JPS5435690A - Manufacture of semiconductor device of multilayer wiring type - Google Patents
Manufacture of semiconductor device of multilayer wiring typeInfo
- Publication number
- JPS5435690A JPS5435690A JP10207677A JP10207677A JPS5435690A JP S5435690 A JPS5435690 A JP S5435690A JP 10207677 A JP10207677 A JP 10207677A JP 10207677 A JP10207677 A JP 10207677A JP S5435690 A JPS5435690 A JP S5435690A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- multilayer wiring
- wiring type
- hole part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10207677A JPS5435690A (en) | 1977-08-24 | 1977-08-24 | Manufacture of semiconductor device of multilayer wiring type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10207677A JPS5435690A (en) | 1977-08-24 | 1977-08-24 | Manufacture of semiconductor device of multilayer wiring type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5435690A true JPS5435690A (en) | 1979-03-15 |
Family
ID=14317670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10207677A Pending JPS5435690A (en) | 1977-08-24 | 1977-08-24 | Manufacture of semiconductor device of multilayer wiring type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5435690A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117909A (ja) * | 1981-12-29 | 1983-07-13 | Matsushita Electric Ind Co Ltd | 石油燃焼器 |
JPS58219328A (ja) * | 1982-06-15 | 1983-12-20 | Matsushita Electric Ind Co Ltd | 液体燃料燃焼装置 |
-
1977
- 1977-08-24 JP JP10207677A patent/JPS5435690A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117909A (ja) * | 1981-12-29 | 1983-07-13 | Matsushita Electric Ind Co Ltd | 石油燃焼器 |
JPS58219328A (ja) * | 1982-06-15 | 1983-12-20 | Matsushita Electric Ind Co Ltd | 液体燃料燃焼装置 |
JPS6315490B2 (ja) * | 1982-06-15 | 1988-04-05 | Matsushita Electric Ind Co Ltd |
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