JPS543482A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS543482A
JPS543482A JP6790277A JP6790277A JPS543482A JP S543482 A JPS543482 A JP S543482A JP 6790277 A JP6790277 A JP 6790277A JP 6790277 A JP6790277 A JP 6790277A JP S543482 A JPS543482 A JP S543482A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
groove
forming
insulator film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6790277A
Other languages
Japanese (ja)
Inventor
Mitsuo Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6790277A priority Critical patent/JPS543482A/en
Publication of JPS543482A publication Critical patent/JPS543482A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To secure a formation of the flat element with a minute element isolation as well as to reduce the parasitic capacity, by forming the insulator film only to the groove which is formed selectively to the test sample containing a high density buried layer and then forming the element within the island utilizing the insulator film with an insulator filled into the groove.
COPYRIGHT: (C)1979,JPO&Japio
JP6790277A 1977-06-10 1977-06-10 Manufacture of semiconductor device Pending JPS543482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6790277A JPS543482A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6790277A JPS543482A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS543482A true JPS543482A (en) 1979-01-11

Family

ID=13358279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6790277A Pending JPS543482A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS543482A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375077A (en) * 1986-09-18 1988-04-05 Hodogaya Chem Co Ltd Resin powder coating composition for electrostatic coating
US5011788A (en) * 1982-09-29 1991-04-30 Hitachi, Ltd. Process of manufacturing semiconductor integrated circuit device and product formed thereby

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5011788A (en) * 1982-09-29 1991-04-30 Hitachi, Ltd. Process of manufacturing semiconductor integrated circuit device and product formed thereby
JPS6375077A (en) * 1986-09-18 1988-04-05 Hodogaya Chem Co Ltd Resin powder coating composition for electrostatic coating

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