JP6195709B2 - プローブカード、検査装置、及び検査方法 - Google Patents
プローブカード、検査装置、及び検査方法 Download PDFInfo
- Publication number
- JP6195709B2 JP6195709B2 JP2012274412A JP2012274412A JP6195709B2 JP 6195709 B2 JP6195709 B2 JP 6195709B2 JP 2012274412 A JP2012274412 A JP 2012274412A JP 2012274412 A JP2012274412 A JP 2012274412A JP 6195709 B2 JP6195709 B2 JP 6195709B2
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- JP
- Japan
- Prior art keywords
- probe
- wafer
- contact
- group
- probe group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012274412A JP6195709B2 (ja) | 2012-12-17 | 2012-12-17 | プローブカード、検査装置、及び検査方法 |
KR1020130153967A KR101559984B1 (ko) | 2012-12-17 | 2013-12-11 | 프로브 카드, 검사 장치 및 검사 방법 |
TW102146186A TWI484192B (zh) | 2012-12-17 | 2013-12-13 | Probe card, inspection device and inspection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012274412A JP6195709B2 (ja) | 2012-12-17 | 2012-12-17 | プローブカード、検査装置、及び検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014119340A JP2014119340A (ja) | 2014-06-30 |
JP6195709B2 true JP6195709B2 (ja) | 2017-09-13 |
Family
ID=51130130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012274412A Active JP6195709B2 (ja) | 2012-12-17 | 2012-12-17 | プローブカード、検査装置、及び検査方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6195709B2 (ko) |
KR (1) | KR101559984B1 (ko) |
TW (1) | TWI484192B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI626446B (zh) * | 2017-01-13 | 2018-06-11 | 崇碁科技股份有限公司 | 晶片燒錄測試設備及方法 |
KR102375702B1 (ko) * | 2018-01-29 | 2022-03-18 | 에스케이하이닉스 주식회사 | 테스트 장치 및 이를 이용한 웨이퍼 테스트 방법 |
TWI679433B (zh) * | 2018-07-20 | 2019-12-11 | 均豪精密工業股份有限公司 | 檢測系統、探針裝置及面板檢測方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH067067U (ja) * | 1992-07-03 | 1994-01-28 | 株式会社東芝 | プローブカード |
AU2003284411A1 (en) * | 2002-11-19 | 2004-06-15 | Nhk Spring Co., Ltd. | Electric probe system |
US7285968B2 (en) * | 2005-04-19 | 2007-10-23 | Formfactor, Inc. | Apparatus and method for managing thermally induced motion of a probe card assembly |
JP4695447B2 (ja) | 2005-06-23 | 2011-06-08 | 株式会社日本マイクロニクス | プローブ組立体およびこれを用いた電気的接続装置 |
US7843202B2 (en) * | 2005-12-21 | 2010-11-30 | Formfactor, Inc. | Apparatus for testing devices |
TWI317813B (en) * | 2007-01-09 | 2009-12-01 | King Yuan Electronics Co Ltd | Probe card assembly with zif connectors, method of assembling, wafer testing system and wafer testing method introduced by the same |
KR100897982B1 (ko) | 2007-09-27 | 2009-05-18 | 주식회사 동부하이텍 | 프로브카드 니들과 패드간의 미스 얼라인 방지 패턴 및 그방법 |
TW200938848A (en) * | 2008-03-03 | 2009-09-16 | Mjc Probe Inc | Probe card |
WO2009131100A1 (ja) * | 2008-04-21 | 2009-10-29 | 日本発條株式会社 | プローブカード |
JP2010175507A (ja) * | 2009-02-02 | 2010-08-12 | Micronics Japan Co Ltd | 電気的接続装置 |
-
2012
- 2012-12-17 JP JP2012274412A patent/JP6195709B2/ja active Active
-
2013
- 2013-12-11 KR KR1020130153967A patent/KR101559984B1/ko active IP Right Grant
- 2013-12-13 TW TW102146186A patent/TWI484192B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI484192B (zh) | 2015-05-11 |
KR101559984B1 (ko) | 2015-10-13 |
KR20140078549A (ko) | 2014-06-25 |
TW201432269A (zh) | 2014-08-16 |
JP2014119340A (ja) | 2014-06-30 |
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