degree of the illuminating light for the mask. CONSTITUTION:The illuminating light 2 is applied to the mask 1 for the transparent printed substrate on which the pattern is described, and the image of the mask 1 is projected on a pattern detector 4 through a lens 3. The output 5 from the detector is processed in an image processor 6, and the defects are detected. If the concave and convex parts are present at the part where the pattern is not described on the mask, the illuminated light is refracted from the slant surfaces of said concave and convex parts and does not reach a lens. Therefore it might be regarded as the defect. By using a scattering plate 8, an angle is imparted to the incident light axis of the illuminating light to the mask so that the light can reach the lens even though it is refracted. Since the detecting capability for the concave and convex parts is determined by the degree of parallelism of the transmitted light, it is recommended that a plurality of the scattering plates having different scattering degress are prepared.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5864381A JPS57173705A (en) | 1981-04-20 | 1981-04-20 | Method for checking mask for printed substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5864381A JPS57173705A (en) | 1981-04-20 | 1981-04-20 | Method for checking mask for printed substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57173705A true JPS57173705A (en) | 1982-10-26 |
| JPS637602B2 JPS637602B2 (en) | 1988-02-17 |
Family
ID=13090256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5864381A Granted JPS57173705A (en) | 1981-04-20 | 1981-04-20 | Method for checking mask for printed substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57173705A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005351671A (en) * | 2004-06-08 | 2005-12-22 | Canon Inc | Recording sheet detector, control method for recording sheet detector, information recorder, control method for information recorder, and control program |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03124519A (en) * | 1989-09-29 | 1991-05-28 | Kataoka Bussan Kk | Manufacture of tea bag and apparatus |
| JPH03162222A (en) * | 1989-11-22 | 1991-07-12 | Kataoka Bussan Kk | Apparatus for manufacturing tetrahedron tea bag |
-
1981
- 1981-04-20 JP JP5864381A patent/JPS57173705A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005351671A (en) * | 2004-06-08 | 2005-12-22 | Canon Inc | Recording sheet detector, control method for recording sheet detector, information recorder, control method for information recorder, and control program |
| JP4546161B2 (en) * | 2004-06-08 | 2010-09-15 | キヤノン株式会社 | Recording sheet detection apparatus and information recording apparatus |
| US8068237B2 (en) | 2004-06-08 | 2011-11-29 | Canon Kabushiki Kaisha | Sheet type detection device that determines thickness and surface roughness of a sheet |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS637602B2 (en) | 1988-02-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1226348A (en) | Inspection system utilizing dark-field illumination | |
| CA2151344A1 (en) | Lens inspection system and method | |
| JPS5629108A (en) | Electronic photometry sensor system for thread and hole | |
| KR960008272A (en) | Optical inspection of vessel finish dimension parameters | |
| US2429331A (en) | Photoelectric apparatus for inspection of paper strips | |
| KR930010527A (en) | Surface condition inspection method using irradiation and its device | |
| JPS647618A (en) | Method and apparatus for exposing semiconductor | |
| JPS54101390A (en) | Foreign matter inspector | |
| JPS5594145A (en) | Method of and device for inspecting surface of article | |
| JPH08334469A (en) | Detector for package such as tablet | |
| JPS57173705A (en) | Method for checking mask for printed substrate | |
| JPS55149830A (en) | Inspection apparatus for appearance of spherical body | |
| JPS56157841A (en) | Detecting apparatus for surface defect of body | |
| JPS5779454A (en) | Detection of pattern used for analysis based on amynological agglutination reaction | |
| DK0528915T3 (en) | Method and apparatus for determining the image clarity of a surface | |
| JPS5667739A (en) | Defect inspecting apparatus | |
| JPS57189046A (en) | Inspecting device for surface defect | |
| JPS57186106A (en) | Inspection device for surface | |
| JPS56126745A (en) | Automatic inspecting device for surface of plate material | |
| JPS5737253A (en) | Defect detection device for transparent body | |
| JPS60222756A (en) | Foreign matter inspector | |
| JPH03181807A (en) | Visual apparatus | |
| JPS6423145A (en) | Optical appearance inspection device | |
| JPS5754803A (en) | Inspecting device for transparent pattern | |
| JPS572522A (en) | Defect inspecting device for regular pattern |