JPS5374362A - Wiring structure for electronic parts - Google Patents

Wiring structure for electronic parts

Info

Publication number
JPS5374362A
JPS5374362A JP14969176A JP14969176A JPS5374362A JP S5374362 A JPS5374362 A JP S5374362A JP 14969176 A JP14969176 A JP 14969176A JP 14969176 A JP14969176 A JP 14969176A JP S5374362 A JPS5374362 A JP S5374362A
Authority
JP
Japan
Prior art keywords
electronic parts
wiring structure
sputtering
forming
highly reliable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14969176A
Other languages
Japanese (ja)
Inventor
Ryoichi Fukuyama
Makoto Sakamoto
Norimasa Miyamoto
Toshio Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14969176A priority Critical patent/JPS5374362A/en
Publication of JPS5374362A publication Critical patent/JPS5374362A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form a highly reliable wiring layer by forming Al double layer through a sputtering or ion plating and vacuum evaporation method.
COPYRIGHT: (C)1978,JPO&Japio
JP14969176A 1976-12-15 1976-12-15 Wiring structure for electronic parts Pending JPS5374362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14969176A JPS5374362A (en) 1976-12-15 1976-12-15 Wiring structure for electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14969176A JPS5374362A (en) 1976-12-15 1976-12-15 Wiring structure for electronic parts

Publications (1)

Publication Number Publication Date
JPS5374362A true JPS5374362A (en) 1978-07-01

Family

ID=15480689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14969176A Pending JPS5374362A (en) 1976-12-15 1976-12-15 Wiring structure for electronic parts

Country Status (1)

Country Link
JP (1) JPS5374362A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018119917A1 (en) 2017-08-31 2019-02-28 Toyo Tire & Rubber Co., Ltd. tire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018119917A1 (en) 2017-08-31 2019-02-28 Toyo Tire & Rubber Co., Ltd. tire

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