JP6307436B2 - レーザチャンバ及び放電励起式ガスレーザ装置 - Google Patents
レーザチャンバ及び放電励起式ガスレーザ装置 Download PDFInfo
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- JP6307436B2 JP6307436B2 JP2014544610A JP2014544610A JP6307436B2 JP 6307436 B2 JP6307436 B2 JP 6307436B2 JP 2014544610 A JP2014544610 A JP 2014544610A JP 2014544610 A JP2014544610 A JP 2014544610A JP 6307436 B2 JP6307436 B2 JP 6307436B2
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- Engineering & Computer Science (AREA)
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- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Lasers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
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Description
また、本開示の一実施形態として、一対の放電電極及びガス循環用のファンを収容したレーザチャンバであって、ファンの軸を非接触で支持可能な磁気軸受けと、内輪及び外輪を含み、磁気軸受けの制御不能時に軸受けとして機能とするタッチダウンベアリングとを備え、内輪及び外輪の少なくとも一部の表面に、固体潤滑材として、Cuめっき層が形成されたレーザチャンバが提供されてもよい。
1.概要
2.用語の説明
3.エキシマレーザ装置
3.1 構成
3.2 動作
4.エキシマレーザ装置のレーザチャンバに備えられたタッチダウンベアリング
4.1 実施形態1
4.2 実施形態2
5.エキシマレーザ装置のレーザチャンバ
5.1 実施形態3
5.2 実施形態4
エキシマレーザ装置のレーザチャンバに収容されているクロスフローファンの軸受けには、磁気軸受けが使用されている。磁気軸受けは、磁気ベアリングの電源が切れた時やエラーが出た時に、ロータとステータの接触による破損を防ぐため、タッチダウンベアリングとともに設置してもよい。
本開示において使用される用語は、以下のように定義される。
3.1 構成
図1は、本実施形態に係るエキシマレーザ装置の一例を示した図である。なお、エキシマレーザ装置も、放電励起式ガスレーザ装置の一種である。エキシマレーザ装置は、露光装置300の光源として用いられてよく、発生したレーザ光を露光装置300に出力してよい。なお、露光装置300には、露光装置コントローラ301が備えられ、エキシマレーザ装置のレーザコントローラ240と相互に通信を行い、エキシマレーザ装置からのレーザ光の出力命令を行うように構成されてよい。
次に、図1及び図2を参照して、エキシマレーザ装置の動作について説明する。
4.1 実施形態1
図3は、本開示の実施形態1に係るレーザチャンバの一例を示した図である。実施形態1に係るレーザチャンバ10は、クロスフローファン80と、軸90、91と、ラビリンス構造95と、磁気軸受け100、101と、ギャップセンサ105、106と、タッチダウンベアリング110、112とを備えてよい。なお、磁気軸受け100、101は、それぞれ内輪磁性体100a、101aと、外輪電磁コイル100b、101bと、ギャップ100c、101cとを有してよい。また、モータ140は、ステータ141と、ロータ142とを備えてよい。更に、レーザチャンバ10の外部には、磁気軸受けコントローラ150と、モータコントローラ160と、レーザコントローラ240が備えられてよい。
図5は、本開示の実施形態2に係るレーザチャンバに備えられたクロスフローファン80及びその駆動機構の一例を示した図である。実施形態2におけるクロスフローファン80及びその駆動機構においては、クロスフローファン80にモータ140が同軸で接続されているとともに、モータ140の外側に第1のタッチダウンベアリング110、モータ140とクロスフローファン80との間に磁気軸受け100及び第2のタッチダウンベアリング111、クロスフローファン80の外側に磁気軸受け101及び第3のタッチダウンベアリング112が設けられている。つまり、タッチダウンベアリング110、111、112が3つ設けられている点で、タッチダウンベアリング110、112の2つしか設けられていない実施形態1と異なっている。このように、全体の外側両端にのみタッチダウンベアリング110、112を設けるのではなく、クロスフローファン80とモータ140との間にもタッチダウンベアリング111を設けるようにしてもよい。
5.1 実施形態3
図6は、本開示の実施形態3に係るエキシマレーザ装置のレーザチャンバの構成を例示する図である。図6に例示するような、エキシマレーザのレーザチャンバ10は、一対の電極20及び21、電極ホルダ30、電気絶縁部40、並びに二つのウィンドウ60及び61を含んでもよい。図6に例示するような一対の電極20及び21、電極ホルダ30、電気絶縁部40、並びに二つのウィンドウ60及び61は、図1に例示するものと同様なものであってもよい。
蓋408は、直接的に吸気口402をシールしてもよい。蓋408は、継ぎ手405を介して吸気口402をシールしてもよい。蓋409は、排気口403に接続してもよい。蓋409は、継ぎ手406に接続してもよい。蓋409は、直接的に排気口403をシールしてもよい。蓋409は、継ぎ手406を介して排気口403をシールしてもよい。
図9は、本開示の実施形態4に係るエキシマレーザ装置のレーザチャンバの構成を例示する図である。図9に例示するような、エキシマレーザのレーザチャンバ10は、一対の電極20及び21、電極ホルダ30、電気絶縁部40、並びに二つのウィンドウ60及び61を含んでもよい。図9に例示するような一対の電極20及び21、電極ホルダ30、電気絶縁部40、並びに二つのウィンドウ60及び61は、図6及び図8に例示するものと同様なものであってもよい。
20、21 電極
80 クロスフローファン
90、91 軸
100、101 磁気軸受け
110、111、112 タッチダウンベアリング
113 内輪
114 外輪
115 固体潤滑材
116 ボール
140 モータ
150 磁気軸受けコントローラ
160 モータコントローラ
240 レーザコントローラ
401、402 吸気口
403 排気口
404、405、406 継ぎ手
801、802、803 バルブ
Claims (12)
- 一対の放電電極及びガス循環用のファンを収容したレーザチャンバであって、
前記ファンの軸を非接触で支持可能な磁気軸受けと、
ステンレスで構成された内輪及び外輪を含み、前記磁気軸受けの制御不能時に軸受けとして機能とするタッチダウンベアリングと
を備え、
前記内輪及び前記外輪の少なくとも一部の表面に、固体潤滑材として、Cuめっき層が形成されている
レーザチャンバ。 - 前記固体潤滑材は、前記内輪の外周面及び前記外輪の内周面を被覆している請求項1に記載のレーザチャンバ。
- 前記固体潤滑材は、前記内輪及び前記外輪の全面を被覆している請求項1に記載のレーザチャンバ。
- 前記固体潤滑材の厚さは、2〜13μmの範囲にある請求項1ないし3のいずれか1項に記載のレーザチャンバ。
- 前記固体潤滑材の下地として、Niめっき層が形成された請求項1ないし4のいずれか1項に記載のレーザチャンバ。
- 前記タッチダウンベアリングは、前記内輪と前記外輪との間にセラミックスボールを備える請求項1ないし5のいずれか1項に記載のレーザチャンバ。
- 前記ファンと同軸で接続されたモータを有し、
前記タッチダウンベアリングは、前記ファンと前記モータとの接続箇所と、前記ファンの外側端部と、前記モータの外側端部の3箇所に設けられた請求項1ないし6のいずれか1項に記載のレーザチャンバ。 - 前記タッチダウンベアリングにパージガスを供給することが可能であるように構成された吸気口、及び、
前記パージガスを排気することが可能であるように構成された排気口
をさらに備える、請求項1ないし7のいずれか1項に記載のレーザチャンバ。 - 前記吸気口に接続された第一の継ぎ手、及び、
前記排気口に接続された第二の継ぎ手
をさらに備える、請求項8に記載のレーザチャンバ。 - 前記吸気口及び前記第一の継ぎ手の間に設けられた第一のバルブ、並びに
前記排気口及び前記第二の継ぎ手の間に設けられた第二のバルブ
をさらに備える、請求項9に記載のレーザチャンバ。 - 請求項1ないし10のいずれか1項に記載のレーザチャンバと、
該レーザチャンバのレーザの発生を制御するレーザコントローラと、を備える放電励起式ガスレーザ装置。 - 一対の放電電極及びガス循環用のファンを収容したレーザチャンバであって、
前記ファンの軸を非接触で支持可能な磁気軸受けと、
内輪及び外輪を含み、前記磁気軸受けの制御不能時に軸受けとして機能とするタッチダウンベアリングと
を備え、
前記内輪及び前記外輪の少なくとも一部の表面に、固体潤滑材として、Cuめっき層が形成されている
レーザチャンバ。
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JPH08303453A (ja) * | 1995-04-28 | 1996-11-19 | Yaskawa Electric Corp | 耐食性転がり軸受 |
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