JP6749408B2 - プローブカード用基板、プローブカード、および検査装置 - Google Patents
プローブカード用基板、プローブカード、および検査装置 Download PDFInfo
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- JP6749408B2 JP6749408B2 JP2018547834A JP2018547834A JP6749408B2 JP 6749408 B2 JP6749408 B2 JP 6749408B2 JP 2018547834 A JP2018547834 A JP 2018547834A JP 2018547834 A JP2018547834 A JP 2018547834A JP 6749408 B2 JP6749408 B2 JP 6749408B2
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- silicon nitride
- metal silicide
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Description
メリライトを粒界相内に含んでいると、変形しやすい金属元素の酸化物で構成される非晶質相の存在割合が粒界相内において相対的に少なくなり、高温に曝されても粒界相の変形が抑制され、プローブカード用基板1の剛性が高くなる。メリライトは、緑色系の色味を有するが、メリライトの含有量が5質量%以下であるときには、光学的な位置合わせにおいてノイズとなる反射光の発生を抑制できる。
1A 第1面
1B 第2面
2 取付孔
3 貫通孔
5 プローブ
6 支持部材
8 真空チャック
9 ステージ
12 プローブカード
Claims (10)
- 測定対象物に当接させるプローブが配置される貫通孔を複数備えるプローブカード用基板であって、
窒化珪素質セラミックスからなり、
前記測定対象物に対向する第1面と、該第1面の反対に位置する第2面とを備え、
金属珪化物の結晶相を複数含んでおり、
前記金属珪化物を構成する金属が、モリブデン、クロム、鉄、ニッケル、マンガン、バナジウム、ニオブ、タンタル、コバルトおよびタングステンから選ばれる少なくとも1種であり、
前記第1面は、粗さ曲線から求められるクルトシス(Rku)が、2以上16以下であることを特徴とするプローブカード用基板。 - 測定対象物に当接させるプローブが配置される貫通孔を複数備えるプローブカード用基板であって、
窒化珪素質セラミックスからなり、
前記測定対象物に対向する第1面と、該第1面の反対に位置する第2面とを備え、
金属珪化物の結晶相を複数含んでおり、
前記金属珪化物を構成する金属が、モリブデン、クロム、鉄、ニッケル、マンガン、バナジウム、ニオブ、タンタル、コバルトおよびタングステンから選ばれる少なくとも1種であり、
前記第1面は、粗さ曲線から求められるスキューネス(Rsk)が、−0.9以上0.8以下であることを特徴とするプローブカード用基板。 - 測定対象物に当接させるプローブが配置される貫通孔を複数備えるプローブカード用基板であって、
窒化珪素質セラミックスからなり、
前記測定対象物に対向する第1面と、該第1面の反対に位置する第2面とを備え、
金属珪化物の結晶相を複数含んでおり、
前記金属珪化物を構成する金属が、モリブデン、クロム、鉄、ニッケル、マンガン、バナジウム、ニオブ、タンタル、コバルトおよびタングステンから選ばれる少なくとも1種であり、
前記第1面は、粗さ曲線における25%の負荷長さ率と75%の負荷長さ率との間の切断レベル差(Rδc)が0.4μm以上0.8μm以下であることを特徴とするプローブカード用基板。 - 前記第1面に、前記金属珪化物を構成する金属のみの粒状体が露出していない請求項1〜3のいずれかに記載のプローブカード用基板。
- 前記第1面に、含有量が5質量%以下のメリライトを含む請求項1〜4のいずれかに記載のプローブカード用基板。
- 前記第1面に、最大長が94μm以下である空孔を備える請求項1〜5のいずれかに記載のプローブカード用基板。
- 前記窒化珪素質セラミックスが、セラミックスを構成する全成分100質量%のうち、少なくとも50質量%以上の窒化珪素を含有する請求項1〜6のいずれかに記載のプローブカード用基板。
- 前記金属珪化物の結晶相が、前記第1面の表面に露出している請求項1〜7のいずれかに記載のプローブカード用基板。
- 請求項1〜8のいずれかに記載のプローブカード用基板と、前記貫通孔に位置するプローブとを備えることを特徴とするプローブカード。
- 請求項9に記載のプローブカードを備える検査装置。
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JP2016212582 | 2016-10-31 | ||
PCT/JP2017/039183 WO2018079788A1 (ja) | 2016-10-31 | 2017-10-30 | プローブカード用基板、プローブカード、および検査装置 |
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JP (1) | JP6749408B2 (ja) |
KR (1) | KR102176900B1 (ja) |
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