JP6463227B2 - 基板搬送方法 - Google Patents
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- JP6463227B2 JP6463227B2 JP2015136210A JP2015136210A JP6463227B2 JP 6463227 B2 JP6463227 B2 JP 6463227B2 JP 2015136210 A JP2015136210 A JP 2015136210A JP 2015136210 A JP2015136210 A JP 2015136210A JP 6463227 B2 JP6463227 B2 JP 6463227B2
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- 239000000758 substrate Substances 0.000 title claims description 153
- 238000012546 transfer Methods 0.000 title claims description 133
- 238000000034 method Methods 0.000 title claims description 62
- 238000012545 processing Methods 0.000 claims description 88
- 230000008569 process Effects 0.000 claims description 25
- 230000032683 aging Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 309
- 238000012937 correction Methods 0.000 description 50
- 238000001514 detection method Methods 0.000 description 16
- 230000005484 gravity Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010187 selection method Methods 0.000 description 2
- 241001290864 Schoenoplectus Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
X2+Y2+lX+mY+n=0 … (1)
各エッジ交差点28a,28e,28dの第1のウエハ座標系におけるそれぞれの座標を(X1,Y1),(X2,Y2),(X3,Y3)とすると、上記(1)は行列A及び行列Bを用いて下記式(2)の様に表される。
10 プラズマ処理装置
14 基板搬送室
15 基板処理室
16 搬送ロボット
17 制御部
23 センサ対
23a 右側センサ
23b 左側センサ
Claims (4)
- 円板状の基板を搬送手段によって基板処理室へ搬送する基板搬送方法であって、
前記基板を搬送する際の前記基板の位置の基準となる基準基板位置を予め取得する工程と、
前記基板処理室へ搬送される前記基板の位置である搬送時基板位置を取得する工程と、 前記基準基板位置に対する前記搬送時基板位置の位置ずれを算出する工程と、
前記算出された位置ずれを解消するように前記基板処理室までの前記基板の進路を修正する工程と、
前記修正された基板の進路に基づいて前記基板を前記基板処理室へ搬送する工程とを有し、
前記搬送時基板位置を取得する工程は、
前記基板の搬送経路において、2つの位置センサを前記基板の直径よりも小さい間隔で互いに離間し、且つ前記搬送される基板に対向するように配置する工程と、
前記基板が前記基板処理室へ搬送される間に、前記2つの位置センサが前記基板の外縁と交差する4つの交差点を取得する工程と、
前記4つの交差点のうち2つの交差点を基準交差点として選択する工程と、
前記2つの基準交差点を通過し且つ互いに直径が異なる2つの円を規定する工程と、 前記4つの交差点から前記基準交差点として選択されなかった2つの交差点のうち前記2つの円によって囲われた領域内に存在する交差点、並びに前記2つの基準交差点に基づいて前記搬送時基板位置を取得する工程とを有することを特徴とする基板搬送方法。 - 前記基板が搬送される度に、前記搬送時基板位置を取得する工程と、前記位置ずれを算出する工程と、前記基板の進路を修正する工程とを実行することを特徴とする請求項1に記載の基板搬送方法。
- 前記搬送手段の経年劣化が予測される時点において、前記搬送時基板位置を取得する工程と、前記位置ずれを算出する工程と、前記基板の進路を修正する工程とを実行することを特徴とする請求項1に記載の基板搬送方法。
- 前記位置センサを交換した時点において、前記搬送時基板位置を取得する工程と、前記位置ずれを算出する工程と、前記基板の進路を修正する工程とを実行することを特徴とする請求項1に記載の基板搬送方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015136210A JP6463227B2 (ja) | 2015-07-07 | 2015-07-07 | 基板搬送方法 |
CN201610465321.8A CN106340479B (zh) | 2015-07-07 | 2016-06-23 | 基板输送方法和基板处理装置 |
KR1020160083583A KR102588989B1 (ko) | 2015-07-07 | 2016-07-01 | 기판 반송 방법, 프로그램 및 기판 처리 장치 |
TW105120869A TWI707425B (zh) | 2015-07-07 | 2016-07-01 | 基板運送方法、程式及基板處理裝置 |
US15/202,658 US9805960B2 (en) | 2015-07-07 | 2016-07-06 | Substrate conveyance method |
KR1020230132488A KR20230145291A (ko) | 2015-07-07 | 2023-10-05 | 기판 반송 방법, 프로그램 및 기판 처리 장치 |
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JP2015136210A JP6463227B2 (ja) | 2015-07-07 | 2015-07-07 | 基板搬送方法 |
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JP2018247208A Division JP6640321B2 (ja) | 2018-12-28 | 2018-12-28 | 基板搬送方法及び基板処理装置 |
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JP2017022166A JP2017022166A (ja) | 2017-01-26 |
JP2017022166A5 JP2017022166A5 (ja) | 2018-04-19 |
JP6463227B2 true JP6463227B2 (ja) | 2019-01-30 |
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US (1) | US9805960B2 (ja) |
JP (1) | JP6463227B2 (ja) |
KR (2) | KR102588989B1 (ja) |
CN (1) | CN106340479B (ja) |
TW (1) | TWI707425B (ja) |
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JP6463227B2 (ja) * | 2015-07-07 | 2019-01-30 | 東京エレクトロン株式会社 | 基板搬送方法 |
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CN103367194B (zh) * | 2012-03-26 | 2016-08-24 | 上海华虹宏力半导体制造有限公司 | 一种用于晶圆传送位置校正的装置及方法 |
SG2014012942A (en) * | 2012-06-12 | 2014-08-28 | Erich Thallner | Device and method for aligning substrates |
WO2014069291A1 (ja) * | 2012-10-29 | 2014-05-08 | ローツェ株式会社 | 半導体基板の位置検出装置及び位置検出方法 |
JP6063716B2 (ja) | 2012-11-14 | 2017-01-18 | 東京エレクトロン株式会社 | 基板処理装置及び基板搬送方法 |
JP6029250B2 (ja) * | 2013-03-28 | 2016-11-24 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及びプログラム |
JP6463227B2 (ja) * | 2015-07-07 | 2019-01-30 | 東京エレクトロン株式会社 | 基板搬送方法 |
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