JP7308595B2 - イメージセンサ - Google Patents
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- JP7308595B2 JP7308595B2 JP2018126170A JP2018126170A JP7308595B2 JP 7308595 B2 JP7308595 B2 JP 7308595B2 JP 2018126170 A JP2018126170 A JP 2018126170A JP 2018126170 A JP2018126170 A JP 2018126170A JP 7308595 B2 JP7308595 B2 JP 7308595B2
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- 230000001681 protective effect Effects 0.000 claims description 115
- 238000006243 chemical reaction Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 182
- 239000010410 layer Substances 0.000 description 40
- 239000004065 semiconductor Substances 0.000 description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 229910020286 SiOxNy Inorganic materials 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- 238000002438 flame photometric detection Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012044 organic layer Substances 0.000 description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910004286 SiNxOy Inorganic materials 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
- H01L27/14663—Indirect radiation imagers, e.g. using luminescent members
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2002—Optical details, e.g. reflecting or diffusing layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20183—Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/247—Detector read-out circuitry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Toxicology (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
図6乃至図8の例では、信号線281及びバイアス線283の少なくとも一部が、第1有機膜230より上層に位置しているが、信号線281及びバイアス線283の全体が第1有機膜230より上層に位置しなくてもよい。
Claims (6)
- 基板上に配置されたスイッチング素子と、
前記スイッチング素子に接続された光電変換素子と、
前記光電変換素子を直接覆う第1保護膜と、
前記スイッチング素子よりも上層に位置し、前記第1保護膜に接する第1有機膜と、を備え、
前記第1有機膜は、前記光電変換素子の端面を含む前記光電変換素子の部位、である第1端部を覆い、
前記第1端部を覆う前記第1有機膜の端部である第1被覆部は、前記光電変換素子方向への傾斜を有して終端し、
前記第1有機膜は、前記光電変換素子のうち前記第1端部のみを覆う、イメージセンサであって、
前記第1有機膜を直接覆う第2保護膜と、
前記第1有機膜及び前記第2保護膜よりも上層に位置する配線を直接覆う第3保護膜と、を備え、
前記第1保護膜、前記第2保護膜、及び前記第3保護膜は無機膜であり、
前記第3保護膜は前記第2保護膜を直接覆い、
前記第2保護膜は前記第1保護膜を直接覆い、
前記第2保護膜の前記第1被覆部を直接覆う部分は、前記光電変換素子方向への傾斜を有する、イメージセンサ。 - 請求項1に記載のイメージセンサであって、
マトリクス状に配置された複数の画素を含み、
前記複数の画素それぞれは、前記スイッチング素子と、前記光電変換素子と、を含み、
前記第1有機膜は、前記光電変換素子の間、及び前記複数の画素において最も外側に位置する光電変換素子である最外光電変換素子の外側に配置され、
前記最外光電変換素子の外側に位置する前記第1有機膜の端部は、前記第2保護膜で直接覆われている、イメージセンサ。 - 請求項1に記載のイメージセンサであって、
前記第1有機膜よりも上層に第2有機膜を備える、イメージセンサ。 - 請求項1に記載のイメージセンサであって、
複数の前記光電変換素子を備え、
1つの前記第1保護膜が、前記複数の光電変換素子の全てを直接覆う、イメージセンサ。 - 請求項1に記載のイメージセンサであって、
マトリクス状に配置された複数の画素を含み、
前記複数の画素それぞれは、前記スイッチング素子と、前記光電変換素子と、を含み、
前記イメージセンサは、
前記スイッチング素子に接続されたゲート線及び信号線と、
行方向に配置された画素からなる画素行を選択し、前記ゲート線を介して、前記選択中の画素行の画素に出力信号を出力して前記スイッチング素子を導通状態にする、走査部と、
前記選択中の画素行の画素の光電変換素子からの信号を、導通状態の前記スイッチング素子及び前記信号線を介して検出する、検出部と、を備え、
前記信号線は、前記第1有機膜を介して、前記光電変換素子と隔てられている、イメージセンサ。 - 請求項1に記載のイメージセンサであって、
前記スイッチング素子を覆うスイッチング素子保護膜を備え、
前記光電変換素子及び前記第1有機膜は、前記スイッチング素子保護膜上に配置されている、イメージセンサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018126170A JP7308595B2 (ja) | 2018-07-02 | 2018-07-02 | イメージセンサ |
CN201910542833.3A CN110676270A (zh) | 2018-07-02 | 2019-06-21 | 图像传感器 |
US16/459,792 US10914846B2 (en) | 2018-07-02 | 2019-07-02 | Image sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018126170A JP7308595B2 (ja) | 2018-07-02 | 2018-07-02 | イメージセンサ |
Publications (3)
Publication Number | Publication Date |
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JP2020004935A JP2020004935A (ja) | 2020-01-09 |
JP2020004935A5 JP2020004935A5 (ja) | 2021-08-05 |
JP7308595B2 true JP7308595B2 (ja) | 2023-07-14 |
Family
ID=69008066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018126170A Active JP7308595B2 (ja) | 2018-07-02 | 2018-07-02 | イメージセンサ |
Country Status (3)
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US (1) | US10914846B2 (ja) |
JP (1) | JP7308595B2 (ja) |
CN (1) | CN110676270A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102569741B1 (ko) * | 2018-10-31 | 2023-08-22 | 엘지디스플레이 주식회사 | 디지털 엑스레이 검출기용 박막 트랜지스터 어레이 기판 및 이를 포함하는 디지털 엑스레이 검출기 |
CN111508986A (zh) * | 2020-04-29 | 2020-08-07 | Tcl华星光电技术有限公司 | 一种传感器及其制作方法以及光电转换装置 |
DE112021002303B4 (de) * | 2020-06-08 | 2023-09-21 | Rohm Co. Ltd. | Halbleiterbauelement |
US11804503B2 (en) * | 2020-06-12 | 2023-10-31 | Sharp Kabushiki Kaisha | Photoelectric conversion device and x-ray imaging device |
Citations (10)
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JP2010245078A (ja) | 2009-04-01 | 2010-10-28 | Epson Imaging Devices Corp | 光電変換装置、エックス線撮像装置 |
JP2014078651A (ja) | 2012-10-12 | 2014-05-01 | Nlt Technologies Ltd | 光電変換装置及びその製造方法並びにx線画像検出装置 |
JP2014116429A (ja) | 2012-12-07 | 2014-06-26 | Japan Display Inc | 撮像装置及び撮像表示システム |
JP2015090957A (ja) | 2013-11-07 | 2015-05-11 | Nltテクノロジー株式会社 | イメージセンサ及びその製造方法 |
JP2015144298A (ja) | 2015-03-04 | 2015-08-06 | キヤノン株式会社 | 半導体装置の製造方法 |
WO2015146855A1 (ja) | 2014-03-28 | 2015-10-01 | 富士フイルム株式会社 | 放射線検出装置及び放射線検出装置の製造方法 |
WO2016002563A1 (ja) | 2014-06-30 | 2016-01-07 | シャープ株式会社 | 撮像パネル及びx線撮像装置 |
WO2016195000A1 (ja) | 2015-06-04 | 2016-12-08 | シャープ株式会社 | フォトセンサ基板 |
WO2018056255A1 (ja) | 2016-09-21 | 2018-03-29 | シャープ株式会社 | 撮像パネル及びその製造方法 |
WO2018070349A1 (ja) | 2016-10-11 | 2018-04-19 | シャープ株式会社 | 撮像パネル及びその製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US6465824B1 (en) * | 2000-03-09 | 2002-10-15 | General Electric Company | Imager structure |
TW201403804A (zh) * | 2012-07-05 | 2014-01-16 | Sony Corp | 固體攝像裝置及其製造方法、以及電子機器 |
JP2014081358A (ja) * | 2012-09-27 | 2014-05-08 | Fujifilm Corp | 放射線画像検出装置 |
JP2015012239A (ja) * | 2013-07-01 | 2015-01-19 | ソニー株式会社 | 撮像素子および電子機器 |
JP2018084485A (ja) * | 2016-11-24 | 2018-05-31 | コニカミノルタ株式会社 | 放射線画像撮影装置 |
KR102506885B1 (ko) * | 2018-02-27 | 2023-03-06 | 삼성전자주식회사 | 이미지 센서 |
-
2018
- 2018-07-02 JP JP2018126170A patent/JP7308595B2/ja active Active
-
2019
- 2019-06-21 CN CN201910542833.3A patent/CN110676270A/zh active Pending
- 2019-07-02 US US16/459,792 patent/US10914846B2/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010245078A (ja) | 2009-04-01 | 2010-10-28 | Epson Imaging Devices Corp | 光電変換装置、エックス線撮像装置 |
JP2014078651A (ja) | 2012-10-12 | 2014-05-01 | Nlt Technologies Ltd | 光電変換装置及びその製造方法並びにx線画像検出装置 |
JP2014116429A (ja) | 2012-12-07 | 2014-06-26 | Japan Display Inc | 撮像装置及び撮像表示システム |
JP2015090957A (ja) | 2013-11-07 | 2015-05-11 | Nltテクノロジー株式会社 | イメージセンサ及びその製造方法 |
WO2015146855A1 (ja) | 2014-03-28 | 2015-10-01 | 富士フイルム株式会社 | 放射線検出装置及び放射線検出装置の製造方法 |
WO2016002563A1 (ja) | 2014-06-30 | 2016-01-07 | シャープ株式会社 | 撮像パネル及びx線撮像装置 |
JP2015144298A (ja) | 2015-03-04 | 2015-08-06 | キヤノン株式会社 | 半導体装置の製造方法 |
WO2016195000A1 (ja) | 2015-06-04 | 2016-12-08 | シャープ株式会社 | フォトセンサ基板 |
WO2018056255A1 (ja) | 2016-09-21 | 2018-03-29 | シャープ株式会社 | 撮像パネル及びその製造方法 |
WO2018070349A1 (ja) | 2016-10-11 | 2018-04-19 | シャープ株式会社 | 撮像パネル及びその製造方法 |
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Publication number | Publication date |
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CN110676270A (zh) | 2020-01-10 |
US10914846B2 (en) | 2021-02-09 |
JP2020004935A (ja) | 2020-01-09 |
US20200003911A1 (en) | 2020-01-02 |
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