JPS54126695A - Forming method for vapor phase grown film - Google Patents
Forming method for vapor phase grown filmInfo
- Publication number
- JPS54126695A JPS54126695A JP3430478A JP3430478A JPS54126695A JP S54126695 A JPS54126695 A JP S54126695A JP 3430478 A JP3430478 A JP 3430478A JP 3430478 A JP3430478 A JP 3430478A JP S54126695 A JPS54126695 A JP S54126695A
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- ascl
- impurity
- phase grown
- added
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain an impurity-added uniform vapor phase grown film by introducing hydride and chloride of the impurity into a reaction tube at the same time and forming a Si-based or Si-contg. vapor phase grown film.
CONSTITUTION: In case a high concn. As-added vapor phase grown film is simultaneously formed in vapor phase growth of SiO2 using SiH4 and O2, AsH3 and AsCl3 are used as impurity sources. AsH3 is fed in the form of gas, yet since AsCl3 is liquid at ordinary temp., an inert gas such as Ar or N2 is passed through liquid AsCl3 and AsCl3 vapor contained in the gas is utilized. Accordingly, the addn. of the sources increases SiO2 vapor phase growing speed. By controlling the amt. of the sources added, conditions about equal to those with no impurity can be attained and an As-added uniform vapor phase grown SiO2 film is obtd. almost all over the tube inside.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3430478A JPS54126695A (en) | 1978-03-24 | 1978-03-24 | Forming method for vapor phase grown film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3430478A JPS54126695A (en) | 1978-03-24 | 1978-03-24 | Forming method for vapor phase grown film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54126695A true JPS54126695A (en) | 1979-10-02 |
Family
ID=12410409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3430478A Pending JPS54126695A (en) | 1978-03-24 | 1978-03-24 | Forming method for vapor phase grown film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54126695A (en) |
-
1978
- 1978-03-24 JP JP3430478A patent/JPS54126695A/en active Pending
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