JPS53114350A - Semiconductor and its manufacture - Google Patents
Semiconductor and its manufactureInfo
- Publication number
- JPS53114350A JPS53114350A JP2801377A JP2801377A JPS53114350A JP S53114350 A JPS53114350 A JP S53114350A JP 2801377 A JP2801377 A JP 2801377A JP 2801377 A JP2801377 A JP 2801377A JP S53114350 A JPS53114350 A JP S53114350A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- mof
- laminate
- react
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2801377A JPS53114350A (en) | 1977-03-16 | 1977-03-16 | Semiconductor and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2801377A JPS53114350A (en) | 1977-03-16 | 1977-03-16 | Semiconductor and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53114350A true JPS53114350A (en) | 1978-10-05 |
Family
ID=12236881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2801377A Pending JPS53114350A (en) | 1977-03-16 | 1977-03-16 | Semiconductor and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53114350A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776833A (en) * | 1980-09-04 | 1982-05-14 | Applied Materials Inc | Heat resistant metal depositing method and product thereof |
JPS5818965A (ja) * | 1981-07-28 | 1983-02-03 | Toshiba Corp | 半導体装置の製造方法 |
JPS6050920A (ja) * | 1983-08-30 | 1985-03-22 | Toshiba Corp | 半導体装置の製造方法 |
JPS60119750A (ja) * | 1983-12-02 | 1985-06-27 | Hitachi Ltd | 半導体装置の製造方法 |
JPS62204523A (ja) * | 1986-03-04 | 1987-09-09 | Nec Corp | コンタクト電極の形成方法 |
JPS6419721A (en) * | 1988-03-25 | 1989-01-23 | Seiko Epson Corp | Integrated circuit |
JPS6419720A (en) * | 1988-03-25 | 1989-01-23 | Seiko Epson Corp | Integrated circuit |
-
1977
- 1977-03-16 JP JP2801377A patent/JPS53114350A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776833A (en) * | 1980-09-04 | 1982-05-14 | Applied Materials Inc | Heat resistant metal depositing method and product thereof |
JPS5818965A (ja) * | 1981-07-28 | 1983-02-03 | Toshiba Corp | 半導体装置の製造方法 |
JPS6050920A (ja) * | 1983-08-30 | 1985-03-22 | Toshiba Corp | 半導体装置の製造方法 |
JPS60119750A (ja) * | 1983-12-02 | 1985-06-27 | Hitachi Ltd | 半導体装置の製造方法 |
JPH0586653B2 (ja) * | 1983-12-02 | 1993-12-13 | Hitachi Ltd | |
JPS62204523A (ja) * | 1986-03-04 | 1987-09-09 | Nec Corp | コンタクト電極の形成方法 |
JPS6419721A (en) * | 1988-03-25 | 1989-01-23 | Seiko Epson Corp | Integrated circuit |
JPS6419720A (en) * | 1988-03-25 | 1989-01-23 | Seiko Epson Corp | Integrated circuit |
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