JP6394904B2 - ヘッドの製造方法 - Google Patents
ヘッドの製造方法 Download PDFInfo
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- JP6394904B2 JP6394904B2 JP2015047694A JP2015047694A JP6394904B2 JP 6394904 B2 JP6394904 B2 JP 6394904B2 JP 2015047694 A JP2015047694 A JP 2015047694A JP 2015047694 A JP2015047694 A JP 2015047694A JP 6394904 B2 JP6394904 B2 JP 6394904B2
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Classifications
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Description
かかる態様では、第1接続配線及び第2接続配線が駆動回路基板を貫通するように延設するので、第1の方向及び第2の方向で小型化することができる。また、2列のピエゾ素子列の間に共通電極を設けるので、共通電極に接続される第2バンプも一列とすることができる。結局、第1バンプ及び第2バンプと合わせて合計3本のバンプですむので、駆動回路基板の第2の方向における幅を小型化することができる。このように、駆動回路基板を小型化し、すなわち、ヘッドの小型化が可能となるので、ノズル開口の高密度にも対応することができ、高密度にインクを吐出することができるヘッドを製造することができる。
また、本実施形態では、予め第1バンプ及び第2バンプ並びに第1接続配線及び第2接続配線が形成された駆動回路基板を流路形成基板に接合するだけで、第1接続配線及び第2接続配線と、個別配線及び共通配線との電気的接合を行うことができる。これにより、流路形成基板と駆動回路基板とを接合した後、ピエゾ素子から引き出されたリード電極等に、成膜及びリソグラフィー法によって配線を駆動回路に接続する場合に比べて製造工程を簡略化することができる。
本発明を実施形態に基づいて詳細に説明する。本実施形態では、ヘッドの一例として、インクジェット式記録ヘッドについて説明する。
実施形態のヘッド1は、液体噴射装置の一例であるインクジェット式記録装置に搭載される。図17は、そのインクジェット式記録装置の一例を示す概略図である。
〈他の実施形態〉
以上、本発明の一実施形態について説明したが、本発明の基本的な構成は上述したものに限定されるものではない。
Claims (5)
- 液体を噴射するノズル開口に連通する圧力発生室に圧力変化を生じさせるピエゾ素子が第1の方向に並設されたピエゾ素子列を第1の方向とは交差する第2の方向に2列有するアクチュエーター基板と、
前記アクチュエーター基板に対向する第1主面とは反対側の第2主面に前記ピエゾ素子を駆動する駆動回路が設けられた駆動回路基板と、
前記アクチュエーター基板又は前記駆動回路基板の何れか一方に設けられた第1バンプ及び第2バンプとを備えるヘッドの製造方法であって、
前記アクチュエーター基板に、前記圧力発生室に対応して独立して設けられる個別電極と、前記ピエゾ素子列に共通する共通電極と、前記共通電極及び前記個別電極間に設けられた圧電体層とを有する前記ピエゾ素子を形成し、
前記アクチュエーター基板又は前記駆動回路基板の何れか一方に、前記第1バンプを第2の方向において前記ピエゾ素子列の外側に形成し、
前記駆動回路基板に、前記第1主面と前記第2主面とを連通し、前記個別電極ごとに複数の第1貫通孔を形成し、前記第1主面と前記第2主面とを連通して前記共通電極に対応して少なくとも一つの第2貫通孔を形成し、
前記第1貫通孔内及び前記第2貫通孔内に、前記駆動回路に接続した第1接続配線及び第2接続配線を形成し、
前記アクチュエーター基板と前記駆動回路基板との間に、少なくとも、前記第2の方向において前記第1バンプの両側に接着層を設け、
前記個別電極と前記第1接続配線とが前記第1バンプにより、前記共通電極と前記第2接続配線とが前記第2バンプにより電気的に接続されるように、前記アクチュエーター基板と前記駆動回路基板とを接着層で接着する
ことを特徴とするヘッドの製造方法。 - 請求項1に記載するヘッドの製造方法において、
前記アクチュエーター基板又は前記駆動回路基板の何れか一方に、前記第2バンプを前記ピエゾ素子列の間に形成する
ことを特徴とするヘッドの製造方法。 - 請求項1又は請求項2に記載するヘッドの製造方法において、
前記接着層を、前記第2の方向において前記第2バンプの両側に設ける
ことを特徴とするヘッドの製造方法。 - 請求項1〜請求項3の何れか一項に記載するヘッドの製造方法において、
前記駆動回路基板の前記アクチュエーター基板側の面に、前記ピエゾ素子列に対向して凹状の収容部を第2の方向に延設し、
前記収容部内に配線を形成する
ことを特徴とするヘッドの製造方法。 - 請求項1〜請求項4の何れか一項に記載するヘッドの製造方法において、
前記第2バンプを、第1の方向に延設し、
前記第2貫通孔を、第1の方向において前記第2バンプの両端よりも外側に少なくとも2つ形成する
ことを特徴とするヘッドの製造方法。
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JPH07169661A (ja) | 1993-12-16 | 1995-07-04 | Matsushita Electric Ind Co Ltd | 電子音響集積回路 |
JP3613302B2 (ja) | 1995-07-26 | 2005-01-26 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
JP2003341060A (ja) * | 1995-07-26 | 2003-12-03 | Seiko Epson Corp | インクジェット式記録ヘッド |
JP3714073B2 (ja) * | 1999-12-15 | 2005-11-09 | セイコーエプソン株式会社 | インクジェットヘッド |
WO2001075985A1 (fr) * | 2000-03-30 | 2001-10-11 | Fujitsu Limited | Actionneur piezoelectrique, son procede de fabrication et tete a jet d'encre dotee de cet actionneur |
JP2002292871A (ja) | 2001-04-02 | 2002-10-09 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
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