JP6479579B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6479579B2 JP6479579B2 JP2015110844A JP2015110844A JP6479579B2 JP 6479579 B2 JP6479579 B2 JP 6479579B2 JP 2015110844 A JP2015110844 A JP 2015110844A JP 2015110844 A JP2015110844 A JP 2015110844A JP 6479579 B2 JP6479579 B2 JP 6479579B2
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Description
図1は、第1実施形態に係る半導体装置の概略構成を示す断面図である。なお、以下の実施形態では、半導体チップが8層だけ積層されている構成を例にとるが、半導体チップがN(Nは2以上の整数)層だけ積層されている構成であってもよい。また、以下の実施形態では、半導体装置として、NANDフラッシュメモリを例にとるが、半導体装置は、DRAM(Dynamic Random Access Memory)、FRAM(登録商標)(Ferroelectric Random Access Memory)、MRAM(Magnetoresistive Random Access Memory)、PCRAM(Phase Change Random Access Memory)などであってもよいし、ロジック回路やプロセッサなどであってもよい。なお、図1における方向を示す語である表と裏は、図1における支持板1側を表、実装基板21側を裏とした場合における方向を示し、図2〜図10における表と裏とは必ずしも一致しない。
図1において、チップ積層体TA1は、積層された半導体チップP1〜P8を備える。この時、各半導体チップP1〜P8の厚さは、40μm以下に設定することができる。チップ積層体TA1のハンドリング時にチップ積層体TA1が破壊されるのを防止するため、チップ積層体TA1は接着層2を介して支持板1に固定することができる。支持板1は、例えば、リードフレームなどの金属板を用いることができる。支持板1の材料は、Cuであってもよいし、42アロイ(Fe−Ni系合金)であってもよい。接着層2は、絶縁性樹脂を用いるようにしてもよいし、ダイアタッチフィルムを用いるようにしてもよい。
各半導体チップP2〜P8には、貫通電極5が設けられている。この時、半導体チップP1には、貫通電極5を設けないようにすることができる。各貫通電極5は、側壁絶縁膜4にて半導体チップP2〜P8と絶縁されている。貫通電極5の材料は、Cu、NiまたはAlなどを用いることができる。貫通電極5と側壁絶縁膜4との間には、TiNなどのバリアメタル膜があってもよい。各半導体チップP2〜P8において、貫通電極5は、各セル領域MA1、MA2におけるセルパターンの配置の規則性を乱さない位置に配置することができる。このため、貫通電極5は、各セル領域MA1、MA2内に設けるのは好ましくなく、各セル領域MA1、MA2の周囲に設けることが好ましい。ここで、各セル領域MA1、MA2におけるセルパターンの配置の規則性を維持することで、露光時の解像度を上げることができ、NANDセルの集積度を向上させることができる。また、各半導体チップP1〜P8の反りによる各半導体チップP1〜P8間での貫通電極5の接続不良を防止するため、貫通電極5は、各セル領域MA1、MA2間に設けるようにしてもよい。
各半導体チップP2〜P7において、裏面電極6Bは貫通電極5の裏面側に接続されている。半導体チップP8において、裏面配線9Cは貫通電極5の裏面側に接続され、裏面電極6Cは裏面配線9Cに接続されている。また、半導体チップP8において、裏面電極6Dは裏面配線9Dに接続されている。裏面配線9Dの端部にはパッド電極10が設けられている。各半導体チップP2〜P8において、表面電極7Bは貫通電極5の表面側に接続されている。半導体チップP1の裏面電極6Aは半導体チップP2の表面電極7Bに接続されている。半導体チップP2〜P8間において、積層方向に隣接する半導体チップP2〜P8の裏面電極6Bと表面電極7Bが接続されている。半導体チップP8の裏面側にはインターフェースチップ3が設けられている。なお、インターフェースチップ3は、各半導体チップP1〜P8とデータ通信することができる。この時、インターフェースチップ3は、貫通電極5を介して各半導体チップP1〜P8にライトデータやコマンドやアドレスを送信したり、各半導体チップP1〜P8からリードデータを受信したりすることができる。インターフェースチップ3の代わりに、各半導体チップP1〜P8の読み書き制御を行うコントローラチップを設けるようにしてもよい。インターフェースチップ3には表面電極7C、7Dが設けられている。半導体チップP8の裏面電極6C、6Dはインターフェースチップ3の表面電極7C、7Dにそれぞれ接続されている。なお、裏面電極6A、6Bまたは表面電極7Bは、半導体チップP1〜P8間の間隔SP1を確保するために、半田バンプなどの突出電極を用いることができる。この時、裏面電極6A、6Bおよび表面電極7Bの両方が突出電極であってもよいし、突出電極と平面電極との組み合わせであってもよい。裏面電極6A、6Bおよび表面電極7Bの材料は、Au、Cu、Ni、Sn、Pg、Agなどの単層膜であってもよいし、積層膜であってもよい。裏面電極6A、6Bおよび表面電極7Bの材料として半田材を用いる場合は、例えば、Sn−Cu合金、Sn−Ag合金などを用いることができる。裏面配線9C、9Dの材料は、例えば、Cuなどを用いることができる。パッド電極10の材料は、例えば、Cu上に形成されたNiまたはNi−Pd合金などを用いることができる。パッド電極10のNiまたはNi−Pd合金の表面にAu被膜を設けるようにしてもよい。パッド電極10のNiまたはNi−Pd合金の表面にSnメッキを施してもよい。
図2において、半導体チップP1には半導体基板(半導体層)30が設けられている。半導体基板30には、ベリードウェル31Bが形成されている。ベリードウェル31B中には、セルウェル31Aが形成され、セルウェル31Aには、メモリセルアレイを設けることができる。なお、半導体基板30の材料は、例えば、Si、Ge、SiGe、GaAs、AlGaAs、InP、GaP、InGaAs、GaN、SiCなどから選択することができる。また、半導体基板30には、素子分離層52が形成されている。なお、素子分離層52は、例えば、STI(Shallow Trench Isolation)構造を用いることができる。
また、半導体基板30上には、層間絶縁膜68が形成されている。層間絶縁膜68上には、電源線65が形成されている。電源線65上には無機系保護膜62が形成され、無機系保護膜62上には有機系保護膜63が形成されている。層間絶縁膜68および無機系保護膜62の材料は、例えば、SiNまたはSiO2またはそれらの積層膜を用いることができる。有機系保護膜63の材料は、例えば、ポリイミド系樹脂膜やフェノール系樹脂膜を用いることができる。
最下層接続配線54は、ゲート電極46と同じ材料で構成することができる。最下層接続配線54およびゲート電極46は、多層配線MH1のうちの最下層配線に属することができる。ゲート電極46と最下層接続配線54は、同一の成膜工程およびエッチング工程で形成することができる。
下層接続配線57は、ソース線SCEと同じ材料で構成することができる。下層接続配線57およびソース線SCEは、多層配線MH1のうちの下層配線に属することができる。下層接続配線57およびソース線SCEは、同一の成膜工程およびCMP工程で形成することができる。下層接続配線57およびビア56は、デュアルダマシン工程にて一括して形成することができる。下層接続配線57、ビア56およびソース線SCEは、Wなどの高融点金属を用いることができる。下層接続配線57、ビア56およびソース線SCEの下地層として、TiまたはTiNなどのバリアメタル膜があってもよい。
上層接続配線59は、ビット線BLと同じ材料で構成することができる。上層接続配線59およびビット線BLは、多層配線MH1のうちの上層配線に属することができる。上層接続配線59およびビット線BLは、同一の成膜工程およびCMP工程で形成することができる。上層接続配線59およびビア58は、デュアルダマシン工程にて一括して形成することができる。上層接続配線59、ビア58およびビット線BLは、Cuなどの中融点金属を用いることができる。上層接続配線59、ビア58およびビット線BLの下地層として、TiまたはTiNなどのバリアメタル膜があってもよい。
最上層接続配線61は、電源線65と同じ材料で構成することができる。最上層接続配線61および電源線65は、多層配線MH1のうちの最上層配線に属することができる。最上層接続配線61および電源線65上は、同一の成膜工程およびエッチング工程で形成することができる。最上層接続配線61、ビア60および電源線65は、Alなどの低融点金属を用いることができる。この時、最上層接続配線61は、上層接続配線59および下層接続配線57よりも剛性の低い金属を用いることができる。最下層接続配線54、下層接続配線57、上層接続配線59およびビア56、58、60は層間絶縁膜68に埋め込むことができる。最上層接続配線61は層間絶縁膜68上に配置することができる。最上層接続配線61の周囲は無機系保護膜62で覆われるとともに、最上層接続配線61上には、図1の裏面電極6Bとして表面電極64が形成されている。
さらに、貫通電極66の直上を避けるようにビア60を配置することにより、最上層接続配線61の可撓性を向上させることができる。このため、最上層接続配線61に緩衝性を持たせることができ、表面電極64または裏面電極67を通じて貫通電極66に荷重がかかった時の応力を分散させることが可能となることから、最下層接続配線54、下層接続配線57または上層接続配線59の破壊を防止することができる。
図3(a)において、最上層接続配線61下では、貫通電極66の周囲にビア60が配置され、貫通電極66の直上にはビア60が配置されない。これにより、最上層接続配線61の可撓性を向上させることができ、表面電極64または貫通電極66に荷重がかかった時の応力を分散させることが可能となる。
図3(b)において、上層接続配線59下では、ビア58を均等の間隔で配置することができる。この時、ビア58にかかる荷重を低減させるため、貫通電極66の直上にもビア58を配置することができる。
図3(c)において、下層接続配線57下では、ビア56を均等の間隔で配置することができる。この時、ビア56にかかる荷重を低減させるため、貫通電極66の直上にもビア56を配置することができる。
なお、上述した実施形態では、半導体基板30上に形成された貫通電極66に接続される多層配線MH1として4層配線(最下層配線、下層配線、上層配線および最上層配線)を例にとったが、2層以上の配線ならば何層でもよい。この時、最下層配線は、アクティブ領域では、半導体基板30に形成されるチャネル領域の導電性の制御するゲート電極に用いることができる。
図4において、半導体基板30には、素子分離層52が形成されている。素子分離層52上には中間絶縁膜53A〜53Cが形成され、中間絶縁膜53A〜53C上には多層配線MH2が形成されている。多層配線MH2には、最下層接続配線54A〜54C、下層接続配線57A、57B、上層接続配線59Aおよび最上層接続配線61A〜61Cが設けられている。最下層接続配線54A〜54C上にはキャップ絶縁膜55A〜55Cがそれぞれ設けられている。最下層接続配線54A〜54Cは中間絶縁膜53A〜53C上にそれぞれ配置されている。下層接続配線57Aは最下層接続配線54A上に配置されている。下層接続配線57Bは最下層接続配線54B、54C上に配置されている。上層接続配線59Aは下層接続配線57A、57B上に配置されている。最上層接続配線61A、61Bは上層接続配線59A上に配置されている。最上層接続配線61Cは下層接続配線57B上に配置されている。
最下層接続配線54A〜54C、下層接続配線57A、57B、上層接続配線59Aおよび最上層接続配線61A〜61Cおよびビア56A〜56C、58A、58B、60A、60Bは層間絶縁膜68に埋め込むことができる。最上層接続配線61A〜61Cは層間絶縁膜68上に配置することができる。最上層接続配線61A〜61Cの周囲は無機系保護膜62で覆われるとともに、最上層接続配線61A〜61C上には、表面電極64A〜64Cがそれぞれ形成されている。
半導体基板30には、貫通電極66A〜66Cが設けられている。貫通電極66A〜66Cは、側壁絶縁膜65A〜65Cにて半導体基板30とそれぞれ絶縁されている。貫通電極66A〜66Cの表面側は最下層接続配線54A〜54Cにそれぞれ接合されている。貫通電極66A〜66Cの裏面側には、裏面電極67A〜67Cがそれぞれ設けられている。
図5は、第2実施形態に係る半導体装置に適用される貫通電極の接続構造を示す断面図である。
図5の構成では、第1導電層54−1、第2導電層54−2および第3導電層54−3の積層構造が図2の最下層接続配線54に用いられている。第1導電層54−1は多結晶シリコン、第2導電層54−2はWN、第3導電層54−3はWを用いることができる。第3導電層54−3の材料は、Al、Cu、W、NiSi、CoSiおよびMnから選択することができる。第1導電層54−1、第2導電層54−2および第3導電層54−3の側壁にはサイドウォール69が形成されている。サイドウォール69の材料は、例えば、SiO2を用いることができる。そして、貫通電極66は第3導電層54−3に接合されている。この時、貫通電極66は、第1導電層54−1、第2導電層54−2および第3導電層54−3の最も抵抗の低い導電層に直接接することができる。
ビア56および下層接続配線57は層間絶縁膜68Bに埋め込まれている。この時、ビア56および下層接続配線57をデュアルダマシンで形成することにより、下層接続配線57にはディッシング57Dが発生する。
ビア58および上層接続配線59は層間絶縁膜68Cに埋め込まれている。この時、ビア58および上層接続配線59をデュアルダマシンで形成することにより、上層接続配線59にはディッシング59Dが発生する。
ビア60は層間絶縁膜68Dに埋め込まれ、最上層接続配線61は層間絶縁膜68D上に配置されている。
なお、図5の実施形態では、図2の最下層接続配線54が3層構造である場合を示したが、最下層接続配線54は3層構造に限られることなく何層でもよい。
図6(a)、図6(b)、図7(a)および図7(b)は、第3実施形態に係る半導体装置の製造方法を示す断面図である。
図6(a)において、半導体基板71に素子分離層72を形成する。次に、CVDまたはスパッタなどの方法にて中間絶縁材および最下層導電材を素子分離層72上に順次成膜した後、フォトリソグラフィ技術およびRIE技術にて中間絶縁材および最下層導電材をパターニングすることにより、中間絶縁膜73および最下層接続配線74を素子分離層72上に形成する。次に、CVDなどの方法にて層間絶縁膜82を最下層接続配線74上に成膜した後、デュアルダマシンにてビア76を介して最下層接続配線74に接続された下層接続配線77を層間絶縁膜82に埋め込む。次に、CVDなどの方法にて層間絶縁膜82を下層接続配線77上に成膜した後、デュアルダマシンにてビア78を介して下層接続配線77に接続された上層接続配線79を層間絶縁膜82に埋め込む。次に、CVDなどの方法にて層間絶縁膜82を上層接続配線79上に成膜した後、上層接続配線79に接続されたビア80を層間絶縁膜82に埋め込む。次に、ビア80を介して上層接続配線79に接続された最上層接続配線81を層間絶縁膜82上に形成する。次に、最上層接続配線81の表面が露出するようにパターニングされた無機系保護膜83Aを層間絶縁膜82上に形成する。次に、最上層接続配線81の表面が露出するようにパターニングされた有機系保護膜83Bを無機系保護膜83A上に形成する。次に、バリアメタル膜84Aおよびバンプ電極84Bを最上層接続配線81上に形成し、バンプ電極84B上に金属被覆膜84Cを形成する。バリアメタル膜84Aの材料は、例えば、Ti上に積層されたCuからなる2層構造を用いることができる。バンプ電極84Bの材料は、例えば、Niを用いることができる。金属被覆膜84Cは、バンプ電極84Bに半田の濡れ性を向上させることができ、例えば、Auを用いることができる。
次に、接着層S1を介して半導体基板71の表面側を支持基板S2に接着する。この時、半導体基板71はウェハ状態とすることができる。なお、支持基板S2の材料は、Siであってもよいし、ガラスであってもよい。接着層S1の材料は、熱硬化性樹脂を用いることができる。次に、CMPやBSGなどの方法にて半導体基板71の裏面側を研磨することにより、半導体基板71を薄膜化する。この時、半導体基板71の厚さTSは50μm以下に設定することができる。次に、CVDなどの方法にて絶縁膜70A、70Bを半導体基板71の裏面に順次成膜する。絶縁膜70Aの材料はSiO2、絶縁膜70Bの材料はSiNを用いることができる。
次に、図7(a)に示すように、CVDなどの方法にて貫通孔TBの側壁に側壁絶縁膜88を成膜する。そして、貫通孔TBを通して側壁絶縁膜88と中間絶縁膜73とをエッチングすることにより、最下層接続配線74を露出させる。
次に、図7(b)に示すように、スパッタなどの方法にて貫通孔TBの側壁が覆われるようにバリアメタル膜86Aおよびシード層86Bを順次成膜する。バリアメタル膜86Aの材料はTi、シード層86Bの材料はCuを用いることができる。次に、電界メッキなどの方法にて貫通電極86Cを貫通孔TB内に埋め込む。貫通電極86Cの材料はNiを用いることができる。次に、貫通電極86Cの表面に下地金属膜87Aを形成した後、下地金属膜87A上にバンプ電極87Bを形成する。下地金属膜87Aの材料はCu、バンプ電極87Bの材料はSnを用いることができる。そして、半導体基板71が支持基板S2で支持された状態でバンプ電極87Bにプローブピンが接触されることで、半導体基板71のデバイスのテストが行われる。その後、半導体基板71の裏面側にダイシングテープ等の支持テープを貼り付けた後、接着層S1および支持基板S2を半導体基板71から剥離する。次に、半導体基板71をダイシングすることで半導体基板71が半導体チップP1〜P8に個片化される。そして、半導体チップP1〜P8を積層する場合、上層の半導体チップのバンプ電極87Bが下層の半導体チップのバンプ電極84Bと接合される。ここで、バンプ電極84BにNi、バンプ電極87BにSnが用いられている場合、バンプ電極84B、87Bの接合時にNi−Sn合金が形成される。
図8(a)は、第4実施形態に係る半導体装置の表面テストパッドのレイアウト例を示す平面図、図8(b)は、第4実施形態に係る半導体装置の表面電極を拡大して示す平面図、図8(c)は、第4実施形態に係る半導体装置の表面テストパッドを拡大して示す平面図、図8(d)は、第4実施形態に係る半導体装置の裏面テストパッドのレイアウト例を示す平面図である。
図8(a)〜図8(d)において、半導体チップP11の表面側には、表面電極91および表面テストパッド93が設けられている。表面電極91は、半導体チップP11に1ウェハあたり数万個程度配置することができる。表面テストパッド93は、1ウェハあたり半導体チップP11に数千個程度配置することができる。半導体チップP11の裏面側には、裏面電極95および裏面テストパッド96が設けられている。裏面テストパッド96間の間隔は、テスト時に裏面テストパッド96に荷重がかかり、裏面テストパッド96が潰れた場合においても、隣接する裏面テストパッド96が互いに接触しないように設定することができる。半導体チップP11には、貫通電極92、94が埋め込まれている。表面電極91と裏面電極95は、貫通電極92を介して電気的に接続されている。表面テストパッド93と裏面テストパッド96は、貫通電極94を介して電気的に接続されている。各貫通電極92、94の径R1、R2は互いに等しくすることができ、20μmφ以下に設定することができる。
図9において、半導体チップP11には半導体基板101が設けられている。半導体基板101には、素子分離層102が形成されている。素子分離層102上には中間絶縁膜103が形成され、中間絶縁膜103上には多層配線MH3が形成されている。多層配線MH3には、最下層接続配線104、下層接続配線107、上層接続配線109および最上層接続配線93が設けられている。最下層接続配線104には、第1導電層104−1、第2導電層104−2および第3導電層104−3の積層構造を用いることができる。多層配線MH3は、図5の構成と同様に構成することができる。最下層接続配線104上にはキャップ絶縁膜105が設けられている。第1導電層104−1、第2導電層104−2および第3導電層104−3の側壁にはサイドウォール119が形成されている。最下層接続配線104と下層接続配線107はビア106を介して接続されている。下層接続配線107と上層接続配線109はビア108を介して接続されている。上層接続配線109と最上層接続配線93はビア110を介して接続されている。ビア110は、貫通電極94の直上を避けるように配置することができる。
また、半導体基板101上には、層間絶縁膜118が形成されている。層間絶縁膜118上には無機系保護膜112が形成イされている。最上層接続配線93の周囲は無機系保護膜112で覆われるとともに、最上層接続配線93および無機系保護膜112上には、有機系保護膜113が形成されている。
半導体基板101には、貫通電極94が設けられている。貫通電極94は、側壁絶縁膜105にて半導体基板101と絶縁されている。3個の貫通電極94の表面側は、1個の第3導電層104−3に接合されている。各貫通電極94の裏面側には、1個の裏面電極96が設けられている。
図10(a)において、プローブカード120には、プローブピン121が設けられている。プローブピン121は、例えば、ポゴピン(スプリングピン)を用いることができる。プローブカード120の材料は、例えば、セラミックなどを用いることができる。この時、プローブピン121は、ホルダ122内に収納され、プローブピン121が昇降できるようにバネ123で支持される。プローブピン121は、表面テストパッド93の個数だけ設けることができる。プローブピン121の配置は、表面テストパッド93の配置に対応させることができる。プローブカード120はテスタ124に接続することができる。
そして、1個の表面テストパッド93に接続された3個の裏面テストパッド96に同時に接触するようにプローブピン121を押し当てることで、半導体チップP11をテストすることができる。半導体チップP11に設けられた1ウェハあたり数千個の裏面テストパッド96にプローブピン121を一度に押し当てることで、半導体チップP11のテスト時間を短くすることができる。このテストで合格した半導体チップP1〜P8だけをチップ積層体TA1に用いることにより、チップ積層体TA1の製造歩留まりを上げることができる。
また、プローブカード120と半導体チップP11との熱膨張係数の差異などにより、プローブカード120上でのプローブピン121間の間隔と、半導体チップP11上での表面テストパッド93間の間隔とがずれることがある。この場合においても、1個の表面テストパッド93に接続される3個の貫通電極94を三角形の頂点に配置することにより、1個のプローブピン121を3個の裏面テストパッド96に常に同時に接触させることができ、1個のプローブピン121の荷重を4個以上の裏面テストパッド96で受ける場合に比べて、1個の貫通電極94にかかる負荷を均一化することができる。
Claims (5)
- 半導体層と、
前記半導体層の上に設けられ、最上層配線と第1下層配線と最下層配線とを有する多層配線と、
前記半導体層に設けられたゲート電極と、
前記半導体層を貫通し、前記最下層配線に直接接する貫通電極と、
前記多層配線のうちの前記最上層配線を保護する無機系保護膜と、
前記最上層配線を前記第1下層配線に直接接続する複数の第1ビアと、
前記第1下層配線を前記最下層配線に電気的に接続する複数の第2ビアと、
前記半導体層の下に設けられ、前記貫通電極と直接接する第1の電極と、
前記多層配線に設けられ、前記最上層配線の上に設けられる第2の電極と、を備え、
前記最下層配線と前記ゲート電極とは、同じ金属を含み、
前記複数の第1ビアは前記貫通電極の直上を除く位置であって、前記最上層配線の互いに対向する端部同士を支持する位置に設けられ、
前記複数の第2ビアは前記貫通電極の直上に設けられる、
半導体装置。 - 前記最下層配線は複数の導電層が積層された積層構造を備え、前記貫通電極は前記積層構造のうちの最も抵抗の低い導電層に接合される請求項1に記載の半導体装置。
- 前記第1下層配線を前記最下層配線に電気的に接続する複数の第3ビアをさらに備え、
前記複数の第3ビアは、前記貫通電極の直上を除く位置であって、前記最上層配線の互いに対向する端部同士を支持する位置に設けられる請求項1または2に記載の半導体装置。 - 前記半導体層の上に絶縁膜をさらに備え、
前記最下層配線は、前記絶縁膜の上に設けられる請求項1乃至請求項3のいずれか1項に記載の半導体装置。 - 前記半導体層内に配置される素子分離層を備え、前記絶縁膜は前記素子分離層の上に設けられる請求項4に記載の半導体装置。
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