JPS52156781A - Growth of crystal with molecular beam - Google Patents

Growth of crystal with molecular beam

Info

Publication number
JPS52156781A
JPS52156781A JP7479876A JP7479876A JPS52156781A JP S52156781 A JPS52156781 A JP S52156781A JP 7479876 A JP7479876 A JP 7479876A JP 7479876 A JP7479876 A JP 7479876A JP S52156781 A JPS52156781 A JP S52156781A
Authority
JP
Japan
Prior art keywords
crystal
molecular beam
growth
collide
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7479876A
Other languages
Japanese (ja)
Other versions
JPS589795B2 (en
Inventor
Morio Inoue
Tamotsu Uragaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7479876A priority Critical patent/JPS589795B2/en
Publication of JPS52156781A publication Critical patent/JPS52156781A/en
Publication of JPS589795B2 publication Critical patent/JPS589795B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To plan to improve sharply the crystalline property, by making collide the molecular beam of the molecules having reducing chemical component to the surface of the substrate, when the growth of a crystal is performed by making collide the molecular beam of the raw material for the crystal to be grown on the surface of the substrate in a vacuum.
JP7479876A 1976-06-23 1976-06-23 Molecular beam crystal growth method Expired JPS589795B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7479876A JPS589795B2 (en) 1976-06-23 1976-06-23 Molecular beam crystal growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7479876A JPS589795B2 (en) 1976-06-23 1976-06-23 Molecular beam crystal growth method

Publications (2)

Publication Number Publication Date
JPS52156781A true JPS52156781A (en) 1977-12-27
JPS589795B2 JPS589795B2 (en) 1983-02-22

Family

ID=13557674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7479876A Expired JPS589795B2 (en) 1976-06-23 1976-06-23 Molecular beam crystal growth method

Country Status (1)

Country Link
JP (1) JPS589795B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895694A (en) * 1981-11-30 1983-06-07 Fujitsu Ltd Crystal growing method with molecular beam

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63154292U (en) * 1987-03-30 1988-10-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895694A (en) * 1981-11-30 1983-06-07 Fujitsu Ltd Crystal growing method with molecular beam
JPH039076B2 (en) * 1981-11-30 1991-02-07 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS589795B2 (en) 1983-02-22

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