JP3287122B2 - Hydrostatic gas bearing - Google Patents
Hydrostatic gas bearingInfo
- Publication number
- JP3287122B2 JP3287122B2 JP17889894A JP17889894A JP3287122B2 JP 3287122 B2 JP3287122 B2 JP 3287122B2 JP 17889894 A JP17889894 A JP 17889894A JP 17889894 A JP17889894 A JP 17889894A JP 3287122 B2 JP3287122 B2 JP 3287122B2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- sleeve
- shaft
- porous member
- diameter surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、高周速化されたター
ボ機器の主軸や回転テーブル等に用いられる高速回転型
の静圧気体軸受の改良に係り、特に、部品点数を減少
し、加工精度が高く組立て・調整が簡素化できる静圧気
体軸受に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a high-speed rotary type hydrostatic gas bearing used for a spindle or a rotary table of a turbo machine having a high peripheral speed, and in particular, to reduce the number of parts and to perform machining. The present invention relates to a hydrostatic gas bearing having high accuracy and capable of simplifying assembly and adjustment.
【０００２】[0002]
【従来の技術】従来のこの種の高速回転型の静圧気体軸
受としては、例えば図２に示すようなものがある。この
ものは、ハウジング１の内径面に、軸方向に間隔をおい
てそれぞれ独立した二個のスリーブ２が、それぞれ二個
づつのＯリング３を介して弾性支持されており、それら
の各スリーブ２の内径面に円筒状の多孔質部材４からな
るラジアル軸受が固定して取り付けられている。それら
の多孔質部材４には図示されない僅かの軸受すきまを介
して軸５が嵌合している。ハウジング１には径方向の給
気孔６が設けられラジアル軸受スリーブ２を通って多孔
質部材４に圧縮気体を供給するようになっている。ま
た、軸５には、二個の多孔質部材４の間の位置に、軸外
面から軸貫通孔５ａに連通する排気孔７が設けられ、多
孔質部材４の表面から噴出した圧縮気体を排気するよう
になっている。2. Description of the Related Art A conventional high-speed rotary type hydrostatic gas bearing of this type is, for example, as shown in FIG. In this device, two independent sleeves 2 are elastically supported on an inner diameter surface of a housing 1 at intervals in an axial direction via two O-rings 3, respectively. A radial bearing made of a cylindrical porous member 4 is fixedly attached to the inner diameter surface of the. The shaft 5 is fitted to these porous members 4 via a small bearing clearance (not shown). The housing 1 is provided with a radial air supply hole 6 to supply compressed gas to the porous member 4 through the radial bearing sleeve 2. Further, the shaft 5 is provided with an exhaust hole 7 communicating with the shaft through hole 5a from the outer surface of the shaft at a position between the two porous members 4 to exhaust the compressed gas ejected from the surface of the porous member 4. It is supposed to.
【０００３】軸５の一端側にはフランジ状の鍔部１０が
径方向に突出して設けられており、その左右の平面部１
１，１１がスラスト受面とされている。各スラスト受面
１１にそれぞれ図示されない僅かの軸受すきまを介して
対向させた二個のスラスト軸受１２，１２が、各々のス
ラスト軸受ケース１３に固定支持されて鍔部１０を挟持
する。これらのスラスト軸受１２も図示されてはいない
が静圧気体軸受であり、ハウジング１の構成要素である
スラスト軸受ケース１３には、給気孔及び排気孔がそれ
ぞれ設けられている。また、図示されていないが、スラ
スト軸受１２とラジアル軸受４との間には、排気孔が設
けられている。A flange-like flange 10 is provided at one end of the shaft 5 so as to protrude in the radial direction.
Reference numerals 1 and 11 are thrust receiving surfaces. Two thrust bearings 12, 12 opposed to the respective thrust receiving surfaces 11 via small bearing clearances (not shown) are fixedly supported by the respective thrust bearing cases 13 and sandwich the flange 10. Although not shown, these thrust bearings 12 are also static pressure gas bearings, and a thrust bearing case 13 which is a component of the housing 1 is provided with an air supply hole and an exhaust hole. Although not shown, an exhaust hole is provided between the thrust bearing 12 and the radial bearing 4.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来の静圧気体軸受は、二つのラジアル軸受としての多孔
質部材４がそれぞれに独立していて同時加工ができない
ため、同軸度の確保が容易ではなく、組立てた時にどち
らかの多孔質部材４のラジアル軸受面と軸５の受面とが
接触を起こすことがあるという問題点がある。However, in the above-described conventional hydrostatic gas bearing, since the two porous members 4 as radial bearings are independent of each other and cannot be processed simultaneously, it is not easy to secure coaxiality. In addition, there is a problem that the radial bearing surface of one of the porous members 4 and the receiving surface of the shaft 5 may come into contact when assembled.
【０００５】また、そうした接触を防止するためには、
組立て及び調整の作業が複雑にならざるを得ないという
問題点がある。そこでこの発明は、そのような従来の問
題点に着目してなされたものであり、軸方向に間隔をお
き独立して配置した二つの多孔質部材を一体的に同時加
工できて良好な同軸度が確保でき、組立て及び調整も容
易な静圧気体軸受を提供することを目的としている。In order to prevent such contact,
There is a problem that the work of assembling and adjusting must be complicated. Therefore, the present invention has been made in view of such a conventional problem, and two coaxial members which are spaced apart in the axial direction and independently arranged can be simultaneously and integrally processed to achieve good coaxiality. It is an object of the present invention to provide a hydrostatic gas bearing which can secure the pressure and can be easily assembled and adjusted.
【０００６】[0006]
【課題を解決するための手段】この発明の静圧気体軸受
は、ハウジングの内径面はスリーブの外径面をＯリング
を介して弾性支持し、前記スリーブの内径面には軸方向
に離れた二箇所に円筒状の多孔質部材をそれぞれ取り付
け、該多孔質部材には軸受すきまを介して中空軸が嵌合
し、前記スリーブに設けた通気孔から多孔質部材を介し
て軸受すきまに圧縮空気を噴出し、かつ前記通気孔に圧
縮空気を供給する給気孔を前記ハウジングに設けた静圧
気体軸受であって、前記スリーブの内径面中央部に対向
して開口する排気孔を前記中空軸に設けたこと特徴とす
るものである。In the hydrostatic gas bearing of the present invention, the inner diameter surface of the housing elastically supports the outer diameter surface of the sleeve via an O-ring, and the inner diameter surface of the sleeve is axially separated from the inner diameter surface of the sleeve. A cylindrical porous member is attached to each of the two locations, a hollow shaft is fitted to the porous member via a bearing clearance, and compressed air is supplied from the ventilation hole provided in the sleeve to the bearing clearance via the porous member. And pressurize the vent.
Static pressure provided with an air supply hole for supplying compressed air in the housing
A gas bearing facing the center of the inner diameter surface of the sleeve
The hollow shaft is provided with an exhaust hole that
It is those that.
【０００７】[0007]
【作用】軸方向に離れた二箇所に配設するラジアル軸受
としての多孔質部材を、共通の一個のスリーブで支持す
る構成として、スリーブに取り付けた状態でそれら二つ
の多孔質部材を同時加工する。これにより、二つの軸受
面の同軸度が確保される。A porous member as a radial bearing disposed at two places separated in the axial direction is supported by a common single sleeve, and the two porous members are simultaneously processed while being attached to the sleeve. . Thereby, the coaxiality of the two bearing surfaces is ensured.
【０００８】Ｏリングは、軸が高速回転した場合の振れ
回りを吸収する。[0008] The O-ring absorbs whirling when the shaft rotates at high speed.
【０００９】[0009]
【実施例】以下、本発明の実施例を図面を参照して説明
する。図１は本発明の一実施例の断面図である。なお従
来と同一又は相当部分には同一の符号を付している。ハ
ウジング１の内径面１ｂに、一個のスリーブ２０が、ス
リーブ両端部に設けた溝にそれぞれ配設した二個のＯリ
ング３を介して弾性支持されている。そのスリーブ２０
の内径面には軸方向に間隔をおいた二箇所に中央部より
大径の大径部２１が設けられ、その大径部２１内にそれ
ぞれラジアル軸受としての円筒状の多孔質部材４，４が
取り付けられている。それら二つの多孔質部材４，４に
は、図示されない僅かの軸受すきまを介して中空の軸５
が嵌合している。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of one embodiment of the present invention. The same or corresponding parts as those in the related art are denoted by the same reference numerals. One sleeve 20 is elastically supported on the inner diameter surface 1b of the housing 1 via two O-rings 3 respectively arranged in grooves provided at both ends of the sleeve. The sleeve 20
The inner diameter surface is provided with two large-diameter portions 21 larger in diameter than the central portion at two locations spaced apart in the axial direction, and cylindrical large porous members 4 and 4 as radial bearings are respectively provided in the large-diameter portions 21. Is attached. A hollow shaft 5 is connected to the two porous members 4 and 4 through a small bearing clearance (not shown).
Are fitted.
【００１０】ハウジング１には、二つの多孔質部材４の
中間の位置に、ハウジング外面１ａから内径面１ｂに貫
通する一本の給気孔６が形成されている。また、スリー
ブ２０の外径面２０ａには、二個のＯリング３の内側部
分に浅い周溝からなる給気室２３が設けられると共に、
この給気室２３と多孔質部材４の外径面に形成された浅
い周溝からなる他の給気室２４とを連通する二本の通気
孔２５，２５が設けられている。In the housing 1, a single air supply hole 6 is formed at an intermediate position between the two porous members 4 and penetrates from the housing outer surface 1a to the inner diameter surface 1b. In addition, on the outer diameter surface 20a of the sleeve 20, an air supply chamber 23 formed of a shallow circumferential groove is provided inside the two O-rings 3, and
Two air holes 25, 25 are provided for communicating the air supply chamber 23 with another air supply chamber 24 formed of a shallow circumferential groove formed on the outer diameter surface of the porous member 4. .
【００１１】ハウジング１に設けた給気孔６から、給気
室２３，通気孔２５，給気室２４を経て多孔質部材４に
圧縮気体が供給され、多孔質部材４のラジアル軸受面２
６から軸受すきまに噴出するものである。軸５には、二
個の多孔質部材４の間の位置に、軸外面から軸貫通孔５
ａに連通する排気孔７が設けられ、多孔質部材４の表面
から噴出した圧縮気体を排気するようになっている点は
図２のものと同様である。また、スラスト軸受１２に関
しても、図２のものと同様である。[0011] From supply hole 6 provided in the housing 1, the air supply chamber 23, vent 25, the compressed gas supplied to the porous member 4 through the supply chamber 24, the porous member 4 La dialkyl bearing surface 2
6 is injected into the bearing clearance. The shaft 5 has a shaft through hole 5 at a position between the two porous members 4 from the outer surface of the shaft.
2 is the same as that in FIG. 2 in that an exhaust hole 7 communicating with a is provided and compressed gas ejected from the surface of the porous member 4 is exhausted. Further, the thrust bearing 12 is the same as that in FIG.
【００１２】次ぎに作用を述べる。スリーブ２０の内径
面の二箇所の大径部２１に、それぞれラジアル軸受とし
ての円筒状の多孔質部材４，４を組み付けた後、それら
二つの多孔質部材４，４の内径面のラジアル軸受面２６
を同時加工して、両ラジアル軸受面２６，２６の同軸度
を確保する。スリーブ２０が一体であるから、この加工
は容易にできて所定の同軸度が確保できる。したがっ
て、多孔質部材４に軸５を嵌合した後の調整も容易にな
り、軸５の回転中に多孔質部材４のラジアル軸受面２６
が軸５に接触するようなおそれはない。Next, the operation will be described. After attaching cylindrical porous members 4 and 4 as radial bearings to two large diameter portions 21 on the inner diameter surface of the sleeve 20, respectively, the radial bearing surfaces of the inner diameter surfaces of the two porous members 4 and 4 are attached. 26
At the same time to ensure coaxiality between the two radial bearing surfaces 26, 26. Since the sleeve 20 is integrated, this processing can be easily performed and a predetermined coaxiality can be secured. Therefore, the adjustment after the shaft 5 is fitted to the porous member 4 is also facilitated, and the radial bearing surface 26 of the porous member 4 is rotated while the shaft 5 is rotating.
There is no danger that the shaft will contact the shaft 5.
【００１３】この静圧気体軸受を作動させるときは、ハ
ウジング１の給気孔６から圧縮空気を供給する。その圧
縮空気は給気室２３，通気孔２５，給気室２４を経て多
孔質部材４内に入り、そこを通って多孔質部材の内周面
のラジアル軸受面２６から均一に噴出する。これによ
り、ラジアル軸受すきまに圧力の高い空気層が形成され
て、回転軸５はハウジング１に非接触に浮上支持され
る。ラジアル軸受面２６から噴出した圧縮空気はラジア
ル軸受すきまに空気膜を形成して回転軸５をラジアル方
向に支持しながら排気孔７、スラスト軸受１２とラジア
ル軸受４との間の排気孔及びハウジング１と軸５との間
のすきまから大気中へ連続して流出する。When the static pressure gas bearing is operated, compressed air is supplied from the air supply hole 6 of the housing 1. The compressed air enters the porous member 4 through the air supply chamber 23, the vent hole 25, and the air supply chamber 24, and passes therethrough to be uniformly ejected from the radial bearing surface 26 on the inner peripheral surface of the porous member. As a result, an air layer with high pressure is formed in the radial bearing clearance, and the rotating shaft 5 is supported by the housing 1 in a floating manner without contact. The compressed air ejected from the radial bearing surface 26 forms an air film in the radial bearing clearance to support the rotating shaft 5 in the radial direction while exhaust holes 7, exhaust holes between the thrust bearing 12 and the radial bearing 4, and the housing 1. Continuously flows into the atmosphere from the gap between the shaft and the shaft 5.
【００１４】また、スラスト軸受１２にも図外の給気孔
から圧縮空気が供給され、多孔質部材からなるスラスト
軸受１２の面から噴出した圧縮空気は、軸５の一端側の
鍔部１０の左右のスラスト受面１１との間の図示されな
い軸受すきまに、圧力の高い空気層を形成する。これに
より、回転軸５は、スラスト方向にも非接触に支持され
る。その後、圧縮気体はハウジングの排気孔、スラスト
軸受１２とラジアル軸受４との間の排気孔及びスラスト
軸受ケース１３と軸５との間のすきまから大気中へ流出
する。Compressed air is also supplied to the thrust bearing 12 from an air supply hole (not shown), and compressed air ejected from the surface of the thrust bearing 12 made of a porous member is supplied to the left and right sides of the flange 10 at one end of the shaft 5. A high pressure air layer is formed in a bearing clearance (not shown) between the bearing and the thrust receiving surface 11. Thereby, the rotating shaft 5 is also supported in a non-contact manner in the thrust direction. Thereafter, the compressed gas flows into the atmosphere from the exhaust hole of the housing, the exhaust hole between the thrust bearing 12 and the radial bearing 4, and the clearance between the thrust bearing case 13 and the shaft 5.
【００１５】[0015]
【発明の効果】以上説明したように、この発明によれ
ば、ハウジングの内径面にＯリングを介して弾性支持し
た一個のスリーブの内径面に、軸方向に間隔をおいて二
箇の円筒状の多孔質部材をそれぞれ取り付け、その多孔
質部材に軸受すきまを介して回転軸を嵌合させるものと
したため、軸方向に離れて配設した多孔質部材のラジア
ル軸受面を、共通のスリーブに取り付けた状態で同時加
工することができて、二つの軸受面の同軸度が確保でき
る。その結果、軸受作動中に二つの軸受面のいずれかが
軸と接触するという現象は防止され、また、二つの多孔
質部材の組付けや調整作業も簡素化されるいう効果を奏
する。As described above, according to the present invention, two cylindrical cylindrical members spaced apart in the axial direction are provided on the inner diameter surface of one sleeve which is elastically supported on the inner diameter surface of the housing via an O-ring. Since each of the porous members was attached, and the rotary shaft was fitted to the porous member via a bearing clearance, the radial bearing surfaces of the porous members disposed apart in the axial direction were attached to a common sleeve. It can be processed simultaneously in the state, and the coaxiality of the two bearing surfaces can be secured. As a result, the phenomenon that one of the two bearing surfaces comes into contact with the shaft during the operation of the bearing is prevented, and the effect of assembling and adjusting the two porous members is simplified.
【００１６】更に、４個のＯリングを２個に減らすこと
もでき、部品点数が減少するという効果が得られる。Furthermore, the number of four O-rings can be reduced to two, and the effect of reducing the number of parts can be obtained.
【図１】この発明の一実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.
【図２】従来の静圧気体軸受の断面図である。FIG. 2 is a sectional view of a conventional hydrostatic gas bearing.
１ ハウジング ２ スリーブ ３ Ｏリング ４ 多孔質部材 ５ 軸 ２０ スリーブ ２５ 通気孔DESCRIPTION OF SYMBOLS 1 Housing 2 Sleeve 3 O-ring 4 Porous member 5 Shaft 20 Sleeve 25 Vent hole
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 昭61−27927（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) F16C 32/00 - 32/06 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References Japanese Utility Model Showa Sho 61-27927 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) F16C 32/00-32/06
Claims (1)
をＯリングを介して弾性支持し、前記スリーブの内径面
には軸方向に離れた二箇所に円筒状の多孔質部材をそれ
ぞれ取り付け、該多孔質部材には軸受すきまを介して中
空軸が嵌合し、前記スリーブに設けた通気孔から多孔質
部材を介して軸受すきまに圧縮空気を噴出し、かつ前記
通気孔に圧縮空気を供給する給気孔を前記ハウジングに
設けた静圧気体軸受であって、前記スリーブの内径面中
央部に対向して開口する排気孔を前記中空軸に設けたこ
と特徴とする静圧気体軸受。1. An inner diameter surface of a housing elastically supports an outer diameter surface of a sleeve via an O-ring, and a cylindrical porous member is attached to the inner diameter surface of the sleeve at two locations separated in an axial direction, respectively. The porous member has a medium through a bearing clearance.
An air shaft is fitted, and compressed air is spouted from a ventilation hole provided in the sleeve to a bearing clearance through a porous member , and
An air supply hole for supplying compressed air to the ventilation hole is provided in the housing.
A hydrostatic gas bearing provided in the inner diameter surface of the sleeve.
The hollow shaft is provided with an exhaust hole that opens to the center.
And a hydrostatic gas bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17889894A JP3287122B2 (en) | 1994-07-29 | 1994-07-29 | Hydrostatic gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17889894A JP3287122B2 (en) | 1994-07-29 | 1994-07-29 | Hydrostatic gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0842570A JPH0842570A (en) | 1996-02-13 |
| JP3287122B2 true JP3287122B2 (en) | 2002-05-27 |
Family
ID=16056624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17889894A Expired - Fee Related JP3287122B2 (en) | 1994-07-29 | 1994-07-29 | Hydrostatic gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3287122B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5408613B2 (en) * | 2009-05-07 | 2014-02-05 | Ｎｔｎ株式会社 | Gas bearing spindle |
| EP3324062A1 (en) * | 2016-11-22 | 2018-05-23 | Fischer Engineering Solutions AG | Rotation system with radial gas bearing |
-
1994
- 1994-07-29 JP JP17889894A patent/JP3287122B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0842570A (en) | 1996-02-13 |
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Legal Events
| Date | Code | Title | Description |
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