JPS5326691A - Multi-layer wiring struc ture - Google Patents

Multi-layer wiring struc ture

Info

Publication number
JPS5326691A
JPS5326691A JP10062576A JP10062576A JPS5326691A JP S5326691 A JPS5326691 A JP S5326691A JP 10062576 A JP10062576 A JP 10062576A JP 10062576 A JP10062576 A JP 10062576A JP S5326691 A JPS5326691 A JP S5326691A
Authority
JP
Japan
Prior art keywords
layer wiring
struc ture
wiring
forming
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10062576A
Other languages
Japanese (ja)
Inventor
Yoshio Honma
Hisao Nozawa
Yukiyoshi Harada
Tadao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10062576A priority Critical patent/JPS5326691A/en
Publication of JPS5326691A publication Critical patent/JPS5326691A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To increase the integration density of the upper wiring for a multi-layer wiring via an insulator layer, by forming an identical connection part area between the upper and lower wiring or forming the upper wiring smaller than the lower wiring.
COPYRIGHT: (C)1978,JPO&Japio
JP10062576A 1976-08-25 1976-08-25 Multi-layer wiring struc ture Pending JPS5326691A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10062576A JPS5326691A (en) 1976-08-25 1976-08-25 Multi-layer wiring struc ture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10062576A JPS5326691A (en) 1976-08-25 1976-08-25 Multi-layer wiring struc ture

Publications (1)

Publication Number Publication Date
JPS5326691A true JPS5326691A (en) 1978-03-11

Family

ID=14279008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062576A Pending JPS5326691A (en) 1976-08-25 1976-08-25 Multi-layer wiring struc ture

Country Status (1)

Country Link
JP (1) JPS5326691A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077420A (en) * 1983-10-04 1985-05-02 Seiko Epson Corp Semiconductor device
JPH02235331A (en) * 1989-03-09 1990-09-18 Hitachi Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077420A (en) * 1983-10-04 1985-05-02 Seiko Epson Corp Semiconductor device
JPH02235331A (en) * 1989-03-09 1990-09-18 Hitachi Ltd Manufacture of semiconductor device

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