JPS53114350A - Semiconductor and its manufacture - Google Patents

Semiconductor and its manufacture

Info

Publication number
JPS53114350A
JPS53114350A JP2801377A JP2801377A JPS53114350A JP S53114350 A JPS53114350 A JP S53114350A JP 2801377 A JP2801377 A JP 2801377A JP 2801377 A JP2801377 A JP 2801377A JP S53114350 A JPS53114350 A JP S53114350A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
mof
laminate
react
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2801377A
Other languages
Japanese (ja)
Inventor
Iwao Higashinakagaha
Shohei Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2801377A priority Critical patent/JPS53114350A/en
Publication of JPS53114350A publication Critical patent/JPS53114350A/en
Pending legal-status Critical Current

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Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To laminate an Al wiring layer, by making high-melting-point metal such as Ti or chloride such as Si react on MoF6 or WF6 so as to provide selectively an alloy layer of Mo or W only inside the connection hole of a semiconductor insulating film.
COPYRIGHT: (C)1978,JPO&Japio
JP2801377A 1977-03-16 1977-03-16 Semiconductor and its manufacture Pending JPS53114350A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2801377A JPS53114350A (en) 1977-03-16 1977-03-16 Semiconductor and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2801377A JPS53114350A (en) 1977-03-16 1977-03-16 Semiconductor and its manufacture

Publications (1)

Publication Number Publication Date
JPS53114350A true JPS53114350A (en) 1978-10-05

Family

ID=12236881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2801377A Pending JPS53114350A (en) 1977-03-16 1977-03-16 Semiconductor and its manufacture

Country Status (1)

Country Link
JP (1) JPS53114350A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776833A (en) * 1980-09-04 1982-05-14 Applied Materials Inc Heat resistant metal depositing method and product thereof
JPS5818965A (en) * 1981-07-28 1983-02-03 Toshiba Corp Manufacture of semiconductor device
JPS6050920A (en) * 1983-08-30 1985-03-22 Toshiba Corp Manufacture of semiconductor device
JPS60119750A (en) * 1983-12-02 1985-06-27 Hitachi Ltd Manufacture of semiconductor device
JPS62204523A (en) * 1986-03-04 1987-09-09 Nec Corp Forming method for contact electrode
JPS6419721A (en) * 1988-03-25 1989-01-23 Seiko Epson Corp Integrated circuit
JPS6419720A (en) * 1988-03-25 1989-01-23 Seiko Epson Corp Integrated circuit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776833A (en) * 1980-09-04 1982-05-14 Applied Materials Inc Heat resistant metal depositing method and product thereof
JPS5818965A (en) * 1981-07-28 1983-02-03 Toshiba Corp Manufacture of semiconductor device
JPS6050920A (en) * 1983-08-30 1985-03-22 Toshiba Corp Manufacture of semiconductor device
JPS60119750A (en) * 1983-12-02 1985-06-27 Hitachi Ltd Manufacture of semiconductor device
JPH0586653B2 (en) * 1983-12-02 1993-12-13 Hitachi Ltd
JPS62204523A (en) * 1986-03-04 1987-09-09 Nec Corp Forming method for contact electrode
JPS6419721A (en) * 1988-03-25 1989-01-23 Seiko Epson Corp Integrated circuit
JPS6419720A (en) * 1988-03-25 1989-01-23 Seiko Epson Corp Integrated circuit

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