JPS5326691A - Multi-layer wiring struc ture - Google Patents
Multi-layer wiring struc tureInfo
- Publication number
- JPS5326691A JPS5326691A JP10062576A JP10062576A JPS5326691A JP S5326691 A JPS5326691 A JP S5326691A JP 10062576 A JP10062576 A JP 10062576A JP 10062576 A JP10062576 A JP 10062576A JP S5326691 A JPS5326691 A JP S5326691A
- Authority
- JP
- Japan
- Prior art keywords
- layer wiring
- struc ture
- wiring
- forming
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To increase the integration density of the upper wiring for a multi-layer wiring via an insulator layer, by forming an identical connection part area between the upper and lower wiring or forming the upper wiring smaller than the lower wiring.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062576A JPS5326691A (en) | 1976-08-25 | 1976-08-25 | Multi-layer wiring struc ture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062576A JPS5326691A (en) | 1976-08-25 | 1976-08-25 | Multi-layer wiring struc ture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5326691A true JPS5326691A (en) | 1978-03-11 |
Family
ID=14279008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10062576A Pending JPS5326691A (en) | 1976-08-25 | 1976-08-25 | Multi-layer wiring struc ture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5326691A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6077420A (en) * | 1983-10-04 | 1985-05-02 | Seiko Epson Corp | Semiconductor device |
JPH02235331A (en) * | 1989-03-09 | 1990-09-18 | Hitachi Ltd | Manufacture of semiconductor device |
-
1976
- 1976-08-25 JP JP10062576A patent/JPS5326691A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6077420A (en) * | 1983-10-04 | 1985-05-02 | Seiko Epson Corp | Semiconductor device |
JPH02235331A (en) * | 1989-03-09 | 1990-09-18 | Hitachi Ltd | Manufacture of semiconductor device |
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