JPS51139774A - Liquid phase growing device - Google Patents
Liquid phase growing deviceInfo
- Publication number
- JPS51139774A JPS51139774A JP6466275A JP6466275A JPS51139774A JP S51139774 A JPS51139774 A JP S51139774A JP 6466275 A JP6466275 A JP 6466275A JP 6466275 A JP6466275 A JP 6466275A JP S51139774 A JPS51139774 A JP S51139774A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- growing device
- phase growing
- solution
- saturate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To simply obtain an excellent epitaxial layer at low cost by applying a liquid phase growth process after bringing a solution into contact with a source to saturate the solution.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6466275A JPS5837687B2 (en) | 1975-05-28 | 1975-05-28 | Liquid phase growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6466275A JPS5837687B2 (en) | 1975-05-28 | 1975-05-28 | Liquid phase growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51139774A true JPS51139774A (en) | 1976-12-02 |
JPS5837687B2 JPS5837687B2 (en) | 1983-08-18 |
Family
ID=13264637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6466275A Expired JPS5837687B2 (en) | 1975-05-28 | 1975-05-28 | Liquid phase growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5837687B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5252461U (en) * | 1975-10-09 | 1977-04-14 | ||
JPS5478377A (en) * | 1977-12-05 | 1979-06-22 | Nec Corp | Method and apparatus for growing semiconductor crystal |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH047593Y2 (en) * | 1987-11-20 | 1992-02-27 |
-
1975
- 1975-05-28 JP JP6466275A patent/JPS5837687B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5252461U (en) * | 1975-10-09 | 1977-04-14 | ||
JPS5515316Y2 (en) * | 1975-10-09 | 1980-04-09 | ||
JPS5478377A (en) * | 1977-12-05 | 1979-06-22 | Nec Corp | Method and apparatus for growing semiconductor crystal |
JPS5620688B2 (en) * | 1977-12-05 | 1981-05-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS5837687B2 (en) | 1983-08-18 |
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