JPS5374362A - Wiring structure for electronic parts - Google Patents
Wiring structure for electronic partsInfo
- Publication number
- JPS5374362A JPS5374362A JP14969176A JP14969176A JPS5374362A JP S5374362 A JPS5374362 A JP S5374362A JP 14969176 A JP14969176 A JP 14969176A JP 14969176 A JP14969176 A JP 14969176A JP S5374362 A JPS5374362 A JP S5374362A
- Authority
- JP
- Japan
- Prior art keywords
- electronic parts
- wiring structure
- sputtering
- forming
- highly reliable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To form a highly reliable wiring layer by forming Al double layer through a sputtering or ion plating and vacuum evaporation method.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14969176A JPS5374362A (en) | 1976-12-15 | 1976-12-15 | Wiring structure for electronic parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14969176A JPS5374362A (en) | 1976-12-15 | 1976-12-15 | Wiring structure for electronic parts |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5374362A true JPS5374362A (en) | 1978-07-01 |
Family
ID=15480689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14969176A Pending JPS5374362A (en) | 1976-12-15 | 1976-12-15 | Wiring structure for electronic parts |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374362A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018119917A1 (en) | 2017-08-31 | 2019-02-28 | Toyo Tire & Rubber Co., Ltd. | tire |
-
1976
- 1976-12-15 JP JP14969176A patent/JPS5374362A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018119917A1 (en) | 2017-08-31 | 2019-02-28 | Toyo Tire & Rubber Co., Ltd. | tire |
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