JP7504057B2 - イメージセンサー - Google Patents
イメージセンサー Download PDFInfo
- Publication number
- JP7504057B2 JP7504057B2 JP2021092854A JP2021092854A JP7504057B2 JP 7504057 B2 JP7504057 B2 JP 7504057B2 JP 2021092854 A JP2021092854 A JP 2021092854A JP 2021092854 A JP2021092854 A JP 2021092854A JP 7504057 B2 JP7504057 B2 JP 7504057B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor pattern
- substrate
- pattern
- trench
- image sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 claims description 277
- 239000000758 substrate Substances 0.000 claims description 209
- 238000002955 isolation Methods 0.000 claims description 91
- 239000012535 impurity Substances 0.000 claims description 79
- 238000006243 chemical reaction Methods 0.000 claims description 54
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 21
- 230000007423 decrease Effects 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 111
- 238000000034 method Methods 0.000 description 69
- 238000005530 etching Methods 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 239000003795 chemical substances by application Substances 0.000 description 15
- 239000013256 coordination polymer Substances 0.000 description 14
- 238000005137 deposition process Methods 0.000 description 13
- 238000012546 transfer Methods 0.000 description 13
- 101000908384 Bos taurus Dipeptidyl peptidase 4 Proteins 0.000 description 12
- HEFNNWSXXWATRW-UHFFFAOYSA-N Ibuprofen Chemical compound CC(C)CC1=CC=C(C(C)C(O)=O)C=C1 HEFNNWSXXWATRW-UHFFFAOYSA-N 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- 102100031102 C-C motif chemokine 4 Human genes 0.000 description 11
- 101000777470 Mus musculus C-C motif chemokine 4 Proteins 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 102100026620 E3 ubiquitin ligase TRAF3IP2 Human genes 0.000 description 10
- 101710140859 E3 ubiquitin ligase TRAF3IP2 Proteins 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- 238000007667 floating Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 238000000926 separation method Methods 0.000 description 9
- 239000011810 insulating material Substances 0.000 description 8
- 229910000449 hafnium oxide Inorganic materials 0.000 description 6
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000012811 non-conductive material Substances 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 229910015844 BCl3 Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14607—Geometry of the photosensitive area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14632—Wafer-level processed structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Element Separation (AREA)
Description
20 第1配線層
30 光透過層
100 第1基板
103 素子分離パターン
110 光電変換領域
150 画素分離パターン
1000 センサーチップ
2000 ロジックチップ
AR 画素アレイ領域
OB 光学ブラック領域
PAD パッド領域
PX 単位画素領域
Claims (9)
- 互いに対向する第1面及び第2面を有する基板であって、光電変換領域を有する単位画素領域を含む基板と、
前記基板の前記単位画素領域を定義し、前記基板の第1トレンチ内に配置される半導体パターンであって、第1半導体パターン及び前記第1半導体パターン上に提供される第2半導体パターンを含む半導体パターンと、
前記基板の前記第2面を覆う背面絶縁膜と、を含み、
前記第1半導体パターンは、
前記第1トレンチの内側壁に沿って延長される側面部、及び
前記側面部と連結され、前記側面部より前記基板の前記第2面と隣接するように配置される底部を含み、
前記第2半導体パターンは、前記基板の前記第2面に向かって延長されて、前記第1半導体パターンの前記底部を介して前記背面絶縁膜と離隔されて配置され、
前記第1半導体パターン及び前記第2半導体パターンは、不純物を含む多結晶シリコンを含み、
前記第1半導体パターンの前記不純物の濃度は、前記第2半導体パターンの前記不純物の濃度より大きい、イメージセンサー。 - 互いに対向する第1面及び第2面を有する基板であって、光電変換領域を有する単位画素領域を含む基板と、
前記基板の前記単位画素領域を定義し、前記基板の第1トレンチ内に配置される半導体パターンであって、第1半導体パターン及び前記第1半導体パターン上に提供される第2半導体パターンを含む半導体パターンと、
前記基板の前記第2面を覆う背面絶縁膜と、を含み、
前記第1半導体パターンは、
前記第1トレンチの内側壁に沿って延長される側面部、及び
前記側面部と連結され、前記側面部より前記基板の前記第2面と隣接するように配置される底部を含み、
前記第2半導体パターンは、前記基板の前記第2面に向かって延長されて、前記第1半導体パターンの前記底部を介して前記背面絶縁膜と離隔されて配置され、
前記第1半導体パターンは、不純物を含む多結晶シリコンを含み、
第1基板の前記第2面と隣接する前記第1半導体パターンの前記不純物の濃度は、前記第1基板の前記第1面と隣接する前記第1半導体パターンの前記不純物の濃度と実質的に同一である、イメージセンサー。 - 前記底部の下面は、前記基板の前記第2面と同一レベルに提供される、請求項1又は2に記載のイメージセンサー。
- 前記基板の第2トレンチを満たし、前記第1面と隣接する素子分離パターンをさらに含み、
前記素子分離パターンの下面は、前記第1半導体パターンの最上部と前記基板の前記第1面との間のレベルに配置される、請求項1又は2に記載のイメージセンサー。 - 前記基板の第2トレンチを満たし、前記第1面と隣接する素子分離パターンをさらに含み、
前記第1半導体パターンの最上部は、前記素子分離パターンの下面と前記基板の前記第1面との間のレベルに配置される、請求項1又は2に記載のイメージセンサー。 - 前記第2半導体パターンが前記基板の前記第2面からの離隔距離は、0.1um(マイクロメートル)以上2.5um以下である、請求項1又は2に記載のイメージセンサー。
- 前記第2半導体パターンは、第1部分及び第2部分を含み、
前記第2部分は、前記第1半導体パターンの前記側面部で囲まれ、前記基板の前記第2面に向かって延長され、
前記第1部分は、前記第2部分上に提供されて、前記第2部分と連結され、
前記第2部分の最下端は、前記基板の前記第2面より高いレベルに提供される、請求項1又は2に記載のイメージセンサー。 - 前記第2半導体パターンの前記第1部分の幅は、前記第2半導体パターンの前記第2部分の幅より大きい、請求項7に記載のイメージセンサー。
- 前記第1半導体パターンの側面部は、互いに対向する第1内側面及び第2内側面を有し、
前記第1内側面及び前記第2内側面の間の離隔距離は、前記基板の前記第2面に隣接するほど、小さくなる、請求項1又は2に記載のイメージセンサー。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020200083601A KR20220005888A (ko) | 2020-07-07 | 2020-07-07 | 이미지 센서 |
KR10-2020-0083601 | 2020-07-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022014882A JP2022014882A (ja) | 2022-01-20 |
JP7504057B2 true JP7504057B2 (ja) | 2024-06-21 |
Family
ID=79173090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021092854A Active JP7504057B2 (ja) | 2020-07-07 | 2021-06-02 | イメージセンサー |
Country Status (3)
Country | Link |
---|---|
US (2) | US11837621B2 (ja) |
JP (1) | JP7504057B2 (ja) |
KR (1) | KR20220005888A (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012028459A (ja) | 2010-07-21 | 2012-02-09 | Sony Corp | 半導体装置、固体撮像装置、半導体装置の製造方法、固体撮像装置の製造方法、電子機器 |
WO2019188386A1 (ja) | 2018-03-29 | 2019-10-03 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、および電子機器 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090302409A1 (en) * | 2008-06-04 | 2009-12-10 | Omnivision Technologies, Inc. | Image sensor with multiple thickness anti-relfective coating layers |
KR20090128899A (ko) * | 2008-06-11 | 2009-12-16 | 크로스텍 캐피탈, 엘엘씨 | 후면 조사 이미지 센서 및 그 제조방법 |
TWI519899B (zh) * | 2009-07-07 | 2016-02-01 | 富士軟片股份有限公司 | 遮光薄膜用著色組成物、遮光圖案、其形成方法、固態影像感應裝置及其製造方法 |
US9299641B2 (en) * | 2012-08-10 | 2016-03-29 | Monolithic 3D Inc. | Semiconductor system, device and structure with heat removal |
FR2969384A1 (fr) | 2010-12-21 | 2012-06-22 | St Microelectronics Sa | Capteur d'image a intermodulation reduite |
JP6299058B2 (ja) * | 2011-03-02 | 2018-03-28 | ソニー株式会社 | 固体撮像装置、固体撮像装置の製造方法及び電子機器 |
JP5794068B2 (ja) | 2011-09-16 | 2015-10-14 | ソニー株式会社 | 固体撮像素子および製造方法、並びに電子機器 |
JP6161258B2 (ja) * | 2012-11-12 | 2017-07-12 | キヤノン株式会社 | 固体撮像装置およびその製造方法ならびにカメラ |
US9490288B2 (en) * | 2013-03-15 | 2016-11-08 | Taiwan Semiconductor Manufacturing Company Limited | Image sensor with trenched filler grid within a dielectric grid including a reflective portion, a buffer and a high-K dielectric |
JP2015026708A (ja) * | 2013-07-26 | 2015-02-05 | 株式会社東芝 | 固体撮像装置および固体撮像装置の製造方法 |
US9054007B2 (en) | 2013-08-15 | 2015-06-09 | Omnivision Technologies, Inc. | Image sensor pixel cell with switched deep trench isolation structure |
US10680022B2 (en) * | 2013-12-12 | 2020-06-09 | Sony Corporation | Solid state imaging device, manufacturing method of the same, and electronic equipment |
FR3019378A1 (fr) * | 2014-03-25 | 2015-10-02 | St Microelectronics Crolles 2 | Structure d'isolement entre des photodiodes |
US9515116B1 (en) * | 2015-05-22 | 2016-12-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Vertical transfer gate structure for a back-side illumination (BSI) complementary metal-oxide-semiconductor (CMOS) image sensor using global shutter capture |
US9786704B2 (en) * | 2015-09-10 | 2017-10-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS image sensor structure with crosstalk improvement |
JP6744748B2 (ja) * | 2016-04-06 | 2020-08-19 | キヤノン株式会社 | 固体撮像装置及びその製造方法 |
US10438987B2 (en) * | 2016-09-23 | 2019-10-08 | Apple Inc. | Stacked backside illuminated SPAD array |
US9923009B1 (en) * | 2016-11-03 | 2018-03-20 | Omnivision Technologies, Inc. | Image sensor with hybrid deep trench isolation |
US10468444B2 (en) * | 2017-11-09 | 2019-11-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor device and method for forming the same |
US11075242B2 (en) * | 2017-11-27 | 2021-07-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices for image sensing |
JP2019145544A (ja) * | 2018-02-16 | 2019-08-29 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子 |
KR102558828B1 (ko) * | 2018-10-10 | 2023-07-24 | 삼성전자주식회사 | 차광 패턴을 포함하는 이미지 센서 |
KR102599049B1 (ko) | 2018-11-06 | 2023-11-06 | 삼성전자주식회사 | 이미지 센서 |
KR102652444B1 (ko) | 2019-01-11 | 2024-03-28 | 삼성전자주식회사 | 이미지 센서 |
US20220359584A1 (en) * | 2019-07-12 | 2022-11-10 | Sony Semiconductor Solutions Corporation | Photodetector |
KR20210145405A (ko) * | 2020-05-25 | 2021-12-02 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 |
-
2020
- 2020-07-07 KR KR1020200083601A patent/KR20220005888A/ko unknown
-
2021
- 2021-02-23 US US17/182,364 patent/US11837621B2/en active Active
- 2021-06-02 JP JP2021092854A patent/JP7504057B2/ja active Active
-
2023
- 2023-11-13 US US18/388,882 patent/US20240079436A1/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012028459A (ja) | 2010-07-21 | 2012-02-09 | Sony Corp | 半導体装置、固体撮像装置、半導体装置の製造方法、固体撮像装置の製造方法、電子機器 |
WO2019188386A1 (ja) | 2018-03-29 | 2019-10-03 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、および電子機器 |
JP2019176089A (ja) | 2018-03-29 | 2019-10-10 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、および電子機器 |
US20210005651A1 (en) | 2018-03-29 | 2021-01-07 | Sony Semiconductor Solutions Corporation | Solid-state imaging device and electronic device |
Also Published As
Publication number | Publication date |
---|---|
US20240079436A1 (en) | 2024-03-07 |
KR20220005888A (ko) | 2022-01-14 |
US20220013566A1 (en) | 2022-01-13 |
JP2022014882A (ja) | 2022-01-20 |
US11837621B2 (en) | 2023-12-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11670661B2 (en) | Image sensor and method of fabricating same | |
US20240079435A1 (en) | Image sensor | |
US20220262829A1 (en) | Semiconductor device | |
US10840285B2 (en) | Image sensor | |
US20220068982A1 (en) | Image sensor | |
US20210202547A1 (en) | Image sensor and method of fabricating the same | |
JP2021077870A (ja) | イメージセンサー | |
US20230120066A1 (en) | Image sensor | |
JP7504057B2 (ja) | イメージセンサー | |
TW202306139A (zh) | 影像感測器 | |
US11837615B2 (en) | Image sensor with increased gate pattern width | |
US20240222408A1 (en) | Image sensor | |
US20230352509A1 (en) | Image sensor | |
US20220336514A1 (en) | Image sensor | |
US20220216250A1 (en) | Image sensor with pixel separation structure | |
US20220109014A1 (en) | Image sensor with trench structures | |
US20240204025A1 (en) | Image sensor | |
US20230170369A1 (en) | Image sensor and method of manufacturing the same | |
KR20220043943A (ko) | 이미지 센서 | |
KR20210081217A (ko) | 이미지 센서 및 이의 제조 방법 | |
KR20230138186A (ko) | Cmos 이미지 센서 | |
KR20230022369A (ko) | 이미지 센서 및 그 제조 방법 | |
KR20230033963A (ko) | 이미지 센서 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230203 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20231227 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240109 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240408 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240604 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240611 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7504057 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |