JPS5667739A - Defect inspecting apparatus - Google Patents

Defect inspecting apparatus

Info

Publication number
JPS5667739A
JPS5667739A JP14281679A JP14281679A JPS5667739A JP S5667739 A JPS5667739 A JP S5667739A JP 14281679 A JP14281679 A JP 14281679A JP 14281679 A JP14281679 A JP 14281679A JP S5667739 A JPS5667739 A JP S5667739A
Authority
JP
Japan
Prior art keywords
point
beams
reflected
defect inspection
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14281679A
Other languages
Japanese (ja)
Other versions
JPH0254494B2 (en
Inventor
Akito Iwamoto
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14281679A priority Critical patent/JPS5667739A/en
Publication of JPS5667739A publication Critical patent/JPS5667739A/en
Publication of JPH0254494B2 publication Critical patent/JPH0254494B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To improve a defect inspection reliably by employing a plurality of coherent light beams applied from different directions to each other. CONSTITUTION:Laser beams 101-103 from laser sources 51-53 at different positions from each other are applied to a point P on the surface of an object 1 being inspected, with incident angles of 1-3 deg., in other words, the beams 101-103 are applied nearly parallel to the surface of the object 1, and reflected from the point P to be reflected-lights 201-203. The light scattering at the point P is led to a photodetector 7 through a lens system 6 set vertically to the object 1. Therefore, the specular-reflection components of the laser beams are removed and only signals (scattered light) from a minute defect are received. Moreover, a rotating mechanism 3 and a moving mechanism 4 permit the beam irradiation point P to spirally scan the surface of the object 1. By this, the reliability of the defect inspection can be improved.
JP14281679A 1979-11-06 1979-11-06 Defect inspecting apparatus Granted JPS5667739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14281679A JPS5667739A (en) 1979-11-06 1979-11-06 Defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14281679A JPS5667739A (en) 1979-11-06 1979-11-06 Defect inspecting apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP23887691A Division JPH0545303A (en) 1991-08-27 1991-08-27 Defect inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS5667739A true JPS5667739A (en) 1981-06-08
JPH0254494B2 JPH0254494B2 (en) 1990-11-21

Family

ID=15324286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14281679A Granted JPS5667739A (en) 1979-11-06 1979-11-06 Defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5667739A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261045A (en) * 1986-05-06 1987-11-13 Hitachi Electronics Eng Co Ltd Surface inspecting device
JPH0545303A (en) * 1991-08-27 1993-02-23 Toshiba Corp Defect inspecting apparatus
US7154597B2 (en) 2003-06-30 2006-12-26 Kabushiki Kaisha Topcon Method for inspecting surface and apparatus for inspecting it
US7245366B2 (en) 2003-06-10 2007-07-17 Kabushiki Kaisha Topcon Surface inspection method and surface inspection apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4573308B2 (en) * 2008-04-03 2010-11-04 芝浦メカトロニクス株式会社 Surface inspection apparatus and method
JP5946751B2 (en) * 2012-11-08 2016-07-06 株式会社日立ハイテクノロジーズ Defect detection method and apparatus, and defect observation method and apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261045A (en) * 1986-05-06 1987-11-13 Hitachi Electronics Eng Co Ltd Surface inspecting device
JPH0545303A (en) * 1991-08-27 1993-02-23 Toshiba Corp Defect inspecting apparatus
US7245366B2 (en) 2003-06-10 2007-07-17 Kabushiki Kaisha Topcon Surface inspection method and surface inspection apparatus
US7154597B2 (en) 2003-06-30 2006-12-26 Kabushiki Kaisha Topcon Method for inspecting surface and apparatus for inspecting it

Also Published As

Publication number Publication date
JPH0254494B2 (en) 1990-11-21

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