JP5338335B2 - 搬送容器の開閉装置及びプローブ装置 - Google Patents
搬送容器の開閉装置及びプローブ装置 Download PDFInfo
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- JP5338335B2 JP5338335B2 JP2009013436A JP2009013436A JP5338335B2 JP 5338335 B2 JP5338335 B2 JP 5338335B2 JP 2009013436 A JP2009013436 A JP 2009013436A JP 2009013436 A JP2009013436 A JP 2009013436A JP 5338335 B2 JP5338335 B2 JP 5338335B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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Description
[特許文献2] 特開2003−249537号公報(段落番号0007)
前面の開口部に対して着脱自在に蓋体が取り付けられると共に、当該蓋体に設けられたラッチ機構を動かすことにより蓋体が容器本体にロックされるように構成され、複数の基板を棚状に保持するための搬送容器の前記蓋体を開閉する搬送容器の開閉装置において、
搬送容器を載置する載置台がその内部に設けられた筐体と、
この筐体の正面に開口し、シャッタにより開閉される搬送容器搬入口と、
前記筐体の側面に開口し、搬送容器内の基板の受け渡しを行うための受け渡し口と、
前記載置台を鉛直軸回りに回転させる回転機構と、
前記筐体内の背面側に設けられ、前記蓋体のラッチ機構に係合して当該ラッチ機構を動かすことにより蓋体と容器本体とのロックを解除するための鍵部と、前記蓋体の前面に吸着する吸引方式の吸着機構と、を備え、前記搬送容器の蓋体を開閉すると共に保持するための蓋体開閉機構と、
前記蓋体開閉機構を前記搬送容器に対して進退させる移動機構と、
この移動機構により前記蓋体開閉機構を移動させて、当該搬送容器の蓋体のラッチ機構を蓋体開閉機構の鍵部に係合させると共に前記吸着機構により蓋体を吸着し、次いでラッチ機構を動かすことにより蓋体と容器本体とのロックを解除し、搬送容器から当該蓋体を取り外し、次いで前記蓋体開閉機構を前記搬送容器から離間させ、載置台を回転させて搬送容器の向きを前記受け渡し口に向くように制御信号を出力する制御部と、を備え、
前記載置台の回転中心は、搬送容器内の基板である半導体ウエハの中心よりも前記搬送容器搬入口側に偏心しかつ前記受け渡し口側に偏心していることを特徴とする。
本発明の第2の実施形態に係るプローブ装置について図8ないし図11を参照して説明する。第2の実施形態のプローブ装置は、ロードポート11の内部構造を除いては、第1の実施形態と同じであるため、第1の実施形態と同一部分または相当部分には、同一の符号を付して説明する。第1の実施形態では、FOUP100を進退させていたが、第2の実施形態では、FOUP100を停止させた状態で、蓋体開閉機構242を進退させて蓋体91を開閉する点が異なる。なお第2の実施形態の説明では、ロードポート11とロードポート11に関連する部材についてのみ説明するものとする。
2 プローブ装置本体
3 ウェハ搬送アーム
10 搬送室
11、12 ロードポート
11a、12a 筐体
11b、12b FOUP搬入口
11c、12c シャッタ
11d、12d 受け渡し口
13、14 載置台
15 制御部
20 仕切り壁
21A、21B プローブユニット
22 ケーシング
22a、22b 搬送口
30 アーム体
40 回転機構
42、242 蓋体開閉機構
42a 鍵部
42b ピン
55 プリアライメントユニット
60 載置板
61 移動機構
62 回転支持部
100 FOUP
270 進退機構(移動機構)
W ウェハ
Claims (3)
- 前面の開口部に対して着脱自在に蓋体が取り付けられると共に、当該蓋体に設けられたラッチ機構を動かすことにより蓋体が容器本体にロックされるように構成され、複数の基板を棚状に保持するための搬送容器の前記蓋体を開閉する搬送容器の開閉装置において、
搬送容器を載置する載置台がその内部に設けられた筐体と、
この筐体の正面に開口し、シャッタにより開閉される搬送容器搬入口と、
前記筐体の側面に開口し、搬送容器内の基板の受け渡しを行うための受け渡し口と、
前記載置台を鉛直軸回りに回転させる回転機構と、
前記筐体内の背面側に設けられ、前記蓋体のラッチ機構に係合して当該ラッチ機構を動かすことにより蓋体と容器本体とのロックを解除するための鍵部と、前記蓋体の前面に吸着する吸引方式の吸着機構と、を備え、前記搬送容器の蓋体を開閉すると共に保持するための蓋体開閉機構と、
前記蓋体開閉機構を前記搬送容器に対して進退させる移動機構と、
この移動機構により前記蓋体開閉機構を移動させて、当該搬送容器の蓋体のラッチ機構を蓋体開閉機構の鍵部に係合させると共に前記吸着機構により蓋体を吸着し、次いでラッチ機構を動かすことにより蓋体と容器本体とのロックを解除し、搬送容器から当該蓋体を取り外し、次いで前記蓋体開閉機構を前記搬送容器から離間させ、載置台を回転させて搬送容器の向きを前記受け渡し口に向くように制御信号を出力する制御部と、を備え、
前記載置台の回転中心は、搬送容器内の基板である半導体ウエハの中心よりも前記搬送容器搬入口側に偏心しかつ前記受け渡し口側に偏心していることを特徴とする搬送容器の開閉装置。 - 請求項1に記載の搬送容器の開閉装置と、前記筐体の背面側にて左右方向に並んで設けられ、プローブカードにより基板の検査を行う複数台のプローブユニットと、前記受け渡し口を介して搬送容器内の基板を受け取り、当該受け渡し口よりも下方側に降下した状態で基板をプローブユニット内に搬送する搬送機構と、を備えたことを特徴とするプローブ装置。
- 前記搬送容器の開閉装置は、前記搬送機構の配置領域を介して互いに向き合って2個設けられていることを特徴とする請求項2に記載のプローブ装置。
Priority Applications (5)
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JP2009013436A JP5338335B2 (ja) | 2008-08-13 | 2009-01-23 | 搬送容器の開閉装置及びプローブ装置 |
US12/539,952 US8267633B2 (en) | 2008-08-13 | 2009-08-12 | FOUP opening/closing device and probe apparatus |
TW098127142A TWI503915B (zh) | 2008-08-13 | 2009-08-12 | FOUP opening and closing device and probe device |
CN2009101652069A CN101651112B (zh) | 2008-08-13 | 2009-08-13 | Foup开闭装置和探针装置 |
KR1020090074679A KR101279318B1 (ko) | 2008-08-13 | 2009-08-13 | Foup 개폐 장치 및 프로브 장치 |
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JP2008208340 | 2008-08-13 | ||
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JP2009013436A JP5338335B2 (ja) | 2008-08-13 | 2009-01-23 | 搬送容器の開閉装置及びプローブ装置 |
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JP2010067940A JP2010067940A (ja) | 2010-03-25 |
JP5338335B2 true JP5338335B2 (ja) | 2013-11-13 |
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US (1) | US8267633B2 (ja) |
JP (1) | JP5338335B2 (ja) |
KR (1) | KR101279318B1 (ja) |
CN (1) | CN101651112B (ja) |
TW (1) | TWI503915B (ja) |
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