JPS5435179A - Forming method for boron film - Google Patents

Forming method for boron film

Info

Publication number
JPS5435179A
JPS5435179A JP10131277A JP10131277A JPS5435179A JP S5435179 A JPS5435179 A JP S5435179A JP 10131277 A JP10131277 A JP 10131277A JP 10131277 A JP10131277 A JP 10131277A JP S5435179 A JPS5435179 A JP S5435179A
Authority
JP
Japan
Prior art keywords
forming method
boron
film
boron film
chemical deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10131277A
Other languages
Japanese (ja)
Other versions
JPS5917190B2 (en
Inventor
Hiroshi Yamazoe
Masaki Aoki
Masahiro Nagasawa
Koichi Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10131277A priority Critical patent/JPS5917190B2/en
Publication of JPS5435179A publication Critical patent/JPS5435179A/en
Publication of JPS5917190B2 publication Critical patent/JPS5917190B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/28—Deposition of only one other non-metal element
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To form boron film with improved adhesive property and elastic modulus at at a high growing rate, by depositing boron by vacuum chemical deposition until the thickness of film on a substrate reaches a specific value, then by depositing boron by atmospheric chemical deposition.
JP10131277A 1977-08-23 1977-08-23 Formation method of boron film Expired JPS5917190B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10131277A JPS5917190B2 (en) 1977-08-23 1977-08-23 Formation method of boron film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10131277A JPS5917190B2 (en) 1977-08-23 1977-08-23 Formation method of boron film

Publications (2)

Publication Number Publication Date
JPS5435179A true JPS5435179A (en) 1979-03-15
JPS5917190B2 JPS5917190B2 (en) 1984-04-19

Family

ID=14297285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10131277A Expired JPS5917190B2 (en) 1977-08-23 1977-08-23 Formation method of boron film

Country Status (1)

Country Link
JP (1) JPS5917190B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794564A (en) * 1980-12-03 1982-06-12 Matsushita Electric Ind Co Ltd Manufacture of pipe with high specific elastic modulus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH057675Y2 (en) * 1986-11-18 1993-02-25
FR2907638B1 (en) 2006-10-30 2009-01-23 Jacquet Panification METHOD FOR MANUFACTURING BAKERY PRODUCTS, SUCH AS MIE BREAD AND COOKED PRODUCTS THUS OBTAINED

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794564A (en) * 1980-12-03 1982-06-12 Matsushita Electric Ind Co Ltd Manufacture of pipe with high specific elastic modulus

Also Published As

Publication number Publication date
JPS5917190B2 (en) 1984-04-19

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