JP3138995B2 - Hydrostatic air bearing - Google Patents
Hydrostatic air bearingInfo
- Publication number
- JP3138995B2 JP3138995B2 JP05002869A JP286993A JP3138995B2 JP 3138995 B2 JP3138995 B2 JP 3138995B2 JP 05002869 A JP05002869 A JP 05002869A JP 286993 A JP286993 A JP 286993A JP 3138995 B2 JP3138995 B2 JP 3138995B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- rotating shaft
- air supply
- bearing
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は静圧空気軸受に係り、特
に直角度測定機等の測定物固定用のテーブルを回転自在
に支持する静圧空気軸受に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrostatic air bearing, and more particularly to a hydrostatic air bearing which rotatably supports a table for fixing an object to be measured such as a right angle measuring machine.
【０００２】[0002]
【従来の技術】従来、この種の静圧空気軸受は図６に示
すように、回転軸１と軸受部２とから構成される。前記
軸受部２には、回転軸１と軸受部２との隙間３に圧力エ
アを供給する複数のエア供給孔４Ａ、４Ａ…、４Ｂ、４
Ｂ…が回転軸１の軸方向における上部・下部の円周上に
形成される。2. Description of the Related Art Conventionally, this kind of hydrostatic air bearing is composed of a rotating shaft 1 and a bearing portion 2, as shown in FIG. The bearing portion 2 has a plurality of air supply holes 4A, 4A,..., 4B, 4B for supplying pressure air to a gap 3 between the rotating shaft 1 and the bearing portion 2.
B are formed on the upper and lower circumferences of the rotary shaft 1 in the axial direction.
【０００３】これにより、回転軸１は、エア供給孔４
Ａ、４Ａ…、４Ｂ、４Ｂ…から供給される圧力エアの圧
力によって、モーメント剛性Ｆ（回転軸１の倒れに対す
る剛性）と、ラジアル剛性Ｒ（軸受部２に対する回転軸
１の求心力剛性）とが所定の強度で保持される。また、
軸受部２の上端部２Ａ、及び下端部２Ｂには、それぞれ
エア供給孔５Ａ、５Ａ…、５Ｂ、５Ｂ…が形成される。
前記エア供給孔５Ａ、５Ａ…からの圧力エアは、上スラ
スト板６Ａと上端部２Ａとの隙間７に供給される。ま
た、エア供給孔５Ｂ、５Ｂ…からの圧力エアは、下スラ
スト板６Ｂと下端部２Ｂとの隙間８に供給される。[0003] As a result, the rotating shaft 1 is connected to the air supply hole 4.
A, 4A,..., 4B, 4B,. It is maintained at a predetermined strength. Also,
Air supply holes 5A, 5A,..., 5B, 5B... Are formed in the upper end 2A and the lower end 2B of the bearing 2, respectively.
The pressure air from the air supply holes 5A is supplied to a gap 7 between the upper thrust plate 6A and the upper end 2A. The pressure air from the air supply holes 5B is supplied to the gap 8 between the lower thrust plate 6B and the lower end 2B.
【０００４】これにより、回転軸１は、エア供給孔５
Ａ、５Ａ…、５Ｂ、５Ｂ…から供給される圧力エアの圧
力によりモーメント剛性Ｆが所定の強度で保持され、軸
受部２に対して非接触で回転自在に支持される。また、
前記静圧空気軸受が真円度測定機に適用された場合に
は、前記スラスト板６Ａの上部に測定物固定用の図中二
点鎖線で示すテーブル９が搭載される。Thus, the rotating shaft 1 is connected to the air supply hole 5
The moment rigidity F is maintained at a predetermined strength by the pressure of the pressure air supplied from A, 5A..., 5B, 5B. Also,
When the static pressure air bearing is applied to a roundness measuring machine, a table 9 shown by a two-dot chain line in the figure for fixing an object to be measured is mounted on the thrust plate 6A.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、従来の
静圧空気軸受は、軸受部２の上部・下部に形成されたエ
ア供給孔４Ａ、４Ａ…、４Ｂ、４Ｂ…から供給される圧
力エアで回転軸１を支持しているので、回転軸１の円筒
度、及び直角度が悪い場合には、回転軸１の上部・下部
においてエア圧のバランスが崩れる。これにより、回転
軸１は振れながら回転するという欠点がある。However, the conventional hydrostatic air bearing rotates with pressurized air supplied from air supply holes 4A, 4A,..., 4B, 4B,. Since the shaft 1 is supported, if the cylindricity and the perpendicularity of the rotating shaft 1 are poor, the balance of air pressure in the upper and lower portions of the rotating shaft 1 is lost. This has the disadvantage that the rotating shaft 1 rotates while swinging.
【０００６】本発明はこのような事情に鑑みてなされた
もので、回転軸の円筒度、及び直角度が悪い場合であっ
ても回転軸が円滑に回転する静圧空気軸受を提供するこ
とを目的とする。The present invention has been made in view of such circumstances, and an object of the present invention is to provide a hydrostatic air bearing in which a rotating shaft rotates smoothly even when the cylindricity and the perpendicularity of the rotating shaft are poor. Aim.
【０００７】[0007]
【課題を解決する為の手段】本発明は、前記目的を達成
する為に、回転軸と軸受部との隙間に圧力エアを供給し
て回転軸を非接触で回転自在に支持する静圧空気軸受に
於いて、前記軸受部には、前記回転軸の軸方向における
中央部の円周上のみに、回転軸と軸受部との隙間に圧力
エアを供給する第１のエア供給孔と、前記軸受部の上端
部に、回転軸の上端部に固着された上スラスト板と軸受
部の上端部との隙間に圧力エアを供給する第２のエア供
給孔と、前記軸受部の下端部に、回転軸の下端部に固着
された下スラスト板と軸受部の下端部との隙間に圧力エ
アを供給する第３のエア供給孔と、がそれぞれ所定の間
隔で複数形成され、第１のエア供給孔から供給される圧
力エアの圧力によって回転軸のラジアル剛性を保持し、
前記第２のエア供給孔と第３のエア供給孔とから供給さ
れる圧力エアの圧力によって回転軸のモーメント剛性を
保持するようにしたことを特徴とする。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a static pressure air for supplying a pressure air to a gap between a rotating shaft and a bearing so as to rotatably support the rotating shaft in a non-contact manner. In the bearing, the bearing portion has an axial direction of the rotating shaft.
A first air supply hole for supplying pressurized air to a gap between the rotating shaft and the bearing only on the circumference of the central portion ; and an upper thrust fixed to the upper end of the rotating shaft at the upper end of the bearing. A second air supply hole for supplying pressurized air to a gap between the plate and an upper end of the bearing portion; a lower thrust plate fixed to a lower end of the rotating shaft at a lower end of the bearing portion; A plurality of third air supply holes for supplying pressurized air to a gap between the first air supply hole and the third air supply hole, the radial rigidity of the rotating shaft being maintained by the pressure of the pressure air supplied from the first air supply hole. ,
The moment rigidity of the rotating shaft is maintained by the pressure of the pressure air supplied from the second air supply hole and the third air supply hole.
【０００８】[0008]
【作用】本発明によれば、軸受部に形成された第１のエ
ア供給孔から供給される圧力エアの圧力によって回転軸
のラジアル剛性（求心力剛性）のみを保持するように
し、また軸受部に形成された第２のエア供給孔から供給
される圧力エアの圧力によって回転軸のモーメント剛性
（倒れ剛性）を保持するようにした。According to the present invention, only the radial rigidity (centering force rigidity) of the rotating shaft is maintained by the pressure of the pressure air supplied from the first air supply hole formed in the bearing portion. Moment rigidity (falling rigidity) of the rotating shaft is maintained by the pressure of the compressed air supplied from the formed second air supply hole.
【０００９】即ち、本発明の特徴は、前記第１のエア供
給孔を回転軸の軸方向における略中央部の円周上に形成
することにより、従来の静圧空気軸受用回転軸の上部・
下部において生じるエア圧のバランスの崩れを防止し
た。これにより、回転軸の円筒度、及び直角度が悪い場
合であっても回転軸は円滑に回転する。That is, a feature of the present invention is that the first air supply hole is formed on the circumference of a substantially central portion in the axial direction of the rotating shaft, thereby forming the upper portion of the conventional rotating shaft for a hydrostatic air bearing.
The imbalance of the air pressure generated at the lower part was prevented. Thereby, even if the cylindricity and the perpendicularity of the rotating shaft are poor, the rotating shaft rotates smoothly.
【００１０】[0010]
【実施例】以下添付図面に従って本発明に係る静圧空気
軸受の好ましい実施例について詳説する。図１は本発明
に係る静圧空気軸受１０の断面図であり、この静圧空気
軸受１０は回転軸１２と軸受部１４とから構成される。
軸受部１４には、回転軸１２と軸受部１４との隙間１６
に圧力エアを供給する複数のエア供給孔１８、１８…が
回転軸１２の軸方向における略中央部の円周上に形成さ
れる。また、前記エア供給孔１８、１８…は図２に示す
ように、回転軸１２の回転中心軸２０に向けて放射状
に、且つ所定の間隔で形成されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a hydrostatic air bearing according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a cross-sectional view of a hydrostatic air bearing 10 according to the present invention. The hydrostatic air bearing 10 includes a rotating shaft 12 and a bearing 14.
The bearing 16 has a gap 16 between the rotating shaft 12 and the bearing 14.
Are formed on the circumference of a substantially central portion of the rotary shaft 12 in the axial direction. Also, as shown in FIG. 2, the air supply holes 18, 18 are formed radially toward the rotation center axis 20 of the rotation shaft 12 at predetermined intervals.
【００１１】これにより、回転軸１２は、エア供給孔１
８、１８…から供給される圧力エアの圧力によって、ラ
ジアル剛性Ｒ（回転軸１２の求心力剛性）が所定の強度
で保持されている。また、図１に示すように軸受部１４
の上端部１４Ａ、及び下端部１４Ｂには、それぞれエア
供給孔２２、２２…、２４、２４…が形成される。エア
供給孔２２（２４）、２２（２４）…は図３に示すよう
に、回転軸１２を囲むように所定の間隔で形成される。
一方、エア供給孔２２、２２…からの圧力エアは図１に
示すように、回転軸１２の上端部１２Ａに固着された上
スラスト板２６と軸受部１４の上端部１４Ａとの隙間２
８に供給される。また、エア供給孔２４、２４…からの
圧力エアは、回転軸１２の下端部１２Ｂに固着された下
スラスト板３０と軸受部１４の下端部１４Ｂとの隙間３
２に供給される。As a result, the rotating shaft 12 is connected to the air supply hole 1.
The radial stiffness R (the centripetal force stiffness of the rotating shaft 12) is maintained at a predetermined strength by the pressure of the pressure air supplied from 8, 18,. Also, as shown in FIG.
, 24, 24,... Are formed in the upper end portion 14A and the lower end portion 14B, respectively. The air supply holes 22 (24) are formed at predetermined intervals so as to surround the rotating shaft 12, as shown in FIG.
On the other hand, as shown in FIG. 1, the pressure air from the air supply holes 22, 22 is provided in a gap 2 between the upper thrust plate 26 fixed to the upper end 12A of the rotating shaft 12 and the upper end 14A of the bearing 14.
8 is supplied. The pressure air from the air supply holes 24, 24... Forms a gap 3 between the lower thrust plate 30 fixed to the lower end 12 B of the rotating shaft 12 and the lower end 14 B of the bearing 14.
2 is supplied.
【００１２】これにより、回転軸１２は、エア供給孔２
２、２２…、２４、２４…から供給される圧力エアの圧
力によりモーメント剛性Ｆ（回転軸１２の倒れに対する
剛性）が所定の強度で保持され、軸受部１４に対して非
接触で回転自在に支持される。一方、前記上スラスト板
２６の上部には、テーブル３４の水平位置及び傾斜角度
を調整する装置３６が搭載されている。この装置３６に
よれば、水平調整ねじ３８、及び傾斜調整ねじ４０を適
宜に回すことにより、テーブル３４上に固定された図中
二点鎖線で示すワークピース４２の水平位置及び傾斜角
度を調整すことができる。Thus, the rotation shaft 12 is connected to the air supply hole 2.
Moment rigidity F (rigidity of the rotating shaft 12 against falling) is maintained at a predetermined strength by the pressure of the pressure air supplied from 2, 22,..., 24, 24. Supported. On the other hand, on the upper part of the upper thrust plate 26, a device 36 for adjusting the horizontal position and the inclination angle of the table 34 is mounted. According to this device 36, the horizontal position and the inclination angle of the work piece 42 fixed on the table 34 and shown by a two-dot chain line in the figure are adjusted by appropriately turning the horizontal adjustment screw 38 and the inclination adjustment screw 40. be able to.
【００１３】次に、前記の如く構成された静圧空気軸受
１０の作用について説明する。この静圧空気軸受１０の
回転軸１２は図１に示したように、軸受部１４に形成さ
れたエア供給孔１８、１８…から供給される圧力エアの
圧力によってラジアル剛性Ｒのみが保持され、また、軸
受部１４に形成されたエア供給孔２２、２２…とエア供
給孔２４、２４…とから供給される圧力エアの圧力によ
ってモーメント剛性Ｆが保持されて回転する。Next, the operation of the hydrostatic air bearing 10 configured as described above will be described. As shown in FIG. 1, only the radial rigidity R of the rotary shaft 12 of the static pressure air bearing 10 is maintained by the pressure of the pressure air supplied from the air supply holes 18 formed in the bearing portion 14. Further, the moment rigidity F is maintained by the pressure of the pressure air supplied from the air supply holes 22, 22,... Formed in the bearing portion 14 and the air supply holes 24, 24,.
【００１４】本実施例の静圧空気軸受１０によれば、回
転軸１２の円筒度、及び直角度が悪い場合であっても、
エア供給孔１８、１８…からのエア圧を求心力を保持さ
せるためだけに用いるようにしたので、従来の静圧空気
軸受用回転軸のように回転軸の円筒度、直角度が悪い場
合に上下のエア圧のバランスが崩れて回転軸が振れて回
転するようなことはない。According to the hydrostatic air bearing 10 of this embodiment, even when the cylindricity and the squareness of the rotating shaft 12 are poor,
Since the air pressure from the air supply holes 18, 18,... Is used only to maintain the centripetal force, when the cylindricity and the perpendicularity of the rotating shaft are poor as in the conventional rotating shaft for a hydrostatic air bearing, the vertical There is no possibility that the balance of the air pressure is lost and the rotating shaft swings and rotates.
【００１５】これにより、回転軸１２の円筒度、及び直
角度が悪い場合でも、回転軸１２は円滑に回転する。図
４、図５は、エア供給孔１８（２２、２４）の周りに形
成されたエア通過溝４４、４６の実施例を示す。図４に
示したエア通過溝４４は、環状溝部４８と、この環状溝
部４８とエア供給孔１８（２２、２４）とを連通する放
射状溝部５０、５０…とから形成される。また、図５に
示したエア通過溝４６は、「王」字状に形成される。Accordingly, even when the cylindricity and the perpendicularity of the rotating shaft 12 are poor, the rotating shaft 12 rotates smoothly. 4 and 5 show an embodiment of the air passage grooves 44 and 46 formed around the air supply holes 18 (22 and 24). The air passage groove 44 shown in FIG. 4 is formed of an annular groove 48 and radial grooves 50 communicating the annular groove 48 and the air supply holes 18 (22, 24). The air passage groove 46 shown in FIG. 5 is formed in a “king” shape.
【００１６】図４、図５のようにエア供給孔１８（２
２、２４）の周りにエア通過溝４４、４６を形成するこ
とにより、エア供給孔１８（２２、２４）から供給され
る圧力エアの圧力分布を広い範囲で略均等にすることが
できるので、エア供給孔１８（２２、２４）から圧力エ
アを直接供給するよりも、回転軸１２とスラスト板２
６、３０とを安定して非接触で保持することができる。As shown in FIGS. 4 and 5, the air supply holes 18 (2
By forming the air passage grooves 44 and 46 around (2, 24), the pressure distribution of the pressure air supplied from the air supply holes 18 (22, 24) can be made substantially uniform over a wide range. The rotation shaft 12 and the thrust plate 2 can be more easily supplied than directly supplying the pressurized air from the air supply holes 18 (22, 24).
6, 30 can be stably held in a non-contact state.
【００１７】[0017]
【発明の効果】以上説明したように本発明に係る静圧空
気軸受によれば、軸受部に形成された第１のエア供給孔
から供給される圧力エアの圧力によって回転軸のラジア
ル剛性を保持するようにし、また回転軸のモーメント剛
性は、第２のエア供給孔、第３のエア供給孔から供給さ
れる圧力エアの圧力によって保持するようにしたので、
回転軸の円筒度、及び直角度が悪い場合であっても回転
軸は円滑に回転する。As described above, according to the hydrostatic air bearing according to the present invention, the radial rigidity of the rotating shaft is maintained by the pressure of the pressure air supplied from the first air supply hole formed in the bearing portion. And the moment rigidity of the rotating shaft is maintained by the pressure of the pressure air supplied from the second air supply hole and the third air supply hole .
Even when the cylindricity and the perpendicularity of the rotating shaft are poor, the rotating shaft rotates smoothly.
【図１】本発明に係る静圧空気軸受の実施例を示す断面
図FIG. 1 is a sectional view showing an embodiment of a hydrostatic air bearing according to the present invention.
【図２】図１におけるＡ−Ａ矢視図FIG. 2 is a view taken in the direction of arrows AA in FIG. 1;
【図３】図１におけるＢ−Ｂ線上に沿う断面図FIG. 3 is a sectional view taken along the line BB in FIG. 1;
【図４】本発明に係る静圧空気軸受のエア供給孔の第１
実施例を示す平面図FIG. 4 shows the first air supply hole of the hydrostatic air bearing according to the present invention.
Plan view showing an embodiment
【図５】本発明に係る静圧空気軸受のエア供給孔の第２
実施例を示す平面図FIG. 5 shows a second air supply hole of the hydrostatic air bearing according to the present invention.
Plan view showing an embodiment
【図６】従来の静圧空気軸受の実施例を示す断面図FIG. 6 is a sectional view showing an embodiment of a conventional hydrostatic air bearing.
１０…静圧空気軸受 １２…回転軸 １４…軸受部 １６、２８、３２…隙間 １８、２２、２４…エア供給孔 ２０…回転中心軸 ２６、３０…スラスト板 DESCRIPTION OF SYMBOLS 10 ... Static pressure air bearing 12 ... Rotating shaft 14 ... Bearing part 16, 28, 32 ... Gap 18, 22, 24 ... Air supply hole 20 ... Rotation center axis 26, 30 ... Thrust plate
Claims (2)
給して回転軸を非接触で回転自在に支持する静圧空気軸
受に於いて、前記軸受部には、前記回転軸の軸方向にお
ける中央部の円周上のみに、回転軸と軸受部との隙間に
圧力エアを供給する第１のエア供給孔と、前記軸受部の
上端部に、回転軸の上端部に固着された上スラスト板と
軸受部の上端部との隙間に圧力エアを供給する第２のエ
ア供給孔と、前記軸受部の下端部に、回転軸の下端部に
固着された下スラスト板と軸受部の下端部との隙間に圧
力エアを供給する第３のエア供給孔と、がそれぞれ所定
の間隔で複数形成され、第１のエア供給孔から供給され
る圧力エアの圧力によって回転軸のラジアル剛性を保持
し、前記第２のエア供給孔と第３のエア供給孔とから供
給される圧力エアの圧力によって回転軸のモーメント剛
性を保持するようにしたことを特徴とする静圧空気軸
受。 1. A hydrostatic air bearing for supplying pressure air to a gap between a rotating shaft and a bearing portion to rotatably support the rotating shaft in a non-contact manner, wherein the bearing portion includes a shaft of the rotating shaft. A first air supply hole for supplying pressure air to a gap between the rotating shaft and the bearing portion only on the circumference of the central portion in the direction, and an upper end portion of the bearing portion, which is fixed to an upper end portion of the rotating shaft. A second air supply hole for supplying pressure air to a gap between the upper thrust plate and the upper end of the bearing portion; and a lower thrust plate fixed to a lower end portion of the rotating shaft at a lower end portion of the bearing portion; A plurality of third air supply holes for supplying pressure air to a gap with the lower end are formed at predetermined intervals, and the radial rigidity of the rotating shaft is increased by the pressure of the pressure air supplied from the first air supply holes. Holding the compressed air supplied from the second air supply hole and the third air supply hole. Hydrostatic air shaft characterized by maintaining moment rigidity of the rotating shaft by pressure
Receiving.
成し、該エア通過溝は環状溝部と放射状溝部とから形成The air passage groove is formed from an annular groove and a radial groove.
されてなる請求項１記載の静圧空気軸受。The hydrostatic air bearing according to claim 1, which is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05002869A JP3138995B2 (en) | 1993-01-11 | 1993-01-11 | Hydrostatic air bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05002869A JP3138995B2 (en) | 1993-01-11 | 1993-01-11 | Hydrostatic air bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06207617A JPH06207617A (en) | 1994-07-26 |
| JP3138995B2 true JP3138995B2 (en) | 2001-02-26 |
Family
ID=11541369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05002869A Expired - Fee Related JP3138995B2 (en) | 1993-01-11 | 1993-01-11 | Hydrostatic air bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3138995B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4629256B2 (en) * | 2001-03-27 | 2011-02-09 | 学校法人東京理科大学 | Variable throttle hydrostatic bearing |
| JP5617229B2 (en) * | 2009-11-26 | 2014-11-05 | 株式会社東京精密 | Air spindle and air supply device |
| CN103542241B (en) * | 2013-09-25 | 2016-06-29 | 广州市昊志机电股份有限公司 | A kind of air-float turntable |
-
1993
- 1993-01-11 JP JP05002869A patent/JP3138995B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06207617A (en) | 1994-07-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |