JP7269095B2 - ガラス加工用テープ - Google Patents
ガラス加工用テープ Download PDFInfo
- Publication number
- JP7269095B2 JP7269095B2 JP2019100127A JP2019100127A JP7269095B2 JP 7269095 B2 JP7269095 B2 JP 7269095B2 JP 2019100127 A JP2019100127 A JP 2019100127A JP 2019100127 A JP2019100127 A JP 2019100127A JP 7269095 B2 JP7269095 B2 JP 7269095B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- glass
- tape
- adhesive
- base film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/54—Glass
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
Landscapes
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Adhesive Tapes (AREA)
- Dicing (AREA)
- Laser Beam Processing (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Laminated Bodies (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019100127A JP7269095B2 (ja) | 2019-05-29 | 2019-05-29 | ガラス加工用テープ |
SG11202100514UA SG11202100514UA (en) | 2019-05-29 | 2020-03-04 | Tape for glass processing |
CN202080003823.3A CN112351859B (zh) | 2019-05-29 | 2020-03-04 | 玻璃加工用胶带 |
KR1020207037105A KR102505643B1 (ko) | 2019-05-29 | 2020-03-04 | 유리 가공용 테이프 |
PCT/JP2020/009035 WO2020240964A1 (ja) | 2019-05-29 | 2020-03-04 | ガラス加工用テープ |
TW109117771A TWI743810B (zh) | 2019-05-29 | 2020-05-28 | 玻璃加工用膠帶 |
PH12021550127A PH12021550127A1 (en) | 2019-05-29 | 2021-01-18 | Tape for glass processing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019100127A JP7269095B2 (ja) | 2019-05-29 | 2019-05-29 | ガラス加工用テープ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020194905A JP2020194905A (ja) | 2020-12-03 |
JP7269095B2 true JP7269095B2 (ja) | 2023-05-08 |
Family
ID=73545917
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019100127A Active JP7269095B2 (ja) | 2019-05-29 | 2019-05-29 | ガラス加工用テープ |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP7269095B2 (ko) |
KR (1) | KR102505643B1 (ko) |
CN (1) | CN112351859B (ko) |
PH (1) | PH12021550127A1 (ko) |
SG (1) | SG11202100514UA (ko) |
TW (1) | TWI743810B (ko) |
WO (1) | WO2020240964A1 (ko) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010258341A (ja) | 2009-04-28 | 2010-11-11 | Mitsubishi Plastics Inc | ダイシング用粘着シート |
JP2012216842A (ja) | 2011-03-31 | 2012-11-08 | Furukawa Electric Co Ltd:The | ダイシングテープ及び半導体ウエハ加工方法 |
JP2018166148A (ja) | 2017-03-28 | 2018-10-25 | リンテック株式会社 | ダイシングシート用基材フィルムおよびダイシングシート |
JP6535119B1 (ja) | 2018-03-28 | 2019-06-26 | 古河電気工業株式会社 | 半導体加工用テープ |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0235119B2 (ja) * | 1982-12-27 | 1990-08-08 | Tokyo Gasu Kk | Suiheichokyorisakushinkohoniokerukutsusakuhetsudo |
JPH10310749A (ja) * | 1997-05-13 | 1998-11-24 | Mitsui Chem Inc | 半導体ウエハダイシング用粘着フィルム及び半導体ウエハのダイシング方法 |
WO2000061658A1 (fr) * | 1999-04-09 | 2000-10-19 | Kaneka Corporation | Resine polyimide, composition de resine a resistance amelioree a l'humidite la comprenant, solution adhesive, colle en film adhesif en couches et leurs procedes de production |
JP4358502B2 (ja) | 2002-03-12 | 2009-11-04 | 浜松ホトニクス株式会社 | 半導体基板の切断方法 |
TWI310230B (en) * | 2003-01-22 | 2009-05-21 | Lintec Corp | Adhesive sheet, method for protecting surface of semiconductor wafer and method for processing work |
JP2004273895A (ja) | 2003-03-11 | 2004-09-30 | Disco Abrasive Syst Ltd | 半導体ウエーハの分割方法 |
JP5519971B2 (ja) * | 2008-11-26 | 2014-06-11 | 日東電工株式会社 | ダイシング・ダイボンドフィルム及び半導体装置の製造方法 |
JP5554118B2 (ja) * | 2010-03-31 | 2014-07-23 | 古河電気工業株式会社 | ウエハ加工用テープ |
JP5744434B2 (ja) * | 2010-07-29 | 2015-07-08 | 日東電工株式会社 | 加熱剥離シート一体型半導体裏面用フィルム、半導体素子の回収方法、及び半導体装置の製造方法 |
KR20120068453A (ko) * | 2010-12-17 | 2012-06-27 | 제일모직주식회사 | 다이싱 다이 본딩 필름 |
JP5019657B1 (ja) * | 2011-10-27 | 2012-09-05 | 古河電気工業株式会社 | 半導体デバイス加工用粘着テープ |
JP5053455B1 (ja) * | 2011-10-28 | 2012-10-17 | 古河電気工業株式会社 | 半導体加工用ダイシングテープ |
JP2013133464A (ja) * | 2011-12-27 | 2013-07-08 | Nitto Denko Corp | ガラス板用粘着シート |
JP5294358B2 (ja) * | 2012-01-06 | 2013-09-18 | 古河電気工業株式会社 | ウエハ加工用テープ及びこれを使用した半導体装置の製造方法 |
JP5731080B2 (ja) * | 2013-03-28 | 2015-06-10 | 古河電気工業株式会社 | 粘着テープおよびウエハ加工用テープ |
JP5607847B1 (ja) * | 2013-11-29 | 2014-10-15 | 古河電気工業株式会社 | 半導体加工用粘着テープ |
JP6295135B2 (ja) | 2014-04-24 | 2018-03-14 | 日東電工株式会社 | ダイシング・ダイボンドフィルム |
KR102359829B1 (ko) * | 2014-05-12 | 2022-02-07 | 덴카 주식회사 | 반도체 검사용의 내열성 점착 시트, 및 반도체 검사 방법 |
JP6445315B2 (ja) * | 2014-12-12 | 2018-12-26 | 日東電工株式会社 | ダイシングシート、ダイシング・ダイボンドフィルム及び半導体装置の製造方法 |
WO2016152957A1 (ja) | 2015-03-24 | 2016-09-29 | 古河電気工業株式会社 | 半導体加工用テープ |
JP2017147293A (ja) * | 2016-02-16 | 2017-08-24 | 日立化成株式会社 | 接着シートとダイシングテープを用いる半導体装置の製造方法 |
JP6978890B2 (ja) * | 2017-10-16 | 2021-12-08 | リンテック株式会社 | ダイシングダイボンディングシート及び半導体チップの製造方法 |
-
2019
- 2019-05-29 JP JP2019100127A patent/JP7269095B2/ja active Active
-
2020
- 2020-03-04 WO PCT/JP2020/009035 patent/WO2020240964A1/ja active Application Filing
- 2020-03-04 SG SG11202100514UA patent/SG11202100514UA/en unknown
- 2020-03-04 KR KR1020207037105A patent/KR102505643B1/ko active IP Right Grant
- 2020-03-04 CN CN202080003823.3A patent/CN112351859B/zh active Active
- 2020-05-28 TW TW109117771A patent/TWI743810B/zh active
-
2021
- 2021-01-18 PH PH12021550127A patent/PH12021550127A1/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010258341A (ja) | 2009-04-28 | 2010-11-11 | Mitsubishi Plastics Inc | ダイシング用粘着シート |
JP2012216842A (ja) | 2011-03-31 | 2012-11-08 | Furukawa Electric Co Ltd:The | ダイシングテープ及び半導体ウエハ加工方法 |
JP2018166148A (ja) | 2017-03-28 | 2018-10-25 | リンテック株式会社 | ダイシングシート用基材フィルムおよびダイシングシート |
JP6535119B1 (ja) | 2018-03-28 | 2019-06-26 | 古河電気工業株式会社 | 半導体加工用テープ |
Also Published As
Publication number | Publication date |
---|---|
PH12021550127A1 (en) | 2021-10-04 |
KR102505643B1 (ko) | 2023-03-06 |
TW202043400A (zh) | 2020-12-01 |
SG11202100514UA (en) | 2021-02-25 |
TWI743810B (zh) | 2021-10-21 |
WO2020240964A1 (ja) | 2020-12-03 |
CN112351859B (zh) | 2023-04-11 |
JP2020194905A (ja) | 2020-12-03 |
CN112351859A (zh) | 2021-02-09 |
KR20210015891A (ko) | 2021-02-10 |
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