JP6882656B2 - ロードポート及びロードポートを備える基板搬送システム - Google Patents
ロードポート及びロードポートを備える基板搬送システム Download PDFInfo
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
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Description
図1は、半導体工場に設置された半導体製造装置1及びその周辺の概略図である。図1(a)に示すように、半導体製造装置1は、ウェハ等の基板を処理する基板処理装置2と、基板を基板処理装置2との間で受渡しするEFEM3(本発明の基板搬送システム)とを備える。半導体製造装置1は、以下の一連の動作を行う。まず、EFEM3が、基板を収容するFOUP300(本発明の容器)を、後述するOHT400(本発明の輸送手段)等から受け取る。次に、EFEM3は、FOUP300から基板を取り出して、基板処理装置2に基板を渡す。基板処理装置2は、EFEM3から受け取った基板の処理を行い、基板をEFEM3に戻す。EFEM3は、基板をFOUP300に戻す。その後、FOUP300は、OHT400等によって運ばれていく。
次に、ロードポート4の構成について説明する。なお、図2に示される方向を前後左右上下方向とする。
次に、図6に示すように、EFEM3に設置されたロードポート4の動作ステップについて、図6〜図9を用いて説明する。
4,4a,5 ロードポート
6,6b 搬送室
7 搬送ロボット
10,11,29 制御装置
20,20a ベース
21,21a ドア部
22 フレーム
23 載置トレイ
24 回転機構
25 移動機構
26 センサ
29 制御装置
30,30a 開口部
31,31a ドア
39,40 ノズル通過孔
47 可動部
55 注入ノズル
56 排出ノズル
60 移動機構
300 FOUP
400 OHT
401 レール
Claims (8)
- 基板を収容する容器が載置される載置部を備えており、前記載置部が、予め設置された軌道に沿って走行し前記容器を輸送する輸送手段との間で前記容器を受渡し可能な受渡位置にあるときに、前記容器を前記輸送手段との間で受渡しするロードポートであって、
立設配置され、開口部を有するベースと、
前記ベースに設けられ、前記開口部を開閉するドア部と、
前記ベースと直交する前後方向において、前記ベースから前方に突設され、前記載置部を支持するフレームと、
前記載置部を鉛直軸周りに回転させる回転機構と、
前記ドア部及び前記載置部のうち少なくともいずれか一方を他方から遠ざけることが可能に構成された移動機構と、
制御部と、を備え、
前記制御部は、
前記載置部が前記受渡位置にあるときに前記容器が前記輸送手段によって前記載置部に載置された後、且つ、前記ドア部と前記載置部とが互いに近づけられる前に、
前記回転機構が前記載置部を回転させる前に又は回転させている最中に、前記移動機構を制御して、前記ドア部と前記載置部とを互いに遠ざけることを特徴とするロードポート。 - 前記移動機構は、前記載置部を前記受渡位置から前記前後方向に移動させるものであり、
前記容器が前記輸送手段によって前記受渡位置にある前記載置部に載置された後、前記回転機構が前記載置部を回転させる前に又は回転させている最中に、前記載置部を前記受渡位置よりも前記前方に移動させることを特徴とする請求項1に記載のロードポート。 - 前記回転機構は、前記移動機構が前記受渡位置よりも前記前方の回転位置まで前記載置部を移動させた後に、前記載置部を回転させることを特徴とする請求項2に記載のロードポート。
- 前記移動機構は、前記載置部を前記フレームよりも前記前方に突出させることで、前記載置部を前記回転位置に移動させることを特徴とする請求項3に記載のロードポート。
- 前記フレームの前記前方にある障害物を検知する検知手段と、
前記検知手段が前記障害物を検知した場合に前記載置部の前記回転位置への移動を規制する制御手段と、を備えることを特徴とする請求項4に記載のロードポート。 - 前記移動機構は、前記回転機構を下方から支持し、且つ、前記前後方向に移動可能な可動部を有しており、
前記載置部は、前記回転機構によって下方から支持されており、
前記載置部に載置された前記容器の下面に形成されたノズル挿入口に接続する接続位置と、前記ノズル挿入口から下方に離間する離間位置との間で昇降可能な、ガスの注入又は排出用のノズルが、前記可動部に支持されていることを特徴とする請求項2〜5のいずれかに記載のロードポート。 - 前記移動機構が、前記容器の側面に設けられた蓋が前記ドア部とともに開閉されるドア開閉位置へ前記載置部を移動させる前に又は移動させる最中に、前記ノズルが前記接続位置に移動し、前記ノズルを介して前記容器へのガスの注入又は排出が開始されることを特徴とする請求項6に記載のロードポート。
- 請求項1〜7のいずれかに記載のロードポートである第1ロードポートと、
前記載置部を備えており、且つ、前記回転機構を備えていない第2ロードポートと、
前記基板を前記容器に出し入れする搬送手段を有する搬送室と、を備え、
前記第1ロードポートの前記載置部の前記受渡位置と、前記第2ロードポートの前記載置部の前記受渡位置とが、前記輸送手段の前記軌道に沿って配置されていることを特徴とする基板搬送システム。
Priority Applications (8)
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JP2016136175A JP6882656B2 (ja) | 2016-07-08 | 2016-07-08 | ロードポート及びロードポートを備える基板搬送システム |
TW106120607A TWI765896B (zh) | 2016-07-08 | 2017-06-20 | 裝載埠及具備裝載埠之基板搬運系統 |
TW111116708A TWI845933B (zh) | 2016-07-08 | 2017-06-20 | 裝載埠及具備裝載埠之基板搬運系統 |
KR1020170084623A KR102414029B1 (ko) | 2016-07-08 | 2017-07-04 | 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템 |
CN202310983662.4A CN116978843A (zh) | 2016-07-08 | 2017-07-06 | 加载端口及包括加载端口的基板搬送*** |
CN201710547109.0A CN107591352B (zh) | 2016-07-08 | 2017-07-06 | 加载端口及包括加载端口的基板输送*** |
JP2021074617A JP7148825B2 (ja) | 2016-07-08 | 2021-04-27 | ロードポート及びロードポートを備える基板搬送システム |
KR1020220076561A KR102481186B1 (ko) | 2016-07-08 | 2022-06-23 | 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템 |
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JP2021074617A Active JP7148825B2 (ja) | 2016-07-08 | 2021-04-27 | ロードポート及びロードポートを備える基板搬送システム |
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KR (2) | KR102414029B1 (ja) |
CN (2) | CN116978843A (ja) |
TW (1) | TWI765896B (ja) |
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US10403514B1 (en) * | 2018-04-12 | 2019-09-03 | Asm Ip Holding B.V. | Substrate transporting system, storage medium and substrate transporting method |
JP7256358B2 (ja) * | 2018-05-24 | 2023-04-12 | シンフォニアテクノロジー株式会社 | 基板収納容器管理システム、基板収納容器管理方法 |
JP7085467B2 (ja) * | 2018-12-11 | 2022-06-16 | 平田機工株式会社 | ロードロックチャンバ |
JP6856692B2 (ja) * | 2019-03-28 | 2021-04-07 | 平田機工株式会社 | ロードポート |
CN110406910B (zh) * | 2019-07-10 | 2021-02-02 | 深圳市华星光电半导体显示技术有限公司 | 高空环形台车*** |
JP7422577B2 (ja) | 2020-03-23 | 2024-01-26 | 平田機工株式会社 | ロードポート及び制御方法 |
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KR20180006312A (ko) | 2018-01-17 |
TW201804556A (zh) | 2018-02-01 |
CN107591352A (zh) | 2018-01-16 |
JP2018006705A (ja) | 2018-01-11 |
TWI765896B (zh) | 2022-06-01 |
JP2021119617A (ja) | 2021-08-12 |
CN107591352B (zh) | 2023-08-15 |
JP7148825B2 (ja) | 2022-10-06 |
KR20220097367A (ko) | 2022-07-07 |
KR102414029B1 (ko) | 2022-06-29 |
KR102481186B1 (ko) | 2022-12-26 |
CN116978843A (zh) | 2023-10-31 |
TW202234565A (zh) | 2022-09-01 |
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