JPS5759153A - Detector for surface characteristic - Google Patents

Detector for surface characteristic

Info

Publication number
JPS5759153A
JPS5759153A JP13382080A JP13382080A JPS5759153A JP S5759153 A JPS5759153 A JP S5759153A JP 13382080 A JP13382080 A JP 13382080A JP 13382080 A JP13382080 A JP 13382080A JP S5759153 A JPS5759153 A JP S5759153A
Authority
JP
Japan
Prior art keywords
deflector
reflected
flaws
detector
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13382080A
Other languages
Japanese (ja)
Inventor
Mamoru Kawahara
Hisao Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Priority to JP13382080A priority Critical patent/JPS5759153A/en
Publication of JPS5759153A publication Critical patent/JPS5759153A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To detect surface roughness and surface flaws accurately and efficiently by determining the irregular reflected light component from a specimen surface. CONSTITUTION:The laser beam incident to a deflector 3 is reflected by the reflection surface 4 of a deflector 3 to the direction perpendicular to a specimen surface 1 and is made incident to the specimen surface 1. The laser beam reflected perpendicularly from the surface 1 advances reversely in the deflector 3 and only the irregularly reflected light is collected by a lens barrel 2, and is detected with a detector 7, after which it is processed with a processing device 8. Surface roughness and surface flaws are detected accurately and efficiently by such system of photodetecting only the erregularly reflected components corresponding to the surface roughness and surface flaws and processing the same.
JP13382080A 1980-09-25 1980-09-25 Detector for surface characteristic Pending JPS5759153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13382080A JPS5759153A (en) 1980-09-25 1980-09-25 Detector for surface characteristic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13382080A JPS5759153A (en) 1980-09-25 1980-09-25 Detector for surface characteristic

Publications (1)

Publication Number Publication Date
JPS5759153A true JPS5759153A (en) 1982-04-09

Family

ID=15113798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13382080A Pending JPS5759153A (en) 1980-09-25 1980-09-25 Detector for surface characteristic

Country Status (1)

Country Link
JP (1) JPS5759153A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0624787A1 (en) * 1993-03-29 1994-11-17 Tencor Instruments Method and device for non-distructive testing of surfaces

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129988A (en) * 1974-09-06 1976-03-13 Canon Kk HYOMENKENSAHOHO
JPS5224554A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Surface inspection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129988A (en) * 1974-09-06 1976-03-13 Canon Kk HYOMENKENSAHOHO
JPS5224554A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Surface inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0624787A1 (en) * 1993-03-29 1994-11-17 Tencor Instruments Method and device for non-distructive testing of surfaces

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