JP6274756B2 - 脆性材料基板のローリングブレーク装置 - Google Patents

脆性材料基板のローリングブレーク装置 Download PDF

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Publication number
JP6274756B2
JP6274756B2 JP2013127088A JP2013127088A JP6274756B2 JP 6274756 B2 JP6274756 B2 JP 6274756B2 JP 2013127088 A JP2013127088 A JP 2013127088A JP 2013127088 A JP2013127088 A JP 2013127088A JP 6274756 B2 JP6274756 B2 JP 6274756B2
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JP
Japan
Prior art keywords
brittle material
material substrate
rolling
pressing
seating pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2013127088A
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English (en)
Japanese (ja)
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JP2014031002A (ja
Inventor
必鍾 金
必鍾 金
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of JP2014031002A publication Critical patent/JP2014031002A/ja
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037—Controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Dicing (AREA)
  • Footwear And Its Accessory, Manufacturing Method And Apparatuses (AREA)
JP2013127088A 2012-08-02 2013-06-18 脆性材料基板のローリングブレーク装置 Expired - Fee Related JP6274756B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120084653A KR101365049B1 (ko) 2012-08-02 2012-08-02 취성 재료 기판의 롤링 브레이크 장치
KR10-2012-0084653 2012-08-02

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017228984A Division JP6528829B2 (ja) 2012-08-02 2017-11-29 脆性材料基板のローリングブレーク装置

Publications (2)

Publication Number Publication Date
JP2014031002A JP2014031002A (ja) 2014-02-20
JP6274756B2 true JP6274756B2 (ja) 2018-02-07

Family

ID=50041268

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013127088A Expired - Fee Related JP6274756B2 (ja) 2012-08-02 2013-06-18 脆性材料基板のローリングブレーク装置
JP2017228984A Expired - Fee Related JP6528829B2 (ja) 2012-08-02 2017-11-29 脆性材料基板のローリングブレーク装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2017228984A Expired - Fee Related JP6528829B2 (ja) 2012-08-02 2017-11-29 脆性材料基板のローリングブレーク装置

Country Status (4)

Country Link
JP (2) JP6274756B2 (ko)
KR (1) KR101365049B1 (ko)
CN (1) CN103568138B (ko)
TW (1) TWI591031B (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6387679B2 (ja) * 2014-05-22 2018-09-12 三星ダイヤモンド工業株式会社 ブレイク方法
CN105565254B (zh) * 2014-10-17 2017-11-14 中芯国际集成电路制造(上海)有限公司 一种mems器件及其制备方法、电子装置
JP2016104683A (ja) 2014-11-19 2016-06-09 坂東機工株式会社 ガラス板の折割方法及びその折割装置
EP3222593B1 (en) * 2014-11-19 2022-06-29 Bando Kiko Co., Ltd Method for splitting glass plate
CN104843488B (zh) * 2015-04-10 2017-12-29 京东方科技集团股份有限公司 一种输出装置和切割裂片***
JP6547556B2 (ja) * 2015-09-29 2019-07-24 三星ダイヤモンド工業株式会社 脆性基板の分断方法
JP6149960B2 (ja) * 2016-02-17 2017-06-21 坂東機工株式会社 ガラス板の折割方法
JP6477946B2 (ja) * 2018-03-02 2019-03-06 三星ダイヤモンド工業株式会社 ブレイク装置
TWI664134B (zh) * 2018-08-07 2019-07-01 住華科技股份有限公司 輸送設備及使用其之輸送方式

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989475A (ko) * 1972-12-27 1974-08-27
JPS59120452A (ja) * 1982-12-28 1984-07-12 昭和電工株式会社 タ−ポリン
JPS63172612U (ko) * 1987-04-28 1988-11-09
JPS6457015U (ko) * 1987-10-07 1989-04-10
AT399865B (de) 1990-05-15 1995-08-25 Lisec Peter Verfahren und vorrichtung zum brechen von glasscheiben
JP2002050589A (ja) * 2000-08-03 2002-02-15 Sony Corp 半導体ウェーハの延伸分離方法及び装置
JP2002184723A (ja) * 2000-12-13 2002-06-28 Sony Corp 半導体製造方法および半導体製造装置
JP4647830B2 (ja) * 2001-05-10 2011-03-09 株式会社ディスコ 被加工物の分割処理方法および分割処理方法に用いるチップ間隔拡張装置
JP2003127096A (ja) 2001-10-24 2003-05-08 Matsushita Electric Ind Co Ltd 基板分割装置および基板分割方法
JP4256214B2 (ja) * 2003-06-27 2009-04-22 株式会社ディスコ 板状物の分割装置
CN100428418C (zh) * 2004-02-09 2008-10-22 株式会社迪斯科 晶片的分割方法
JP4584607B2 (ja) * 2004-03-16 2010-11-24 浜松ホトニクス株式会社 加工対象物切断方法
JP4514490B2 (ja) * 2004-03-29 2010-07-28 日東電工株式会社 半導体ウエハの小片化方法
KR101170587B1 (ko) * 2005-01-05 2012-08-01 티에이치케이 인텍스 가부시키가이샤 워크의 브레이크 방법 및 장치, 스크라이브 및 브레이크방법, 및 브레이크 기능을 갖는 스크라이브 장치
JP2006202933A (ja) * 2005-01-20 2006-08-03 Disco Abrasive Syst Ltd ウエーハの分割方法
CN1994713B (zh) * 2006-01-06 2010-05-12 日月光半导体制造股份有限公司 晶粒分离装置及其分离晶粒的方法
JP5216522B2 (ja) 2008-10-07 2013-06-19 三星ダイヤモンド工業株式会社 脆性材料プライヤ
JP5546873B2 (ja) * 2010-01-12 2014-07-09 キヤノンマシナリー株式会社 半導体ウェハの分割方法及び装置
TWI462215B (zh) * 2010-03-29 2014-11-21 Dainippon Screen Mfg 基板處理裝置、轉換方法、及轉移方法

Also Published As

Publication number Publication date
JP2014031002A (ja) 2014-02-20
KR101365049B1 (ko) 2014-02-20
TWI591031B (zh) 2017-07-11
JP2018030376A (ja) 2018-03-01
CN103568138B (zh) 2016-11-02
TW201406683A (zh) 2014-02-16
CN103568138A (zh) 2014-02-12
KR20140018504A (ko) 2014-02-13
JP6528829B2 (ja) 2019-06-12

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