JP6203212B2 - セラミック材料の製造における、BaAl2O4および/またはBaAl12O19の使用 - Google Patents
セラミック材料の製造における、BaAl2O4および/またはBaAl12O19の使用 Download PDFInfo
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- JP6203212B2 JP6203212B2 JP2015084490A JP2015084490A JP6203212B2 JP 6203212 B2 JP6203212 B2 JP 6203212B2 JP 2015084490 A JP2015084490 A JP 2015084490A JP 2015084490 A JP2015084490 A JP 2015084490A JP 6203212 B2 JP6203212 B2 JP 6203212B2
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- 229910010293 ceramic material Inorganic materials 0.000 title claims description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000002223 garnet Substances 0.000 claims description 81
- 229910052788 barium Inorganic materials 0.000 claims description 49
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 48
- 238000005245 sintering Methods 0.000 claims description 42
- 239000002002 slurry Substances 0.000 claims description 33
- 239000011230 binding agent Substances 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 14
- 229910052684 Cerium Inorganic materials 0.000 claims description 13
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 229910015999 BaAl Inorganic materials 0.000 claims description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims description 12
- 150000004706 metal oxides Chemical class 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 12
- 239000002019 doping agent Substances 0.000 claims description 11
- 229910052765 Lutetium Inorganic materials 0.000 claims description 10
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052706 scandium Inorganic materials 0.000 claims description 9
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 9
- 239000007858 starting material Substances 0.000 claims description 8
- 229910052727 yttrium Inorganic materials 0.000 claims description 8
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 8
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 7
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 7
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 7
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- 229910052771 Terbium Inorganic materials 0.000 claims description 5
- WIHPHLVFNOYYAP-UHFFFAOYSA-N aluminum barium(2+) oxygen(2-) Chemical compound [O-2].[Al+3].[Ba+2] WIHPHLVFNOYYAP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 5
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical group [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical group [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 2
- 239000000463 material Substances 0.000 description 101
- 230000005693 optoelectronics Effects 0.000 description 20
- 239000002245 particle Substances 0.000 description 19
- 238000002834 transmittance Methods 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 239000002243 precursor Substances 0.000 description 13
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 12
- QKYBEKAEVQPNIN-UHFFFAOYSA-N barium(2+);oxido(oxo)alumane Chemical compound [Ba+2].[O-][Al]=O.[O-][Al]=O QKYBEKAEVQPNIN-UHFFFAOYSA-N 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 229920005822 acrylic binder Polymers 0.000 description 9
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 9
- 238000005266 casting Methods 0.000 description 9
- 239000011148 porous material Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 238000004453 electron probe microanalysis Methods 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 5
- 229910052761 rare earth metal Inorganic materials 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 150000002910 rare earth metals Chemical class 0.000 description 4
- 229910052712 strontium Inorganic materials 0.000 description 4
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000012702 metal oxide precursor Substances 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 3
- 239000003039 volatile agent Substances 0.000 description 3
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 229910052795 boron group element Inorganic materials 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910004283 SiO 4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229940118888 barium cation Drugs 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 159000000009 barium salts Chemical class 0.000 description 1
- XDFCIPNJCBUZJN-UHFFFAOYSA-N barium(2+) Chemical compound [Ba+2] XDFCIPNJCBUZJN-UHFFFAOYSA-N 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 150000001638 boron Chemical class 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- -1 lutetium aluminum Chemical compound 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Description
スラリーを調製する前に、2.985モルのLu2O3と、5モルのAl2O3と、0.03モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)0.56重量%のBaAl2O4とを、ボールミルの中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形した後、薄片を形成した。薄片を空気中で1150℃において予備焼結し、次いで、1750℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
スラリーを調製する前に、2.985モルのLu2O3と、5モルのAl2O3と、0.03モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)0.09重量%のBaAl2O4とを、ボールミルの中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形した後、薄片を形成した。薄片を空気中で1150℃において予備焼結し、次いで、1750℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
スラリーを調製する前に、2.955モルのLu2O3と、5モルのAl2O3と、0.09モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)0.09重量%のBaAl2O4とを、ボールミルの中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形した後、薄片を形成した。薄片を空気中で1150℃において予備焼結し、次いで、1750℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
スラリーを調製する前に、2.985モルのLu2O3と、5モルのAl2O3と、0.03モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)2.0重量%のBaAl2O4とを、ボールミルの中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーからテープを成形した後、テープから薄片を形成した。薄片を空気中で1150℃において予備焼結し、次いで、1750℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
実施例4の手順に従って試料を作製した。
スラリーを調製する前に、2.985モルのLu2O3と、5モルのAl2O3と、0.03モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)0.15重量%のBaAl2O4と、(1モルの(Lu,Ce)3Al5O12を基準として)0.75重量%のAl2O3とを、ボールミル中で完全に混合した。この実施例では、アルミン酸バリウムと過剰なアルミニウム酸化物の組合せを焼結助剤として使用する。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形した後、薄片を形成した。薄片を空気中で1150℃において予備焼結し、次いで、1750℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
スラリーを調製する前に、2.955モルのLu2O3と、5モルのAl2O3と、0.09モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)0.15重量%のBaAl2O4と、(1モルの(Lu,Ce)3Al5O12を基準として)0.75重量%のAl2O3とを、ボールミル中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形した後、薄片を形成した。薄片を空気中で1150℃において予備焼結し、次いで、1750℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
スラリーを調製する前に、あらかじめ作製されたLuAG:Ce粉末として、平均粒径が3μmであり、ルテチウムの1mol%がドーパントとしてのセリウムによって置換されており、さらに、750ppmのバリウム、5000ppmのイットリウム、110ppmのケイ素、58ppmのカルシウム、53ppmのガドリニウム、35ppmのホウ素、22ppmのジルコニウム、および17ppmのマグネシウムを含むLuAG:Ce粉末を、ボールミル中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形した後、薄片を形成した。薄片を1150℃において予備焼結し、次いで、1800℃において圧力をかけずに湿水素雰囲気中で焼結して、透明度の高いLuAG:Ceセラミック材料を得た。
スラリーを形成する前に、2.985モルのLu2O3と、5モルのAl2O3と、0.03モルのCeO2とを、ボールミル中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形し、空気中で1150℃において予備焼結し、次いで、1800℃において圧力をかけずに湿水素雰囲気中で焼結して、LuAG:Ceセラミック材料を得た。
比較実施例1の手順に従って試料を作製した。
スラリーを調製する前に、2.985モルのLu2O3と、5モルのAl2O3と、0.03モルのCeO2と、(1モルの(Lu,Ce)3Al5O12を基準として)2.0重量%のAl2O3とを、ボールミル中で完全に混合した。次いで、有機結合剤(例:水性のアクリル系結合剤)と水とを加えて、スラリーを調製した。このスラリーをテープに成形し、空気中で1150℃において予備焼結し、次いで、1800℃において圧力をかけずに湿水素雰囲気中で焼結して、LuAG:Ceセラミック材料を得た。
比較実施例7の手順に従って試料を作製した。
Claims (4)
- セラミック材料の製造における、焼結工程での焼結助剤としてのBaAl 2 O 4 および/またはBaAl 12 O 19 の使用であって、
前記セラミック材料は、化学式A3−xB5O12:Dxによって表される組成を有するガーネットと、式Bax’Al2y’Ox’+3y’(x’およびy’は0より大きい整数である)のバリウム・アルミニウム酸化物とを含み、
前記ガーネットA3−xB5O12:Dxにおいて、
Aが、ルテチウム、イットリウム、ガドリニウム、テルビウム、スカンジウム、またはこれらの組み合わせから選択され、
Bが、アルミニウム、スカンジウム、ガリウム、インジウム、ホウ素、またはこれらの組み合わせから選択され、
Dが、クロム、マンガン、セリウム、プラセオジム、またはセリウムとプラセオジムの組み合わせから選択される、少なくとも1種類のドーパントであり、
0<x≦0.2であり、
前記セラミック材料のバリウムの含有量は0.01〜2.5重量%であり、
前記セラミック材料の空隙率は、前記セラミック材料の全体積の0.001〜2体積%であり、
前記セラミック材料はフッ化物の不純物を含まないものである、使用。 - 前記ガーネットの出発原料が、二元金属酸化物の粉末、または、二元金属酸化物の粉末とガーネットの粉末との混合物である、請求項1に記載の使用。
- セラミック材料を製造する方法であって、
前記セラミック材料は、化学式A3−xB5O12:Dxによって表される組成を有するガーネットと、式Bax’Al2y’Ox’+3y’(x’およびy’は0より大きい整数である)のバリウム・アルミニウム酸化物とを含み、
前記ガーネットA3−xB5O12:Dxにおいて、
Aが、ルテチウム、イットリウム、ガドリニウム、テルビウム、スカンジウム、またはこれらの組み合わせから選択され、
Bが、アルミニウム、スカンジウム、ガリウム、インジウム、ホウ素、またはこれらの組み合わせから選択され、
Dが、クロム、マンガン、セリウム、プラセオジム、またはセリウムとプラセオジムの組み合わせから選択される、少なくとも1種類のドーパントであり、
0<x≦0.2であり、
前記セラミック材料のバリウムの含有量は0.01〜2.5重量%であり、
前記セラミック材料の空隙率は、前記セラミック材料の全体積の0.001〜2体積%であり、
前記セラミック材料はフッ化物の不純物を含まないものであり、
焼結助剤と、有機結合剤と、前記ガーネットの出発原料とを含む出発原料から、スラリーを形成するステップであって、前記焼結助剤がBaAl2O4および/またはBaAl12O19を含むステップと、
前記スラリーから未焼結体を成形するステップと、
前記未焼結体を予備焼結するステップと、
前記予備焼結された未焼結体を焼結するステップと、を含む方法。 - 前記予備焼結が、800℃〜1400℃において行われ、かつ前記焼結が、1650℃〜1900℃において行われる、請求項3に記載の方法。
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