JP7107332B2 - 分離膜の洗浄方法 - Google Patents

分離膜の洗浄方法 Download PDF

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Publication number
JP7107332B2
JP7107332B2 JP2020096369A JP2020096369A JP7107332B2 JP 7107332 B2 JP7107332 B2 JP 7107332B2 JP 2020096369 A JP2020096369 A JP 2020096369A JP 2020096369 A JP2020096369 A JP 2020096369A JP 7107332 B2 JP7107332 B2 JP 7107332B2
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Prior art keywords
membrane
silicon
water
separation
separation membrane
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JP2020096369A
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Japanese (ja)
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JP2021186779A (ja
Inventor
貴子 岩見
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Kurita Water Industries Ltd
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Kurita Water Industries Ltd
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Priority to JP2020096369A priority Critical patent/JP7107332B2/ja
Priority to PCT/JP2021/011406 priority patent/WO2021246025A1/ja
Priority to CN202180039731.5A priority patent/CN115916384B/zh
Priority to TW110111238A priority patent/TW202200257A/zh
Publication of JP2021186779A publication Critical patent/JP2021186779A/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14Ultrafiltration; Microfiltration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14Ultrafiltration; Microfiltration
    • B01D61/16Feed pretreatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • B01D65/06Membrane cleaning or sterilisation ; Membrane regeneration with special washing compositions
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/52Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities

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  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
JP2020096369A 2020-06-02 2020-06-02 分離膜の洗浄方法 Active JP7107332B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020096369A JP7107332B2 (ja) 2020-06-02 2020-06-02 分離膜の洗浄方法
PCT/JP2021/011406 WO2021246025A1 (ja) 2020-06-02 2021-03-19 分離膜の洗浄方法
CN202180039731.5A CN115916384B (zh) 2020-06-02 2021-03-19 分离膜的清洗方法
TW110111238A TW202200257A (zh) 2020-06-02 2021-03-29 分離膜之洗淨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020096369A JP7107332B2 (ja) 2020-06-02 2020-06-02 分離膜の洗浄方法

Publications (2)

Publication Number Publication Date
JP2021186779A JP2021186779A (ja) 2021-12-13
JP7107332B2 true JP7107332B2 (ja) 2022-07-27

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ID=78830777

Family Applications (1)

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JP2020096369A Active JP7107332B2 (ja) 2020-06-02 2020-06-02 分離膜の洗浄方法

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Country Link
JP (1) JP7107332B2 (zh)
CN (1) CN115916384B (zh)
TW (1) TW202200257A (zh)
WO (1) WO2021246025A1 (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011016100A (ja) 2009-07-10 2011-01-27 Kobelco Eco-Solutions Co Ltd 排水処理方法
CN106867691A (zh) 2016-12-28 2017-06-20 上海丰信环保科技有限公司 针对膜***二氧化硅结垢的清洗剂及其制备和使用

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JPS5753204A (en) * 1980-09-16 1982-03-30 Daicel Chem Ind Ltd Method for washing membrane module
JPS5943203B2 (ja) * 1980-11-17 1984-10-20 富士通株式会社 逆滲透膜の洗浄方法
JPS5916506A (ja) * 1982-07-20 1984-01-27 Matsushita Seiko Co Ltd 中空糸型膜分離モジユ−ル
US4806259A (en) * 1987-06-15 1989-02-21 The B. F. Goodrich Company Membrane cleaning compositions containing phosphorous compounds
JP3751324B2 (ja) * 1993-12-10 2006-03-01 忠弘 大見 基体の表面洗浄方法及び表面洗浄剤
JPH1066972A (ja) * 1996-08-28 1998-03-10 Nomura Micro Sci Co Ltd 水処理用分離膜の洗浄回生方法
JP3649534B2 (ja) * 1996-09-19 2005-05-18 シルトロニック・ジャパン株式会社 シリコンウェハおよびシリコン酸化物の洗浄液
JPH11319518A (ja) * 1998-05-14 1999-11-24 Kumamoto Prefecture 分離膜またはモジュールの洗浄・再生方法
JP2004154707A (ja) * 2002-11-07 2004-06-03 Mitsubishi Rayon Co Ltd 分離膜の洗浄方法
TWI365491B (en) * 2003-12-24 2012-06-01 Kao Corp Composition for cleaning semiconductor device
CN1938151B (zh) * 2004-03-31 2011-05-04 日本板硝子株式会社 形成有有机无机复合膜的物品及其制造方法
KR20070057400A (ko) * 2005-12-02 2007-06-07 삼성전자주식회사 세정액 및 이를 이용한 박막트랜지스터 기판의 제조방법
CN101641147A (zh) * 2007-04-03 2010-02-03 旭化成化学株式会社 分离膜用清洗剂、该清洗剂的制造方法和清洗方法
JP2009212383A (ja) * 2008-03-05 2009-09-17 Sanyo Chem Ind Ltd 洗浄剤組成物及び半導体基板の製造方法
KR101560433B1 (ko) * 2009-05-21 2015-10-14 스텔라 케미파 코포레이션 미세 가공 처리제 및 미세 가공 처리 방법
CN101760353B (zh) * 2009-11-17 2012-11-28 上海丰信环保科技有限公司 一种清洗膜***含硅、铁、钙镁污垢的复合清洗剂
JP5894369B2 (ja) * 2011-02-03 2016-03-30 ステラケミファ株式会社 洗浄液及び洗浄方法
CN103347822B (zh) * 2011-02-24 2016-05-04 栗田工业株式会社 反渗透膜用阻垢剂以及阻垢方法
JP6289802B2 (ja) * 2011-07-06 2018-03-07 三菱ケミカル株式会社 濾過膜洗浄剤および濾過膜の洗浄方法
JP5770049B2 (ja) * 2011-08-29 2015-08-26 株式会社アナック フッ酸含有処理液の再生方法及び再生装置
JP5692278B2 (ja) * 2013-04-25 2015-04-01 栗田工業株式会社 フッ化物含有水の処理方法及び処理装置
SG11201609957RA (en) * 2014-06-26 2017-01-27 Kurita Water Ind Ltd Method and device for treating fluoride-containing water
JP2016081985A (ja) * 2014-10-14 2016-05-16 ダイキン工業株式会社 洗浄及び/又はエッチング排液の再利用方法
JP2017113729A (ja) * 2015-12-25 2017-06-29 栗田工業株式会社 膜洗浄剤、膜洗浄液及び膜の洗浄方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011016100A (ja) 2009-07-10 2011-01-27 Kobelco Eco-Solutions Co Ltd 排水処理方法
CN106867691A (zh) 2016-12-28 2017-06-20 上海丰信环保科技有限公司 针对膜***二氧化硅结垢的清洗剂及其制备和使用

Also Published As

Publication number Publication date
CN115916384A (zh) 2023-04-04
CN115916384B (zh) 2024-03-19
TW202200257A (zh) 2022-01-01
JP2021186779A (ja) 2021-12-13
WO2021246025A1 (ja) 2021-12-09

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