JPH08219159A - Static pressure gas bearing - Google Patents

Static pressure gas bearing

Info

Publication number
JPH08219159A
JPH08219159A JP2016395A JP2016395A JPH08219159A JP H08219159 A JPH08219159 A JP H08219159A JP 2016395 A JP2016395 A JP 2016395A JP 2016395 A JP2016395 A JP 2016395A JP H08219159 A JPH08219159 A JP H08219159A
Authority
JP
Japan
Prior art keywords
bearing
sleeve
radial
thrust
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016395A
Other languages
Japanese (ja)
Inventor
Katsuyoshi Kawasaki
勝義 川崎
Atsushi Takahashi
淳 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP2016395A priority Critical patent/JPH08219159A/en
Publication of JPH08219159A publication Critical patent/JPH08219159A/en
Pending legal-status Critical Current

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE: To ensure good coaxial degree, and facilitate assembly and regulation by integratedly forming a radial bearing made of a plurality of porous members and a thrust bearing made of a porous member with each other. CONSTITUTION: A sleeve 20 is elastically supported to the inner diameter surface 1b of a housing 1 through at least two O-rings 3, A radial bearing 4 made of cylindrical porous member which are arranged on a plurality of positions and a thrust bearing 12 made of a porous member which is formed in a doughnut shape are substantially and integratedly arranged with each other on the inner diameter surface of the sleeve 20, a bearing 5 is fit and opposed to respective bearings 4, 12 through a bearing clearance, and compressed gas is ejected from air feeding holes 6, 25, 30 toward the bearing clearance through respective bearings 4, 12.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、高周速化されたター
ボ機器の主軸や回転テーブル等に用いられる高速回転型
の静圧気体軸受の改良に関し、複数の軸受を一体化した
ことにより高い加工精度を確保してかじり等の不具合を
なくすると共に、組立て・調整を簡素化したものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a high-speed rotary type static pressure gas bearing used for a main shaft or a rotary table of a turbo equipment having a high peripheral speed, and is improved by integrating a plurality of bearings. This ensures machining accuracy, eliminates problems such as galling, and simplifies assembly and adjustment.

【0002】[0002]

【従来の技術】従来のこの種の高速回転型の静圧気体軸
受としては、例えば図2に示すようなものがある。この
ものは、ハウジング1の内径面に、軸方向に間隔をおい
てそれぞれ独立した二個のスリーブ2が、それぞれ二個
づつのOリング3を介して弾性支持され、各スリーブ2
毎に内径面に円筒状の多孔質部材からなるラジアル軸受
4が固定して取り付けられている。それらのラジアル軸
受4に図示されない僅かの軸受すきまを介して中空の軸
5が嵌合して対向している。各ラジアル軸受4には、ハ
ウジング1に設けられた給気孔6からスリーブ2を経て
圧縮気体が供給されラジアル軸受4の表面から軸受すき
まに噴出して軸5が支持される。噴出した圧縮気体は、
軸5に設けた排気孔7を抜けて軸5の軸心に設けた中空
軸孔5aから外部へ排出される。
2. Description of the Related Art A conventional high-speed rotary type static pressure gas bearing of this type is, for example, as shown in FIG. In this case, two independent sleeves 2 which are axially spaced apart from each other are elastically supported on the inner diameter surface of the housing 1 through two O-rings 3, respectively.
A radial bearing 4 made of a cylindrical porous member is fixedly attached to each inner diameter surface. A hollow shaft 5 is fitted and opposed to the radial bearings 4 through a slight bearing clearance (not shown). Compressed gas is supplied to each radial bearing 4 from an air supply hole 6 provided in the housing 1 through a sleeve 2 and jets from the surface of the radial bearing 4 into a bearing clearance to support a shaft 5. The jetted compressed gas is
After passing through the exhaust hole 7 provided in the shaft 5, it is discharged to the outside from the hollow shaft hole 5a provided in the shaft center of the shaft 5.

【0003】軸5のスラスト方向の拘束は、一方のラジ
アル軸受4の近くにラジアル軸受4とは別体に独立して
配設した一対のスラスト軸受12による。すなわち、軸
5の一端側部をハウジング1の軸方向外側に突出させ、
そこにフランジ状の鍔部10を径方向に突設し、その左
右の平面部がスラスト受面11,11とされている。各
スラスト受面11にそれぞれ図示されない僅かの軸受す
きまを介して対向させた一対のスラスト軸受12,12
が各々のスラスト軸受ケース13に固定支持され、軸方
向内側の軸受ケース13はハウジング1に固定され、軸
方向外側の軸受ケース13は間座50を介して軸方向内
側の軸受ケース13に固定される。これらのスラスト軸
受12も図示されてはいないが静圧気体軸受であり、ス
ラスト軸受ケース13に設けられた給気孔から圧縮気体
を供給する。
The restraint of the shaft 5 in the thrust direction is carried out by a pair of thrust bearings 12 which are disposed near the one radial bearing 4 and separately from the radial bearing 4 independently. That is, one end of the shaft 5 is projected outward in the axial direction of the housing 1,
A flange-shaped collar portion 10 is provided on the flange portion in the radial direction, and the left and right flat portions are thrust receiving surfaces 11, 11. A pair of thrust bearings 12, 12 facing the respective thrust receiving surfaces 11 with a slight bearing clearance (not shown).
Are fixedly supported by each thrust bearing case 13, the axially inner bearing case 13 is fixed to the housing 1, and the axially outer bearing case 13 is fixed to the axially inner bearing case 13 via the spacer 50. It Although not shown, these thrust bearings 12 are also static pressure gas bearings, and compressed gas is supplied from the air supply holes provided in the thrust bearing case 13.

【0004】各スリーブ2をハウジング1にそれぞれ弾
性支持するOリング3は、軸5が高速回転した場合の振
れ回りを吸収するものである。スラスト軸受ケース13
の方は、Oリングを介さずに直接にハウジング1に取り
付けてある。
An O-ring 3 for elastically supporting each sleeve 2 on the housing 1 absorbs whirling when the shaft 5 rotates at high speed. Thrust bearing case 13
On the other hand, it is directly attached to the housing 1 without an O-ring.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記従
来の静圧気体軸受は、ラジアル軸受とスラスト軸受とが
全く別体の独立した部品から構成されている上、更に複
数のラジアル軸受同志および複数のスラスト軸受同志も
又それぞれ独立した別体の部品から構成されているた
め、これら各軸受同志をハウジングに個別に組み込んで
良好な同軸度をもつ静圧気体軸受を組み立てることは非
常に困難であり、例えばラジアル軸受の軸方向に間隔を
おいて組み付けた複数の多孔質部材のどちらかの軸受面
が軸の受面と接触を起こし易いという問題点がある。特
に高速回転ではその可能性が高い。そうした接触を防止
するには、組み込んだラジアル軸受面同士のずれを調整
しなければならないが、微妙な調整は至難の技であり、
ある程度調整できたとしても、わずかなずれが原因で運
転中に接触を起すことも多い。こうした問題は、スラス
ト軸受についても同様に発生している。
However, in the above-mentioned conventional hydrostatic gas bearing, the radial bearing and the thrust bearing are constituted by completely separate and independent parts, and further, a plurality of radial bearings and a plurality of radial bearings are used. Since the thrust bearings are also composed of independent parts, it is very difficult to assemble these bearings individually into the housing to assemble a hydrostatic gas bearing with good coaxiality. For example, there is a problem that either bearing surface of a plurality of porous members assembled at intervals in the axial direction of the radial bearing is likely to come into contact with the bearing surface of the shaft. Especially at high speed rotation, the possibility is high. In order to prevent such contact, it is necessary to adjust the deviation between the built-in radial bearing surfaces, but fine adjustment is a difficult technique,
Even if it can be adjusted to some extent, a slight deviation often causes contact during operation. Such problems also occur in thrust bearings.

【0006】そこでこの発明は、そのような従来の問題
点に着目してなされたものであり、軸方向に間隔をおい
て配置した複数の多孔質部材からなるラジアル軸受およ
びスラスト軸受を実質的に一体のものとして形成するこ
とにより、良好な同軸度が確保でき、組立て及び調整が
容易な静圧気体軸受を提供することを目的としている。
Therefore, the present invention has been made by paying attention to such a conventional problem, and substantially includes a radial bearing and a thrust bearing composed of a plurality of porous members arranged at intervals in the axial direction. It is an object of the present invention to provide a hydrostatic gas bearing which can ensure good coaxiality and can be easily assembled and adjusted by being formed as one body.

【0007】[0007]

【課題を解決するための手段】この発明の静圧気体軸受
は、ハウジングの内径面に少なくとも二個のOリングを
介してスリーブを弾性支持し、該スリーブの内径面には
複数箇の円筒状の多孔質部材からなるラジアル軸受とド
ーナツ板状の多孔質部材からなるスラスト軸受とをそれ
ぞれ軸方向に離して取付け、前記ラジアル軸受及びスラ
スト軸受に軸受すきまを介して軸が対向し、前記スリー
ブに設けた給気孔からラジアル軸受及びスラスト軸受を
介して軸受すきまに圧縮気体を噴出することを特徴とす
るものである。
A static pressure gas bearing of the present invention elastically supports a sleeve on an inner diameter surface of a housing through at least two O-rings, and the inner diameter surface of the sleeve has a plurality of cylindrical shapes. The radial bearing made of a porous member and the thrust bearing made of a donut plate-shaped porous member are attached separately in the axial direction, and the shaft is opposed to the radial bearing and the thrust bearing through a bearing clearance, and the sleeve is attached to the sleeve. It is characterized in that the compressed gas is ejected from the provided air supply hole into the bearing clearance through the radial bearing and the thrust bearing.

【0008】[0008]

【作用】軸方向に離れた複数個所に配設する多孔質部材
からなるラジアル軸受4およびスラスト軸受12を、実
質的に一個の共通のスリーブと一体化したため、スリー
ブに取り付けた状態でそれらのうちの複数の軸受を同時
加工できる。これにより、軸受面の同軸度が確保され、
軸受の組立て及び調整が簡単にでき、かつ軸受面と軸と
の接触事故も防止できる。
The radial bearing 4 and the thrust bearing 12 made of porous members arranged at a plurality of axially distant locations are substantially integrated with one common sleeve, so that one of them is attached to the sleeve. Multiple bearings can be processed simultaneously. This ensures the coaxiality of the bearing surface,
It is possible to easily assemble and adjust the bearing, and to prevent contact accidents between the bearing surface and the shaft.

【0009】Oリングは、スリーブをハウジングに弾性
支持して軸が高速回転した場合のスリーブの振れ回りを
吸収する。
The O-ring elastically supports the sleeve on the housing and absorbs whirling of the sleeve when the shaft rotates at high speed.

【0010】[0010]

【実施例】以下、本発明の実施例を図面を参照して説明
する。図1は本発明の一実施例の断面図である。なお従
来と同一又は相当部分には同一の符号を付している。ハ
ウジング1の内径面1bに、実質的に一個の円筒とされ
たスリーブ20が、スリーブ20の外径面の両端部に設
けた溝にそれぞれ配設した二個のOリング3,3を介し
て弾性支持されている。そのスリーブ20は、四個の同
一外径のスリーブ部材20A,20B,20C,20D
を一体に接合して形成したもので、内面に複数(この実
施例では二個)のラジアル軸受4と一対のスラスト軸受
12とが組み込まれて取付けられている。そして、ハウ
ジング1の軸心部に、中空の軸5が、それらのラジアル
軸受4及びスラスト軸受12に図示されない僅かの軸受
すきまを介して支持され回転自在に嵌合して対向してい
る。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of an embodiment of the present invention. It should be noted that the same or corresponding parts as in the conventional case are denoted by the same reference numerals. On the inner diameter surface 1b of the housing 1, a substantially cylindrical sleeve 20 is inserted through two O-rings 3, 3 respectively arranged in grooves provided at both ends of the outer diameter surface of the sleeve 20. Elastically supported. The sleeve 20 includes four sleeve members 20A, 20B, 20C, 20D having the same outer diameter.
Are integrally joined to each other, and a plurality (two in this embodiment) of radial bearings 4 and a pair of thrust bearings 12 are incorporated and attached to the inner surface. The hollow shaft 5 is supported by the radial bearing 4 and the thrust bearing 12 via a slight bearing clearance (not shown) and rotatably fitted and faces the shaft center of the housing 1.

【0011】より詳細に説明すると、ハウジング1の胴
部にハウジング外面1aから内径面1bに貫通する一本
の給気孔6が形成されている。スリーブ20の外径面2
0aはハウジング1の内径面1bより小径で、両面間に
二個のOリング3,3で封じられた環状の空間からなる
給気室21が設けられている。スリーブ20の構成部材
である円筒状のスリーブ部材20Aには、内径面の軸方
向両端部に中央部より大径の環状凹部22が設けられ、
その環状凹部22内に二個のラジアル軸受4を構成する
円筒状の多孔質部材がそれぞれ固定して取り付けられて
いる。一個のスリーブ部材20Aに軸方向に離して固着
された二つのラジアル軸受4,4は、その軸受面4aを
同時加工して同軸度が確保されている。
More specifically, a single air supply hole 6 is formed in the body of the housing 1 so as to penetrate from the housing outer surface 1a to the inner diameter surface 1b. Outer diameter surface 2 of sleeve 20
Reference numeral 0a has a smaller diameter than the inner diameter surface 1b of the housing 1, and an air supply chamber 21 composed of an annular space enclosed by two O-rings 3 is provided between both surfaces. A cylindrical sleeve member 20A, which is a constituent member of the sleeve 20, is provided with annular recesses 22 having a larger diameter than the central portion at both axial end portions of the inner diameter surface,
Cylindrical porous members constituting the two radial bearings 4 are fixedly mounted in the annular recess 22. The two radial bearings 4, 4 fixed to one sleeve member 20A while being axially separated from each other have their bearing surfaces 4a simultaneously machined to ensure coaxiality.

【0012】各ラジアル軸受4の外径面には浅い周溝が
給気室24として形成され、両給気室21,24を連通
させる給気孔25がスリーブ部材20Aを半径方向に貫
通してそれぞれ設けられている。一方、軸5には二個の
ラジアル軸受4,4の間の位置に、軸外面から軸5の軸
心に設けた中空軸孔5aに連通する排気孔7が設けら
れ、ラジアル軸受4の軸受面から噴出した圧縮気体をそ
の排気孔7から排気するようになっている。
A shallow peripheral groove is formed as an air supply chamber 24 on the outer diameter surface of each radial bearing 4, and an air supply hole 25 for communicating both air supply chambers 21 and 24 radially penetrates the sleeve member 20A. It is provided. On the other hand, the shaft 5 is provided with an exhaust hole 7 communicating with the hollow shaft hole 5a provided at the shaft center of the shaft 5 between the two radial bearings 4 and 4, and the bearing of the radial bearing 4 is provided. The compressed gas ejected from the surface is exhausted from the exhaust hole 7.

【0013】軸5をスラスト方向に拘束する一対のスラ
スト軸受12は、いずれも一方のラジアル軸受4から軸
方向に離れて配設され、軸5の一端側部に突設したフラ
ンジ状の鍔部10の平面状のスラスト受面11,11を
挟持する一対のドーナツ板状の多孔質部材よりなるが、
ラジアル軸受4を装着したスリーブ20Aに一体化して
装着している点が従来とは異なる。
Each of the pair of thrust bearings 12 for restraining the shaft 5 in the thrust direction is arranged axially away from one radial bearing 4 and has a flange-like flange portion projecting from one end of the shaft 5. It is composed of a pair of doughnut-plate-shaped porous members for sandwiching the flat thrust receiving surfaces 11, 11 of 10,
It is different from the conventional one in that the radial bearing 4 is integrally mounted on the sleeve 20A.

【0014】すなわち、一方のスラスト軸受12は環状
のスリーブ部材20Bの内径面に設けた凹部に嵌合して
取付けられている。このスリーブ部材20Bをスリーブ
部材20A(ラジアル軸受4が装着されている)の一端
面に固着し、軸5をラジアル軸受4に嵌合して対向す
る。続いて軸5の鍔部10の厚さに一対のスラスト軸受
すきまを加えた厚さの環状のスリーブ部材20Cをスリ
ーブ部材20Bの端面に固着し、更にそのスリーブ部材
20Cの端面に他のスリーブ部材20Dを固着する。こ
のスリーブ部材20Dには前記スリーブ部材20Bとは
勝手違いに設けた凹部に他方のスラスト軸受12が嵌合
固着され、一方のスラスト軸受と他方のスラスト軸受は
軸方向に離れている。なお、スリーブ部材20B,20
Dには、外径面からスラスト軸受12に至る半径方向の
給気孔30がそれぞれに設けてある。また、軸5の鍔部
10には、スラスト軸受12の平面状の軸受面12aか
ら噴出した圧縮気体を排気する排気孔31が、半径方向
及び軸方向にそれぞれ設けられ、この排気孔31は中空
軸孔5aに連通させてある。
That is, one thrust bearing 12 is fitted and mounted in a recess provided in the inner diameter surface of the annular sleeve member 20B. The sleeve member 20B is fixed to one end surface of the sleeve member 20A (on which the radial bearing 4 is mounted), and the shaft 5 is fitted and opposed to the radial bearing 4. Subsequently, an annular sleeve member 20C having a thickness obtained by adding a pair of thrust bearing clearances to the thickness of the flange portion 10 of the shaft 5 is fixed to the end surface of the sleeve member 20B, and another sleeve member is attached to the end surface of the sleeve member 20C. Fix 20D. The other thrust bearing 12 is fitted and fixed to a recess provided in the sleeve member 20D in a manner different from that of the sleeve member 20B, and one thrust bearing and the other thrust bearing are axially separated from each other. The sleeve members 20B, 20
In D, radial air supply holes 30 extending from the outer diameter surface to the thrust bearing 12 are provided respectively. Further, the flange portion 10 of the shaft 5 is provided with exhaust holes 31 for exhausting the compressed gas ejected from the flat bearing surface 12a of the thrust bearing 12 in the radial direction and the axial direction, respectively, and the exhaust holes 31 are hollow. It is communicated with the shaft hole 5a.

【0015】各スリーブ部材20A,20B,20C,
20Dの互の固着手段としては、ねじ止め,接着,溶接
等のいずれでも良く、スリーブ20は剛体となってい
る。こうして、スラスト軸受の軸受面12aが軸の鍔部
10のスラスト受面11に軸受すきまを介して対向する
スラスト軸受12が、ラジアル軸受4と一体化して形成
され、軸5をラジアル方向およびスラスト方向に支持す
る静圧軸受ブロックが形成される。この静圧軸受ブロッ
クをハウジング1の内径面内に挿入した後にハウジング
1の一端に蓋32を取り付けて固定することにより静圧
気体軸受が完成する。
Each sleeve member 20A, 20B, 20C,
The means for fixing the 20D to each other may be screwing, bonding, welding, or the like, and the sleeve 20 is a rigid body. Thus, the thrust bearing 12 in which the bearing surface 12a of the thrust bearing faces the thrust receiving surface 11 of the collar portion 10 of the shaft via the bearing clearance is formed integrally with the radial bearing 4, and the shaft 5 is formed in the radial direction and the thrust direction. A hydrostatic bearing block is formed to support the. The hydrostatic gas bearing is completed by inserting the hydrostatic bearing block into the inner diameter surface of the housing 1 and then attaching and fixing the lid 32 to one end of the housing 1.

【0016】次ぎに作用を述べる。スリーブ部材20A
の内径面の二箇所の環状凹部22に、それぞれラジアル
軸受4,4を組み付けて、それら二つのラジアル軸受
4,4の内径面であるラジアル軸受面4aを同時加工し
て、両ラジアル軸受面4a,4aの同軸度を確保する。
両方のラジアル軸受4,4とスリーブ部材20Aとは一
体であるから、この同時加工は容易であり、所定の同軸
度が確保できる。したがって、ラジアル軸受4に軸5を
嵌合した後の調整も容易になり、軸5の回転中にいずれ
かのラジアル軸受のラジアル軸受面4aが軸5に接触す
るようなおそれはない。
Next, the operation will be described. Sleeve member 20A
The radial bearings 4 and 4 are respectively assembled in the two annular recesses 22 on the inner diameter surface of the, and the radial bearing surfaces 4a, which are the inner diameter surfaces of the two radial bearings 4 and 4, are simultaneously processed to form both radial bearing surfaces 4a. , 4a coaxiality is secured.
Since both radial bearings 4 and 4 and the sleeve member 20A are integrated, this simultaneous processing is easy and a predetermined coaxiality can be secured. Therefore, the adjustment after the shaft 5 is fitted to the radial bearing 4 is facilitated, and there is no fear that the radial bearing surface 4a of any of the radial bearings will come into contact with the shaft 5 during the rotation of the shaft 5.

【0017】また、この実施例によれば、二個のラジア
ル軸受4と一対のスラスト軸受12とを実質的に一体の
スリーブ20に一体的に固定して取り付けたブロックを
ハウジング1に装着して組み立てるので、各軸受の組立
および調整が至って簡単にできる。組み立てた静圧気体
軸受を作動させるときは、ハウジング1の給気孔6から
圧縮空気を供給する。その圧縮空気は給気室21,給気
孔25,給気室24を経てラジアル軸受4内に入り、そ
こを通ってラジアル軸受の内周面のラジアル軸受4面4
aから均一に噴出する。これにより、ラジアル軸受すき
まに圧力の高い空気層が形成されて、軸5はラジアル軸
受面4aに非接触に浮上支持される。ラジアル軸受面4
aから噴出した圧縮空気はラジアル軸受すきまに空気膜
を形成して軸5をラジアル方向に支持しながら排気孔7
から中空軸孔5aを経て大気中へ流出する。
Further, according to this embodiment, the block in which the two radial bearings 4 and the pair of thrust bearings 12 are integrally fixed and attached to the substantially integral sleeve 20 is mounted on the housing 1. Since it is assembled, each bearing can be easily assembled and adjusted. When operating the assembled static pressure gas bearing, compressed air is supplied from the air supply hole 6 of the housing 1. The compressed air enters the radial bearing 4 through the air supply chamber 21, the air supply hole 25, and the air supply chamber 24, and passes therethrough to the radial bearing 4 surface 4 on the inner peripheral surface of the radial bearing.
Eject uniformly from a. As a result, an air layer having a high pressure is formed in the radial bearing clearance, and the shaft 5 is levitationally supported by the radial bearing surface 4a in a non-contact manner. Radial bearing surface 4
The compressed air ejected from a forms an air film in the radial bearing clearance to support the shaft 5 in the radial direction, and exhaust holes 7
Through the hollow shaft hole 5a into the atmosphere.

【0018】また、給気室21内の圧縮空気は、スリー
ブ20の給気孔30を経てスラスト軸受12にも供給さ
れる。スラスト軸受12の軸受面12aから噴出した圧
縮空気は、軸5の鍔部10の左右のスラスト受面11と
の間の図示されない軸受すきまに、圧力の高い空気層を
形成する。これにより、軸5は、スラスト方向にも非接
触に支持される。その後、圧縮気体は鍔部10に設けた
排気孔31から中空軸孔5aを経て大気中へ流出する。
The compressed air in the air supply chamber 21 is also supplied to the thrust bearing 12 via the air supply hole 30 of the sleeve 20. The compressed air ejected from the bearing surface 12a of the thrust bearing 12 forms a high-pressure air layer in a bearing clearance (not shown) between the left and right thrust receiving surfaces 11 of the flange portion 10 of the shaft 5. As a result, the shaft 5 is also supported in the thrust direction in a non-contact manner. After that, the compressed gas flows from the exhaust hole 31 provided in the collar portion 10 into the atmosphere through the hollow shaft hole 5a.

【0019】こうして、ラジアル軸受4及びスラスト軸
受12により非接触に支持された軸5が高速回転した場
合も、軸の振れ回りはスリーブ20をハウジング1に弾
性支持しているOリング3,33により吸収され、した
がって軸受面と軸との接触が生じることもなく、安定し
た回転が保証される。なお、上記の実施例では、スリー
ブ20の軸方向の両端面に設けた周みぞにもOリング3
3,33を装着して、スリーブ20をハウジングのスラ
スト方向にも弾性支持しているが、このスラスト方向の
支持用Oリング33はなくても良い。
Thus, even when the shaft 5 supported in a non-contact manner by the radial bearing 4 and the thrust bearing 12 rotates at a high speed, the whirling of the shaft is prevented by the O-rings 3, 33 elastically supporting the sleeve 20 in the housing 1. Stable rotation is guaranteed without being absorbed and thus without contact between the bearing surface and the shaft. In the above embodiment, the O-ring 3 is also provided in the circumferential groove provided on both axial end surfaces of the sleeve 20.
Although the sleeves 3 and 33 are mounted to elastically support the sleeve 20 in the thrust direction of the housing, the O-ring 33 for supporting the thrust direction may be omitted.

【0020】また、スラスト軸受12を一個として垂直
に配設した軸5の重力を支持するようにしても良い。
Alternatively, one thrust bearing 12 may be used to support the gravity of the shaft 5 arranged vertically.

【0021】[0021]

【発明の効果】以上説明したように、この発明によれ
ば、ハウジングの内径面にOリングを介して弾性支持し
た一個のスリーブの内径面に、多孔質部材からなる複数
個のラジアル軸受との多孔質部材からなるスラスト軸受
とを一体に取り付けたため、各軸受が実質的に一体部品
となり、その組立及び調整作業も簡素化されるという効
果を奏する。
As described above, according to the present invention, the inner diameter surface of one sleeve elastically supported by the inner diameter surface of the housing through the O-ring is provided with a plurality of radial bearings made of a porous member. Since the thrust bearing made of a porous member is integrally attached, each bearing is effectively an integral part, and the assembly and adjustment work thereof can be simplified.

【0022】また、加工時に複数のラジアル軸受面を同
時加工することができて容易に同軸度が確保されるか
ら、軸受作動中に二つの軸受面のいずれかが軸と接触す
る不具合が発生しないという効果が得られる。更に、軸
の高速回転においても、スラスト軸受とラジアル軸受と
が一体となった部材の軸振れがOリングを介して吸収さ
れ、軸受面と軸との接触が防止される。
In addition, since a plurality of radial bearing surfaces can be simultaneously machined at the time of machining and the coaxiality can be easily ensured, no trouble occurs in which one of the two bearing surfaces comes into contact with the shaft during operation of the bearing. The effect is obtained. Further, even when the shaft rotates at high speed, the shaft runout of the member in which the thrust bearing and the radial bearing are integrated is absorbed through the O-ring, and the contact between the bearing surface and the shaft is prevented.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.

【図2】従来の静圧気体軸受の断面図である。FIG. 2 is a sectional view of a conventional static pressure gas bearing.

【符号の説明】[Explanation of symbols]

1 ハウジング 3 Oリング 4 ラジアル軸受 5 軸 6 給気孔 12 スラスト軸受 20 スリーブ 20A スリーブ部材 20B スリーブ部材 20C スリーブ部材 20D スリーブ部材 25 給気孔 30 給気孔 1 Housing 3 O-ring 4 Radial bearing 5 Shaft 6 Air supply hole 12 Thrust bearing 20 Sleeve 20A Sleeve member 20B Sleeve member 20C Sleeve member 20D Sleeve member 25 Air supply hole 30 Air supply hole

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ハウジングの内径面に少なくとも二個の
Oリングを介してスリーブを弾性支持し、該スリーブの
内径面には複数箇の円筒状の多孔質部材からなるラジア
ル軸受とドーナツ板状の多孔質部材からなるスラスト軸
受とをそれぞれ軸方向に離して取付け、前記ラジアル軸
受及びスラスト軸受に軸受すきまを介して軸が対向し、
前記スリーブに設けた給気孔からラジアル軸受及びスラ
スト軸受を介して軸受すきまに圧縮気体を噴出する静圧
気体軸受。
1. A housing elastically supports a sleeve on an inner diameter surface of a housing through at least two O-rings, and the inner diameter surface of the sleeve has a radial bearing and a donut plate-shaped member made of a plurality of cylindrical porous members. A thrust bearing made of a porous member is attached separately in the axial direction, and the shaft faces the radial bearing and the thrust bearing via a bearing clearance,
A static pressure gas bearing for ejecting a compressed gas from a supply hole provided in the sleeve into a bearing clearance via a radial bearing and a thrust bearing.
JP2016395A 1995-02-08 1995-02-08 Static pressure gas bearing Pending JPH08219159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016395A JPH08219159A (en) 1995-02-08 1995-02-08 Static pressure gas bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016395A JPH08219159A (en) 1995-02-08 1995-02-08 Static pressure gas bearing

Publications (1)

Publication Number Publication Date
JPH08219159A true JPH08219159A (en) 1996-08-27

Family

ID=12019496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016395A Pending JPH08219159A (en) 1995-02-08 1995-02-08 Static pressure gas bearing

Country Status (1)

Country Link
JP (1) JPH08219159A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008138783A (en) * 2006-12-01 2008-06-19 Ntn Corp Static pressure gas bearing spindle
JP2008138850A (en) * 2006-12-05 2008-06-19 Ntn Corp Static pressure gas bearing spindle
JP2009022930A (en) * 2007-07-23 2009-02-05 Asahi Sunac Corp Paint gun
JP2011047512A (en) * 2009-08-30 2011-03-10 Tanken Seal Seiko Co Ltd Static pressure gas bearing
CN102513555A (en) * 2011-12-29 2012-06-27 重庆机床(集团)有限责任公司 High-speed and high-rigidity main shaft system rotary support structure
CN103357969A (en) * 2012-03-26 2013-10-23 宜昌长机科技有限责任公司 Active-moving static pressure device of gear shaper
CN105458307A (en) * 2016-01-15 2016-04-06 重庆机床(集团)有限责任公司 High-rigidity and high-precision hob spindle supporting transmission structure

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008138783A (en) * 2006-12-01 2008-06-19 Ntn Corp Static pressure gas bearing spindle
JP2008138850A (en) * 2006-12-05 2008-06-19 Ntn Corp Static pressure gas bearing spindle
JP2009022930A (en) * 2007-07-23 2009-02-05 Asahi Sunac Corp Paint gun
JP2011047512A (en) * 2009-08-30 2011-03-10 Tanken Seal Seiko Co Ltd Static pressure gas bearing
CN102513555A (en) * 2011-12-29 2012-06-27 重庆机床(集团)有限责任公司 High-speed and high-rigidity main shaft system rotary support structure
CN103357969A (en) * 2012-03-26 2013-10-23 宜昌长机科技有限责任公司 Active-moving static pressure device of gear shaper
CN105458307A (en) * 2016-01-15 2016-04-06 重庆机床(集团)有限责任公司 High-rigidity and high-precision hob spindle supporting transmission structure

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