JP6774589B1 - 樹脂組成物のエッチング液及びエッチング方法 - Google Patents

樹脂組成物のエッチング液及びエッチング方法 Download PDF

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Publication number: JP6774589B1
Authority: JP; Japan
Prior art keywords: etching; resin composition; mass; resin; etching solution
Prior art date: 2019-01-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2020526634A

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English (en)

Japanese (ja)

Other versions

JPWO2020158610A1 (ja

Inventor

寛彦後閑

昌大田邉

隆宮崎

豊田　裕二

裕二豊田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitsubishi Paper Mills Ltd

Original Assignee

Mitsubishi Paper Mills Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2019-01-28

Filing date

2020-01-24

Publication date

2020-10-28

2020-01-24 Application filed by Mitsubishi Paper Mills Ltd filed Critical Mitsubishi Paper Mills Ltd

2020-10-28 Application granted granted Critical

2020-10-28 Publication of JP6774589B1 publication Critical patent/JP6774589B1/ja

2021-02-18 Publication of JPWO2020158610A1 publication Critical patent/JPWO2020158610A1/ja

Status Active legal-status Critical Current

2040-01-24 Anticipated expiration legal-status Critical

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238000005530 etching Methods 0.000 title claims abstract description 275
239000011342 resin composition Substances 0.000 title claims abstract description 245
238000000034 method Methods 0.000 title claims abstract description 83
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229920005989 resin Polymers 0.000 claims abstract description 124
239000011347 resin Substances 0.000 claims abstract description 124
239000011256 inorganic filler Substances 0.000 claims abstract description 69
229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 69
239000012766 organic filler Substances 0.000 claims abstract description 63
HZAXFHJVJLSVMW-UHFFFAOYSA-N monoethanolamine hydrochloride Natural products NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims abstract description 15
239000000243 solution Substances 0.000 claims description 129
238000005406 washing Methods 0.000 claims description 43
229920005862 polyol Polymers 0.000 claims description 35
239000007788 liquid Substances 0.000 claims description 23
229910052751 metal Inorganic materials 0.000 claims description 23
239000002184 metal Substances 0.000 claims description 23
239000007864 aqueous solution Substances 0.000 claims description 12
125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 10
PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 8
239000003945 anionic surfactant Substances 0.000 claims description 8
230000001678 irradiating effect Effects 0.000 claims description 6
230000002378 acidificating effect Effects 0.000 claims description 4
235000011187 glycerol Nutrition 0.000 claims description 4
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150000008044 alkali metal hydroxides Chemical class 0.000 abstract description 18
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