JPS543482A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS543482A JPS543482A JP6790277A JP6790277A JPS543482A JP S543482 A JPS543482 A JP S543482A JP 6790277 A JP6790277 A JP 6790277A JP 6790277 A JP6790277 A JP 6790277A JP S543482 A JPS543482 A JP S543482A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- groove
- forming
- insulator film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To secure a formation of the flat element with a minute element isolation as well as to reduce the parasitic capacity, by forming the insulator film only to the groove which is formed selectively to the test sample containing a high density buried layer and then forming the element within the island utilizing the insulator film with an insulator filled into the groove.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790277A JPS543482A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790277A JPS543482A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS543482A true JPS543482A (en) | 1979-01-11 |
Family
ID=13358279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6790277A Pending JPS543482A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS543482A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6375077A (en) * | 1986-09-18 | 1988-04-05 | Hodogaya Chem Co Ltd | Resin powder coating composition for electrostatic coating |
US5011788A (en) * | 1982-09-29 | 1991-04-30 | Hitachi, Ltd. | Process of manufacturing semiconductor integrated circuit device and product formed thereby |
-
1977
- 1977-06-10 JP JP6790277A patent/JPS543482A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5011788A (en) * | 1982-09-29 | 1991-04-30 | Hitachi, Ltd. | Process of manufacturing semiconductor integrated circuit device and product formed thereby |
JPS6375077A (en) * | 1986-09-18 | 1988-04-05 | Hodogaya Chem Co Ltd | Resin powder coating composition for electrostatic coating |
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