JPS5056154A - - Google Patents
Info
- Publication number
- JPS5056154A JPS5056154A JP10305773A JP10305773A JPS5056154A JP S5056154 A JPS5056154 A JP S5056154A JP 10305773 A JP10305773 A JP 10305773A JP 10305773 A JP10305773 A JP 10305773A JP S5056154 A JPS5056154 A JP S5056154A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10305773A JPS5056154A (ja) | 1973-09-14 | 1973-09-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10305773A JPS5056154A (ja) | 1973-09-14 | 1973-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5056154A true JPS5056154A (ja) | 1975-05-16 |
Family
ID=14344030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10305773A Pending JPS5056154A (ja) | 1973-09-14 | 1973-09-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5056154A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5348476A (en) * | 1976-10-14 | 1978-05-01 | Matsushita Electric Ind Co Ltd | Production of semiconductor device and production apparatus for the same |
JPS55113321A (en) * | 1979-02-23 | 1980-09-01 | Hitachi Ltd | Jig for heat treatment |
JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |
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1973
- 1973-09-14 JP JP10305773A patent/JPS5056154A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5348476A (en) * | 1976-10-14 | 1978-05-01 | Matsushita Electric Ind Co Ltd | Production of semiconductor device and production apparatus for the same |
JPS579487B2 (ja) * | 1976-10-14 | 1982-02-22 | ||
JPS55113321A (en) * | 1979-02-23 | 1980-09-01 | Hitachi Ltd | Jig for heat treatment |
JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |