JP6091867B2 - Transport mechanism - Google Patents

Transport mechanism Download PDF

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JP6091867B2
JP6091867B2 JP2012264917A JP2012264917A JP6091867B2 JP 6091867 B2 JP6091867 B2 JP 6091867B2 JP 2012264917 A JP2012264917 A JP 2012264917A JP 2012264917 A JP2012264917 A JP 2012264917A JP 6091867 B2 JP6091867 B2 JP 6091867B2
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plate
workpiece
holding
guide pin
moving
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JP2014110364A (en
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山田　智広
智広 山田
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Disco Corp
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Disco Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Description

本発明は、板状ワークの外周部を保持して搬送するエッジクランプ式の搬送機構に関する。   The present invention relates to an edge clamp type transport mechanism that transports while holding an outer peripheral portion of a plate-like workpiece.

従来、板状ワークを搬送する搬送機構として、板状ワークの表面を搬送パッドで保持して搬送するものが知られている。この搬送機構では、板状ワークの表面と搬送パッドとの接触によって搬送パッドの接触面が汚染する可能性があるため、洗浄機構により搬送パッドの接触面が洗浄される。しかしながら、洗浄された搬送パッドであっても、搬送パッドの接触面と板状ワークの表面との間に異物が挟まると、板状ワークが傷つけられるおそれがある。そこで、板状ワークの表面に触れることなく板状ワークを搬送できるエッジクランプ式の搬送機構が用いられる（例えば、特許文献１参照）。   2. Description of the Related Art Conventionally, as a transport mechanism for transporting a plate-shaped work, a mechanism that transports the surface of the plate-shaped work while being held by a transport pad is known. In this transport mechanism, the contact surface of the transport pad may be contaminated by the contact between the surface of the plate-like workpiece and the transport pad, so the contact surface of the transport pad is cleaned by the cleaning mechanism. However, even if the transport pad has been cleaned, the plate-shaped workpiece may be damaged if foreign matter is caught between the contact surface of the transport pad and the surface of the plate-shaped workpiece. Therefore, an edge clamp type transport mechanism that can transport the plate-shaped workpiece without touching the surface of the plate-shaped workpiece is used (for example, see Patent Document 1).

特開２００７−２５８４５０号公報JP 2007-258450 A

ところで、特許文献１に記載の搬送機構では、複数の保持爪にＶ字溝が形成されており、このＶ字溝に板状ワークの外周部が保持されている。保持テーブルへの板状ワークの搬入時には、保持テーブルの上方で複数の保持爪が板状ワークの外周部から退避することで、自由落下により板状ワークが保持テーブルの保持面に降ろされる。このため、板状ワークの搬送時に、保持テーブルの保持面に対して板状ワークが位置合わせされていても、板状ワークの落下中に保持面に対する板状ワークの位置ズレが生じるという問題があった。   By the way, in the conveyance mechanism described in Patent Document 1, V-shaped grooves are formed in the plurality of holding claws, and the outer peripheral portion of the plate-like workpiece is held in the V-shaped grooves. When the plate-like work is carried into the holding table, the plurality of holding claws are retracted from the outer periphery of the plate-like work above the holding table, so that the plate-like work is lowered onto the holding surface of the holding table by free fall. For this reason, even when the plate-shaped workpiece is positioned with respect to the holding surface of the holding table during conveyance of the plate-shaped workpiece, there is a problem in that the plate-shaped workpiece is displaced from the holding surface while the plate-shaped workpiece is dropped. there were.

本発明はかかる点に鑑みてなされたものであり、保持テーブルの保持面に対する位置合わせ状態を維持しつつ、板状ワークを保持面に降ろすことができるエッジクランプ式の搬送機構を提供することを目的とする。   The present invention has been made in view of the above points, and provides an edge clamp type transport mechanism capable of lowering a plate-like workpiece onto a holding surface while maintaining the alignment state of the holding table with respect to the holding surface. Objective.

本発明の搬送機構は、円形の板状ワークの下面を保持する保持面を有する保持テーブルに、板状ワークの外周部を保持する保持部で保持して板状ワークを搬送させる搬送機構であって、該保持部は、板状ワークの外周部における側面および下面に接触させる保持爪と、該保持爪に併設され板状ワークの側面に接触させるガイドピンと、該ガイドピンを板状ワークの径方向で中心に向かってバネ力を付与する引張りバネと、該引張りバネによって移動する該ガイドピンを方向付ける第１のスライダーと、で構成され、該保持部の移動を板状ワークの径方向に方向付ける第２のスライダーと、該保持部を径方向に移動させる移動部と、を備え、該ガイドピンは内部バネによって上下方向に伸縮代が設けられており、板状ワークを保持する時は、該移動部の作動で少なくとも３つの該保持部が板状ワークの径方向で中心に向かって移動する事によって、該ガイドピンが板状ワークの側面に接触すると共に、該保持爪が板状ワークの外周部における側面および下面に接触して板状ワークを保持して、板状ワークを開放する時は、該移動部の作動で少なくとも３つの該保持部が板状ワークの径方向で外側に向かって移動する事によって、該ガイドピンを残して該保持爪を板状ワークの外側に移動させ、板状ワークの外周部から該保持爪を離間させるが、該引張りバネのバネ力によって該ガイドピンを板状ワーク側面に接触し続け、該搬送機構が保持する板状ワークを該保持面に対して平行な方向の位置を維持して該保持テーブルに板状ワークを搬送させた後、該移動部の作動で少なくとも３つの該保持部が板状ワークの径方向で外側に向かって移動する事によって、該保持爪と一体に該ガイドピンを板状ワークの外側に移動させ、板状ワークの外周部から該ガイドピンを離間させる事を特徴とする。 The transport mechanism of the present invention is a transport mechanism that transports a plate-like workpiece by holding it on a holding table having a holding surface that holds the lower surface of a circular plate-like workpiece by a holding portion that holds the outer peripheral portion of the plate-like workpiece. The holding portion includes a holding claw that is in contact with the side surface and the lower surface of the outer peripheral portion of the plate-shaped workpiece, a guide pin that is attached to the holding claw and is in contact with the side surface of the plate-shaped workpiece, and a diameter of the plate-shaped workpiece. A tension spring that applies a spring force toward the center in the direction, and a first slider that directs the guide pin that is moved by the tension spring, the movement of the holding portion in the radial direction of the plate-like workpiece A second slider for directing, and a moving part for moving the holding part in the radial direction, and the guide pin is provided with an expansion / contraction allowance in the vertical direction by an internal spring. The When the moving part is operated, at least three of the holding parts move toward the center in the radial direction of the plate-like workpiece, so that the guide pin comes into contact with the side surface of the plate-like workpiece and the holding claw is When the plate-like workpiece is held by contacting the side surface and the lower surface of the outer peripheral portion and the plate-like workpiece is released, at least three of the holding portions are directed outward in the radial direction of the plate-like workpiece by the operation of the moving portion. The holding claw is moved to the outside of the plate-like workpiece while leaving the guide pin, and the holding claw is separated from the outer peripheral portion of the plate-like workpiece. after the continued contact with the plate-shaped workpiece side, the plate workpiece conveying mechanism holds and maintains the position of the direction parallel to the holding surface to convey the plate-like workpiece by the holding table, the mobile At least 3 in operation By moving the holding portion outward in the radial direction of the plate-like workpiece, the guide pin is moved to the outside of the plate-like workpiece integrally with the holding claw, and the guide pin is moved from the outer peripheral portion of the plate-like workpiece. It is characterized by being separated .

この構成によれば、少なくとも３つの保持爪により板状ワークが保持された状態で、引張りバネのバネ力によって板状ワークの外周部の側面にガイドピンが接触する。また、板状ワークの外周部から保持爪が離間しても、ガイドピンが板状ワークの外周部の側面に接触し続けて、保持爪から落下した板状ワークがガイドピンに沿ってガイドされる。よって、エッジクランプ式の搬送機構であっても、搬送機構に保持された板状ワークと保持テーブルの保持面との平行な方向での位置関係を維持しつつ、位置合わせされた状態で板状ワークを保持面に降ろすことができる。   According to this configuration, the guide pin comes into contact with the side surface of the outer peripheral portion of the plate-like workpiece by the spring force of the tension spring while the plate-like workpiece is held by at least three holding claws. Even if the holding claw is separated from the outer periphery of the plate-shaped workpiece, the guide pin continues to contact the side surface of the outer periphery of the plate-shaped workpiece, and the plate-shaped workpiece dropped from the holding claw is guided along the guide pin. The Therefore, even if it is an edge clamp type conveyance mechanism, it is plate-like in the aligned state while maintaining the positional relationship in the parallel direction between the plate-like workpiece held by the conveyance mechanism and the holding surface of the holding table. The workpiece can be lowered onto the holding surface.

本発明によれば、板状ワークの開放時に板状ワークから保持爪だけを離間させて板状ワークの落下をガイドピンでガイドすることで、保持テーブルの保持面に対する位置合わせ状態を維持しつつ、板状ワークを保持面に降ろすことができる。   According to the present invention, when the plate-shaped workpiece is opened, only the holding claw is separated from the plate-shaped workpiece and the fall of the plate-shaped workpiece is guided by the guide pin, thereby maintaining the alignment state with respect to the holding surface of the holding table. The plate-like workpiece can be lowered onto the holding surface.

本実施の形態に係る搬送機構の斜視図である。It is a perspective view of the conveyance mechanism which concerns on this Embodiment. 本実施の形態に係る搬送機構の保持部の分解斜視図である。It is a disassembled perspective view of the holding | maintenance part of the conveyance mechanism which concerns on this Embodiment. 本実施の形態に係る搬送機構の保持部の分解側面図である。It is a disassembled side view of the holding | maintenance part of the conveyance mechanism which concerns on this Embodiment. 本実施の形態に係る搬送機構による板状ワークの搬出動作の説明図である。It is explanatory drawing of the carrying-out operation | movement of the plate-shaped workpiece | work by the conveyance mechanism which concerns on this Embodiment. 本実施の形態に係る搬送機構による板状ワークの搬入動作の説明図である。It is explanatory drawing of the carrying-in operation | movement of the plate-shaped workpiece | work by the conveyance mechanism which concerns on this Embodiment.

以下、添付図面を参照して、本実施の形態に係る搬送機構について説明する。図１は、本実施の形態に係る搬送機構の斜視図である。なお、本実施の形態では、板状ワークの外周部を３カ所で保持するエッジクランプ式の搬送機構を例示して説明するが、この構成に限定されない。搬送機構は、板状ワークの外周部の３カ所以上を保持する構成であればよい。   Hereinafter, a transport mechanism according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a transport mechanism according to the present embodiment. In the present embodiment, an edge clamp type transport mechanism that holds the outer peripheral portion of the plate-like workpiece at three locations will be described as an example, but the present invention is not limited to this configuration. The conveyance mechanism should just be the structure hold | maintained three or more places of the outer peripheral part of a plate-shaped workpiece.

図１に示すように、搬送機構１は、各種加工装置に組み込まれたエッジクランプ式の搬送機構であり、板状ワークＷの外周部を保持して保持テーブル２に搬送するように構成されている。板状ワークＷは、略円板状に形成されており、表面が不図示の分割予定ラインによって複数の領域に区画されている。分割予定ラインで区画された各領域には、ＩＣ、ＬＳＩ等の回路が形成されている。なお、板状ワークＷとしてシリコン、ガリウム砒素等の半導体ウェーハを例に挙げて説明するが、セラミック、ガラス、サファイア（Al2O3）系の無機材料基板等でもよい。 As shown in FIG. 1, the conveyance mechanism 1 is an edge clamp type conveyance mechanism incorporated in various processing apparatuses, and is configured to hold the outer peripheral portion of the plate-like workpiece W and convey it to the holding table 2. Yes. The plate-like workpiece W is formed in a substantially disk shape, and the surface is partitioned into a plurality of regions by unillustrated division lines. A circuit such as an IC or an LSI is formed in each area partitioned by the division lines. The plate-like workpiece W will be described by taking a semiconductor wafer such as silicon or gallium arsenide as an example, but may be a ceramic, glass, sapphire (Al 2 O 3 ) -based inorganic material substrate, or the like.

保持テーブル２の上面には、ポーラスセラミック材によって板状ワークＷの下面を保持する保持面２１が形成されている。保持面２１は、保持テーブル２内の流路を通じて吸引源２５および圧縮エアの供給源２６に切換バルブ（不図示）を介して接続されている。保持テーブル２が搬送機構１から板状ワークＷを受け取ると、保持面２１の接続先が吸引源２５に切り換えられて、保持面２１に板状ワークＷが吸着される。保持テーブル２から搬送機構１に板状ワークＷを渡す際には、保持面２１の接続先が圧縮エアの供給源２６に切り換えられて、搬送機構１でエッジクランプ可能な高さに保持面２１から板状ワークＷが浮かされる。   On the upper surface of the holding table 2, a holding surface 21 that holds the lower surface of the plate-like workpiece W with a porous ceramic material is formed. The holding surface 21 is connected to a suction source 25 and a compressed air supply source 26 through a flow path in the holding table 2 via a switching valve (not shown). When the holding table 2 receives the plate-like workpiece W from the transport mechanism 1, the connection destination of the holding surface 21 is switched to the suction source 25, and the plate-like workpiece W is attracted to the holding surface 21. When the plate-like workpiece W is transferred from the holding table 2 to the conveyance mechanism 1, the connection destination of the holding surface 21 is switched to the compressed air supply source 26, and the holding surface 21 is set to a height that can be edge clamped by the conveyance mechanism 1. The plate-like workpiece W is floated from the top.

搬送機構１は、上面視略三角形状のベースプレート３上に、板状ワークＷの外周部を保持するように３つの保持部４を配置している。ベースプレート３の中央には、３つの柱部３１により連結プレート３２が支持されており、この連結プレート３２を介して不図示のアームに支持されている。各保持部４は、板状ワークＷの外周部を保持爪４６によって保持すると共に、板状ワークＷの外周部に一対のガイドピン４７を突き当て可能に構成されている。板状ワークＷは、保持爪４６に保持された状態で、保持爪４６の両側方に併設された一対のガイドピン４７にガイドされる。   In the transport mechanism 1, three holding portions 4 are arranged on a base plate 3 having a substantially triangular shape when viewed from above so as to hold the outer peripheral portion of the plate-like workpiece W. In the center of the base plate 3, a connection plate 32 is supported by three column portions 31, and is supported by an arm (not shown) via the connection plate 32. Each holding portion 4 is configured to hold the outer peripheral portion of the plate-like workpiece W by the holding claws 46 and to allow a pair of guide pins 47 to abut on the outer peripheral portion of the plate-like workpiece W. The plate-like workpiece W is guided by a pair of guide pins 47 provided on both sides of the holding claw 46 while being held by the holding claw 46.

保持爪４６は、ベースプレート３上にスライド可能に設置された保持爪ベース４１に固定されている。一対のガイドピン４７は、保持爪ベース４１上にスライド可能に設置されたピンベース４２に固定されている。また、保持爪ベース４１とピンベース４２は引張りバネ４３を介して接続されており、引張りバネ４３のバネ力によって保持爪ベース４１にピンベース４２が引き付けられている。また、保持爪ベース４１は、電動式の移動部４４に連結されており、移動部４４の駆動によって保持爪ベース４１と共にピンベース４２が板状ワークＷの径方向に進退移動される。   The holding claw 46 is fixed to a holding claw base 41 slidably installed on the base plate 3. The pair of guide pins 47 are fixed to a pin base 42 slidably installed on the holding claw base 41. The holding claw base 41 and the pin base 42 are connected via a tension spring 43, and the pin base 42 is attracted to the holding claw base 41 by the spring force of the tension spring 43. Further, the holding claw base 41 is connected to an electric moving portion 44, and the pin base 42 is moved forward and backward in the radial direction of the plate-like workpiece W together with the holding claw base 41 by driving the moving portion 44.

各保持部４および移動部４４は、下面を開放したカバー４５で覆われており、ベースプレート３から保持爪４６および一対のガイドピン４７を下方に突出させている。なお、図１では、１つの保持部４のカバー４５を取り外した状態を示している。この搬送機構１は、保持爪４６及び一対のガイドピン４７を板状ワークＷの外周部に接触させた状態で、保持爪４６だけを板状ワークＷの外周部から退避可能にしている。これにより、各保持爪４６から板状ワークＷが放された場合でも、一対のガイドピン４７にガイドさせつつ、板状ワークＷを保持テーブル２の保持面２１に向けて落下させることが可能になっている。   Each holding part 4 and the moving part 44 are covered with a cover 45 whose lower surface is opened, and a holding claw 46 and a pair of guide pins 47 are protruded downward from the base plate 3. FIG. 1 shows a state where the cover 45 of one holding unit 4 is removed. The transport mechanism 1 enables only the holding claw 46 to be retracted from the outer peripheral portion of the plate-like workpiece W in a state where the holding claw 46 and the pair of guide pins 47 are in contact with the outer peripheral portion of the plate-like workpiece W. Thereby, even when the plate-like workpiece W is released from each holding claw 46, the plate-like workpiece W can be dropped toward the holding surface 21 of the holding table 2 while being guided by the pair of guide pins 47. It has become.

図２及び図３を参照して、搬送機構の保持部の詳細構成について説明する。図２は、本実施の形態に係る搬送機構の保持部の分解斜視図である。図３は、本実施の形態に係る搬送機構の保持部の分解側面図である。   With reference to FIG.2 and FIG.3, the detailed structure of the holding | maintenance part of a conveyance mechanism is demonstrated. FIG. 2 is an exploded perspective view of the holding unit of the transport mechanism according to the present embodiment. FIG. 3 is an exploded side view of the holding unit of the transport mechanism according to the present embodiment.

図２および図３に示すように、ベースプレート３は、三角形の角部を外側に延ばして、保持部４用の設置領域３３とした上面視略三角形状に形成されている。ベースプレート３の各設置領域３３には、放射方向に延びるガイドレール５１が配置されており、ガイドレール５１上には下側スライダー５２（第２のスライダー）がスライド可能に設置されている。下側スライダー５２の上面には保持爪ベース４１が固定されている。保持爪ベース４１は、ガイドレール５１に沿って延在する上面視矩形状に形成されており、略前半部が肉厚に形成され、略後半部が薄厚に形成されている。   As shown in FIG. 2 and FIG. 3, the base plate 3 is formed in a substantially triangular shape in a top view, with the corners of the triangle extending outward to form the installation area 33 for the holding unit 4. A guide rail 51 extending in the radial direction is disposed in each installation region 33 of the base plate 3, and a lower slider 52 (second slider) is slidably installed on the guide rail 51. A holding claw base 41 is fixed to the upper surface of the lower slider 52. The holding claw base 41 is formed in a rectangular shape in a top view extending along the guide rail 51, and a substantially front half portion is formed thick and a substantially rear half portion is formed thin.

保持爪ベース４１は、薄厚の略後半部が下側スライダー５２に固定され、肉厚の略前半部がベースプレート３の設置領域３３よりも外側にはみ出している。この設置領域３３から突き出した保持爪ベース４１の前端部には、板状ワークＷの外周部を保持する保持爪４６が固定されている。保持爪４６は、保持爪ベース４１の前端部から下方に延び、下端部に内向き突出した爪先５７を有している。保持爪４６の爪先５７に板状ワークＷの外周部における側面および下面が接することで、複数の保持部４によって板状ワークＷが保持される。なお、保持爪４６は、保持爪ベース４１に別体に形成されているが、一体に形成されてもよい。   The holding claw base 41 is fixed to the lower slider 52 at a thin substantially second half part, and a substantially thick first half part protrudes outside the installation region 33 of the base plate 3. A holding claw 46 that holds the outer peripheral portion of the plate-like workpiece W is fixed to the front end portion of the holding claw base 41 protruding from the installation area 33. The holding claw 46 has a claw tip 57 that extends downward from the front end portion of the holding claw base 41 and protrudes inwardly at the lower end portion. The plate-like workpiece W is held by the plurality of holding portions 4 when the side surface and the lower surface of the outer periphery of the plate-like workpiece W are in contact with the claw tip 57 of the holding claw 46. The holding claws 46 are formed separately from the holding claw base 41, but may be integrally formed.

保持爪ベース４１の後端部には、移動部４４からの駆動力を受ける立壁部６１が設けられている。移動部４４は、電気信号を受けてロッド６６を伸縮させる電動式の直動アクチュエータであり、ベースプレート３の設置領域３３よりも内側に設置されている。移動部４４は、位置決めブロック６７により位置決めされており、ロッド６６を設置領域３３に向けて突出させている。ロッド６６の先端には保持爪ベース４１の立壁部６１が固定されており、ロッド６６の伸縮により保持爪ベース４１がガイドレール５１に沿って進退方向に移動される。   At the rear end portion of the holding claw base 41, a standing wall portion 61 that receives a driving force from the moving portion 44 is provided. The moving unit 44 is an electric linear motion actuator that receives an electric signal and expands and contracts the rod 66, and is installed inside the installation region 33 of the base plate 3. The moving part 44 is positioned by a positioning block 67 and projects the rod 66 toward the installation area 33. The standing wall 61 of the holding claw base 41 is fixed to the tip of the rod 66, and the holding claw base 41 is moved in the forward / backward direction along the guide rail 51 by the expansion / contraction of the rod 66.

保持爪ベース４１の略前半部は、ピンベース４２をスライド可能に支持する台座部６２になっている。台座部６２の上面には、放射方向に延びるガイドレール５４が配置されており、ガイドレール５４上には上側スライダー５５（第１のスライダー）がスライド可能に設置されている。上側スライダー５５の上面にはピンベース４２が固定されている。ピンベース４２は、保持爪ベース４１の台座部６２に対してスライド方向で沿う断面逆Ｕ字状の屈曲部７１と、屈曲部７１の両側方で一対のガイドピン４７を支持する一対の支持部７２とを有している。   A substantially front half portion of the holding claw base 41 is a pedestal portion 62 that supports the pin base 42 so as to be slidable. A guide rail 54 extending in the radial direction is disposed on the upper surface of the pedestal portion 62, and an upper slider 55 (first slider) is slidably installed on the guide rail 54. A pin base 42 is fixed to the upper surface of the upper slider 55. The pin base 42 includes a bent portion 71 having an inverted U-shaped cross section along the sliding direction with respect to the pedestal portion 62 of the holding claw base 41, and a pair of support portions that support the pair of guide pins 47 on both sides of the bent portion 71. 72.

各ガイドピン４７は、支持部７２から下方に延びたピン本体７５の下端部に、内部バネ７６を介してガイド部７７を伸縮可能に連結して構成されている。ガイドピン４７は保持爪４６の側方に位置付けられており、ガイドピン４７のガイド部７７は、保持爪４６の爪先５７よりも下方に突出されている（図４Ａ参照）。搬送機構１による搬送時には、保持爪４６の爪先５７が保持テーブル２に接触しないように、ガイド部７７を基準に高さ調整される。このとき、内部バネ７６によってガイドピン４７に伸縮代が設けられ、高さ方向の誤差が伸縮代に吸収されるため、搬送機構１の高さ調整を容易にしている。   Each guide pin 47 is configured such that a guide portion 77 is connected to a lower end portion of a pin main body 75 extending downward from the support portion 72 via an internal spring 76 so as to be extendable and contractible. The guide pin 47 is positioned on the side of the holding claw 46, and the guide portion 77 of the guide pin 47 protrudes below the claw tip 57 of the holding claw 46 (see FIG. 4A). During conveyance by the conveyance mechanism 1, the height is adjusted with reference to the guide portion 77 so that the toe 57 of the holding claw 46 does not contact the holding table 2. At this time, the guide pin 47 is provided with an expansion / contraction allowance by the internal spring 76, and an error in the height direction is absorbed by the extension / contraction allowance, so that the height adjustment of the transport mechanism 1 is facilitated.

また、ピンベース４２は、引張りバネ４３を介して保持爪ベース４１に連結されている。引張りバネ４３の一端部は、ピンベース４２の屈曲部７１上面に設けられた係止ピン７３に係止され、引張りバネ４３の他端部は、保持爪ベース４１の立壁部６１上面に設けられた係止ピン６３に係止されている。ピンベース４２は、引張りバネ４３のバネ力によって立壁部６１側に引き寄せられている。立壁部６１には、ピンベース４２の立壁部６１側への移動を規制する規制突起６４が設けられている。ピンベース４２は、引張りバネ４３のバネ力によって規制突起６４の先端に突き当てられることで、保持爪ベース４１と一体的に動作される。   Further, the pin base 42 is connected to the holding claw base 41 via a tension spring 43. One end of the tension spring 43 is locked to a locking pin 73 provided on the upper surface of the bent portion 71 of the pin base 42, and the other end of the tension spring 43 is provided on the upper surface of the standing wall portion 61 of the holding claw base 41. The locking pin 63 is locked. The pin base 42 is pulled toward the standing wall 61 by the spring force of the tension spring 43. The standing wall 61 is provided with a regulation protrusion 64 that regulates the movement of the pin base 42 toward the standing wall 61. The pin base 42 is operated integrally with the holding claw base 41 by being abutted against the tip of the restricting protrusion 64 by the spring force of the tension spring 43.

規制突起６４の長さは、板状ワークＷの外周部からガイドピン４７が退避するタイミングを、板状ワークＷの外周部から保持爪４６が退避するタイミングよりも遅らせるように調整されている。すなわち、移動部４４によって保持爪ベース４１が押し込まれて、板状ワークＷの外周部から保持爪４６だけが退避される（図５Ｃ参照）。さらに移動部４４によって保持爪ベース４１が押し込まれることで、規制突起６４にピンベース４２が突き当てられて板状ワークＷの外周部からガイドピン４７が退避される（図５Ｆ参照）。このようにして、搬送機構１では、ガイドピン４７を残して板状ワークＷから保持爪４６だけを退避させた状態を作り出している。   The length of the regulation protrusion 64 is adjusted so that the timing at which the guide pin 47 is retracted from the outer peripheral portion of the plate-like workpiece W is delayed from the timing at which the holding claw 46 is retracted from the outer peripheral portion of the plate-like workpiece W. That is, the holding claw base 41 is pushed in by the moving portion 44, and only the holding claw 46 is retracted from the outer peripheral portion of the plate-like workpiece W (see FIG. 5C). Further, when the holding claw base 41 is pushed in by the moving portion 44, the pin base 42 is abutted against the restricting protrusion 64, and the guide pin 47 is retracted from the outer peripheral portion of the plate-like workpiece W (see FIG. 5F). In this way, the transport mechanism 1 creates a state in which only the holding claws 46 are retracted from the plate-like workpiece W with the guide pins 47 remaining.

図４及び図５を参照して、搬送機構による板状ワークの搬出動作および搬入動作について説明する。図４は、本実施の形態に係る搬送機構による板状ワークの搬出動作の説明図である。図５は、本実施の形態に係る搬送機構による板状ワークの搬入動作の説明図である。なお、図４および図５に示す搬送機構による板状ワークの搬出動作および搬入動作は一例を示すものであり、適宜変更が可能である。   With reference to FIG.4 and FIG.5, the carrying-out operation | movement and carrying-in operation | movement of the plate-shaped workpiece | work by a conveyance mechanism are demonstrated. FIG. 4 is an explanatory diagram of a plate-like workpiece carry-out operation by the carrying mechanism according to the present embodiment. FIG. 5 is an explanatory diagram of a plate-like workpiece carry-in operation by the transport mechanism according to the present embodiment. In addition, the carrying-out operation | movement and carrying-in operation | movement of the plate-shaped workpiece | work by the conveyance mechanism shown in FIG.4 and FIG.5 show an example, and can be changed suitably.

まず、図４を参照して、搬送機構１による板状ワークＷの搬出動作について説明する。図４Ａに示すように、保持テーブル２の保持面２１に板状ワークＷが保持され、保持テーブル２の上方には搬送機構１が待機している。このとき、移動部４４によって保持爪ベース４１が奥方まで押し込まれており、各保持爪４６及び各ガイドピン４７が板状ワークＷの径方向外側に位置付けられている。ガイドピン４７は、保持爪４６の爪先５７よりも板状ワークＷ側（内側）に位置している。さらに、ガイドピン４７の下端は保持爪４６の下端よりも僅かに下方に突出している。   First, with reference to FIG. 4, the carrying-out operation | movement of the plate-shaped workpiece W by the conveyance mechanism 1 is demonstrated. As shown in FIG. 4A, the plate-like workpiece W is held on the holding surface 21 of the holding table 2, and the transport mechanism 1 is waiting above the holding table 2. At this time, the holding claw base 41 is pushed into the back by the moving portion 44, and each holding claw 46 and each guide pin 47 are positioned on the radially outer side of the plate-like workpiece W. The guide pin 47 is located on the plate-like workpiece W side (inner side) with respect to the toe 57 of the holding claw 46. Further, the lower end of the guide pin 47 protrudes slightly below the lower end of the holding claw 46.

次に図４Ｂに示すように、搬送機構１が下降してガイドピン４７の下端が保持テーブル２に接触される。上記したようにガイドピン４７は伸縮可能に構成されているため、伸縮代によって高さ方向の位置調整の誤差が吸収される。このため、本実施の形態に係る搬送機構１では、不図示のアームの上下軸により搬送機構１の高さ調整する構成と比較して高さ調整が容易になっている。また、搬送機構１の高さが調整された状態で、保持爪４６の爪先５７が保持面２１よりも僅かに高く位置付けられている。   Next, as shown in FIG. 4B, the transport mechanism 1 is lowered and the lower end of the guide pin 47 is brought into contact with the holding table 2. As described above, since the guide pin 47 is configured to be extendable / contractable, the position adjustment error in the height direction is absorbed by the expansion / contraction allowance. For this reason, in the transport mechanism 1 according to the present embodiment, the height adjustment is easier than in the configuration in which the height of the transport mechanism 1 is adjusted by the vertical axis of an arm (not shown). Further, the claw tip 57 of the holding claw 46 is positioned slightly higher than the holding surface 21 in a state where the height of the transport mechanism 1 is adjusted.

次に図４Ｃに示すように、保持面２１による板状ワークＷの吸引が停止され、保持面２１から板状ワークＷの裏面に圧縮エアが噴射される。これにより、板状ワークＷの裏面側に圧縮エア層が形成され、板状ワークＷが保持面２１から浮上される。また、保持面２１から板状ワークＷが吹き上げられると同時に、移動部４４によって保持爪ベース４１が引き寄せられる。そして、保持爪４６の爪先５７が保持面２１と板状ワークＷとの隙間に入り込むと共に、ガイドピン４７が板状ワークＷの外周部に当接される。これにより、板状ワークＷの外周部が保持爪４６の爪先５７に引っ掛けられて、板状ワークＷの外周部が搬送機構１に保持される。   Next, as shown in FIG. 4C, the suction of the plate-like workpiece W by the holding surface 21 is stopped, and compressed air is jetted from the holding surface 21 to the back surface of the plate-like workpiece W. As a result, a compressed air layer is formed on the back side of the plate-like workpiece W, and the plate-like workpiece W is lifted from the holding surface 21. Further, at the same time as the plate-like workpiece W is blown up from the holding surface 21, the holding claw base 41 is drawn by the moving portion 44. Then, the toe 57 of the holding claw 46 enters the gap between the holding surface 21 and the plate-like workpiece W, and the guide pin 47 is brought into contact with the outer peripheral portion of the plate-like workpiece W. As a result, the outer peripheral portion of the plate-like workpiece W is hooked on the claw tip 57 of the holding claw 46, and the outer peripheral portion of the plate-like workpiece W is held by the transport mechanism 1.

図５を参照して、搬送機構１による板状ワークＷの搬入動作について説明する。図５Ａに示すように、搬送機構１が板状ワークＷを保持した状態で、保持テーブル２の上方に位置付けられている。このとき、保持爪４６が板状ワークＷの外周部に接するように、移動部４４によって保持爪ベース４１が位置調整されている。また、保持爪ベース４１には引張りバネ４３を介してピンベース４２が連結され、引張りバネ４３のバネ力によって板状ワークＷの外周部にガイドピン４７が引き付けられている。この状態では、規制突起６４の先端からピンベース４２が離間している。   With reference to FIG. 5, the carrying-in operation | movement of the plate-shaped workpiece W by the conveyance mechanism 1 is demonstrated. As shown in FIG. 5A, the transport mechanism 1 is positioned above the holding table 2 while holding the plate-like workpiece W. At this time, the position of the holding claw base 41 is adjusted by the moving portion 44 so that the holding claw 46 contacts the outer peripheral portion of the plate-like workpiece W. A pin base 42 is connected to the holding claw base 41 via a tension spring 43, and a guide pin 47 is attracted to the outer peripheral portion of the plate-like workpiece W by the spring force of the tension spring 43. In this state, the pin base 42 is separated from the tip of the restricting protrusion 64.

次に図５Ｂに示すように、搬送機構１が下降してガイドピン４７の下端が保持テーブル２に接触され、搬送機構１の高さ位置が調整される。同時に、板状ワークＷと保持テーブル２の保持面２１との平行な方向での位置関係が調整される。そして、搬送機構１の高さ方向及び平行方向が位置調整された状態で、保持爪４６の爪先５７が保持面２１よりも僅かに高く位置付けられている。このため、保持爪４６が保持テーブル２に接触して保持テーブル２を傷つけることがない。   Next, as shown in FIG. 5B, the transport mechanism 1 is lowered, the lower end of the guide pin 47 is brought into contact with the holding table 2, and the height position of the transport mechanism 1 is adjusted. At the same time, the positional relationship between the plate-like workpiece W and the holding surface 21 of the holding table 2 in the parallel direction is adjusted. The claw tip 57 of the holding claw 46 is positioned slightly higher than the holding surface 21 in a state where the height direction and the parallel direction of the transport mechanism 1 are adjusted. For this reason, the holding claw 46 does not contact the holding table 2 and damage the holding table 2.

次に図５Ｃに示すように、移動部４４によって保持爪ベース４１が距離Ｌ１だけ押し込まれ、板状ワークＷの外周部から保持爪４６の爪先５７が退避される。このとき、ピンベース４２に規制突起６４が接触していないので、移動部４４の駆動力がピンベース４２に伝わることがない。よって、板状ワークＷの外周部から保持爪４６だけを退避させて、引張りバネ４３のバネ力によりガイドピン４７を板状ワークＷの外周部に接触させ続けることが可能になっている。   Next, as shown in FIG. 5C, the holding claw base 41 is pushed in by the distance L <b> 1 by the moving unit 44, and the claw tip 57 of the holding claw 46 is retracted from the outer peripheral portion of the plate-like workpiece W. At this time, since the restricting protrusion 64 is not in contact with the pin base 42, the driving force of the moving portion 44 is not transmitted to the pin base 42. Therefore, only the holding claw 46 is retracted from the outer peripheral portion of the plate-like workpiece W, and the guide pin 47 can be kept in contact with the outer peripheral portion of the plate-like workpiece W by the spring force of the tension spring 43.

次に図５Ｄに示すように、板状ワークＷの外周部から保持爪４６が離れることで、板状ワークＷが保持テーブル２の保持面２１に向かって落下する。このとき、ガイドピン４７によって板状ワークＷの外周部がガイドされ続けるため、保持面２１に対して位置合わせ状態を維持しながら板状ワークＷが保持面２１に降ろされる。そして、板状ワークＷが位置合わせ状態で保持面２１に載置され、保持面２１に板状ワークＷが吸引保持される。   Next, as shown in FIG. 5D, the plate-like workpiece W falls toward the holding surface 21 of the holding table 2 when the holding claws 46 are separated from the outer peripheral portion of the plate-like workpiece W. At this time, since the outer periphery of the plate-like workpiece W is continuously guided by the guide pins 47, the plate-like workpiece W is lowered onto the holding surface 21 while maintaining the alignment state with respect to the holding surface 21. Then, the plate-like workpiece W is placed on the holding surface 21 in an aligned state, and the plate-like workpiece W is sucked and held on the holding surface 21.

次に図５Ｅに示すように、移動部４４によって保持爪ベース４１が距離Ｌ２だけ押し込まれ、保持爪ベース４１の規制突起６４がピンベース４２に突き当たる。そして、図５Ｆに示すように、保持爪ベース４１の規制突起６４によって引張りバネ４３のバネ力に抗してピンベース４２が押し込まれ、板状ワークＷの外周部から保持爪４６とガイドピン４７が一体的に退避する。   Next, as shown in FIG. 5E, the holding claw base 41 is pushed in by the distance L <b> 2 by the moving portion 44, and the regulation protrusion 64 of the holding claw base 41 abuts against the pin base 42. Then, as shown in FIG. 5F, the pin base 42 is pushed against the spring force of the tension spring 43 by the restricting projection 64 of the holding claw base 41, and the holding claw 46 and the guide pin 47 are pressed from the outer peripheral portion of the plate-like workpiece W. Evacuates as one.

このように、本実施の形態に係る搬送機構１では、板状ワークＷから保持爪４６及びガイドピン４７を段階的に離間させて、板状ワークＷの外周部からガイドピン４７が離れるタイミングを遅らせている。これにより、ガイドピン４７を残して保持爪４６だけを板状ワークＷから離間させて、ガイドピン４７にガイドさせながら板状ワークＷを保持テーブル２の保持面２１に載置することが可能になっている。   As described above, in the transport mechanism 1 according to the present embodiment, the holding claw 46 and the guide pin 47 are separated stepwise from the plate-like workpiece W, and the timing at which the guide pin 47 is separated from the outer peripheral portion of the plate-like workpiece W is set. Delayed. As a result, it is possible to place the plate-like workpiece W on the holding surface 21 of the holding table 2 while leaving the guide pins 47 and separating only the holding claws 46 from the plate-like workpiece W and guiding them by the guide pins 47. It has become.

なお、本実施の形態に係る搬送機構１では、電動式の直動アクチュエータで移動部４４を構成している。このため、初期設定時における保持面２１に対する板状ワークＷの位置合わせを容易に行うことができ、搬送機構１の設計誤差等を吸収することができる。この場合、移動部４４には、補正値に対応した電気信号が外部装置から入力され、保持面２１に対する板状ワークＷの位置合わせが実施される。   In the transport mechanism 1 according to the present embodiment, the moving unit 44 is configured by an electric linear actuator. For this reason, it is possible to easily align the plate-like workpiece W with respect to the holding surface 21 at the time of initial setting, and it is possible to absorb design errors and the like of the transport mechanism 1. In this case, an electric signal corresponding to the correction value is input to the moving unit 44 from an external device, and the plate-like workpiece W is aligned with the holding surface 21.

以上のように、本実施の形態に係る搬送機構１によれば、３つの保持爪４６により板状ワークＷが保持された状態で、引張りバネ４３のバネ力によって板状ワークＷの外周部の側面にガイドピン４７が接触する。また、板状ワークＷの外周部から保持爪４６が離間しても、ガイドピン４７が板状ワークＷの外周部の側面に接触し続けて、保持爪４６から落下した板状ワークＷがガイドピン４７に沿ってガイドされる。よって、エッジクランプ式の搬送機構１であっても、搬送機構１に保持された板状ワークＷと保持テーブル２の保持面２１との平行な方向での位置関係を維持しつつ、位置合わせされた状態で板状ワークＷを保持面２１に降ろすことが可能になっている。   As described above, according to the transport mechanism 1 according to the present embodiment, the plate-like workpiece W is held by the three holding claws 46 and the outer peripheral portion of the plate-like workpiece W is pressed by the spring force of the tension spring 43. The guide pin 47 contacts the side surface. Even if the holding claw 46 is separated from the outer peripheral portion of the plate-like workpiece W, the guide pin 47 continues to contact the side surface of the outer peripheral portion of the plate-like workpiece W, and the plate-like workpiece W dropped from the holding claw 46 is guided. Guided along the pins 47. Therefore, even the edge clamp type conveyance mechanism 1 is aligned while maintaining the positional relationship in the parallel direction between the plate-like workpiece W held by the conveyance mechanism 1 and the holding surface 21 of the holding table 2. In this state, the plate-like workpiece W can be lowered onto the holding surface 21.

なお、本発明は上記実施の形態に限定されず、種々変更して実施することが可能である。上記実施の形態において、添付図面に図示されている大きさや形状などについては、これに限定されず、本発明の効果を発揮する範囲内で適宜変更することが可能である。その他、本発明の目的の範囲を逸脱しない限りにおいて適宜変更して実施することが可能である。   In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

例えば、上記した実施の形態においては、板状ワークＷの外周部を引っ掛けるように、保持爪４６の爪先５７が突出する構成としたが、この構成に限定されない。保持爪４６は板状ワークＷを保持可能であればよく、例えば、保持爪４６に板状ワークＷの外周部を挟むようなＶ字溝が形成されてもよい。   For example, in the above-described embodiment, the claw tip 57 of the holding claw 46 protrudes so as to hook the outer peripheral portion of the plate-like workpiece W, but is not limited to this configuration. The holding claw 46 only needs to be able to hold the plate-like workpiece W. For example, a V-shaped groove that sandwiches the outer periphery of the plate-like workpiece W may be formed in the holding claw 46.

また、上記した実施の形態においては、ガイドピン４７が伸縮可能に構成されたが、この構成に限定されない。ガイドピン４７は伸縮しないように構成されてもよい。   Further, in the above-described embodiment, the guide pin 47 is configured to be extendable / contractible, but is not limited to this configuration. The guide pin 47 may be configured not to expand and contract.

また、上記した実施の形態においては、第１、第２のスライダーとしての上側スライダー５５および下側スライダー５２がガイドレール５１、５４上をスライドする構成としたが、この構成に限定されない。第１、第２のスライダーは、ガイドピン４７および保持爪４６の移動を板状ワークＷの径方向に方向付ける構成であればよい。   In the above-described embodiment, the upper slider 55 and the lower slider 52 as the first and second sliders slide on the guide rails 51 and 54. However, the present invention is not limited to this configuration. The first and second sliders may be configured to direct the movement of the guide pins 47 and the holding claws 46 in the radial direction of the plate-like workpiece W.

また、上記した実施の形態においては、移動部４４が電動シリンダで駆動する構成としたが、この構成に限定されない。移動部４４は、保持部４を板状ワークＷの径方向に移動させる構成であればよく、例えば、エアーシリンダで駆動してもよい。   In the above-described embodiment, the moving unit 44 is driven by the electric cylinder, but is not limited to this configuration. The moving unit 44 may be configured to move the holding unit 4 in the radial direction of the plate-like workpiece W, and may be driven by an air cylinder, for example.

なお、上記した実施の形態において、規制突起６４は、ピンベース４２の移動を規制するものであればよく、例えば、立壁部６１にボルトをねじ込んで構成されてもよい。また、規制突起６４は、立壁部６１に一体に形成されていてもよい。   In the above-described embodiment, the restricting protrusion 64 may be any member that restricts the movement of the pin base 42, and may be configured, for example, by screwing a bolt into the standing wall portion 61. Further, the regulation protrusion 64 may be formed integrally with the standing wall portion 61.

なお、上記した実施の形態においては、搬送機構１には各保持爪４６に対応して一対のガイドピン４７が設けられる構成としたが、この構成に限定されない。搬送機構１には、各保持爪４６に対応してガイドピン４７が設けられていればよく、ガイドピン４７の数は特に限定されない。   In the above-described embodiment, the transport mechanism 1 is configured to be provided with the pair of guide pins 47 corresponding to the holding claws 46, but is not limited to this configuration. The transport mechanism 1 only needs to be provided with guide pins 47 corresponding to the holding claws 46, and the number of guide pins 47 is not particularly limited.

以上説明したように、本発明は、保持テーブルの保持面に対する位置合わせ状態を維持しつつ、板状ワークを保持面に降ろすことができるという効果を有し、特に、板状ワークの外周部を保持して搬送するエッジクランプ式の搬送機構に有用である。   As described above, the present invention has an effect that the plate-like workpiece can be lowered onto the holding surface while maintaining the alignment state with respect to the holding surface of the holding table. It is useful for an edge clamp type conveying mechanism that holds and conveys.

１ 搬送機構
２ 保持テーブル
４ 保持部
２１ 保持面
４１ 保持爪ベース
４２ ピンベース
４３ 引張りバネ
４４ 移動部
４６ 保持爪
４７ ガイドピン
５２ 下側スライダー（第２のスライダー）
５５ 上側スライダー（第１のスライダー）
６４ 規制突起
Ｗ 板状ワーク DESCRIPTION OF SYMBOLS 1 Transfer mechanism 2 Holding table 4 Holding part 21 Holding surface 41 Holding claw base 42 Pin base 43 Tension spring 44 Moving part 46 Holding claw 47 Guide pin 52 Lower slider (2nd slider)
55 Upper slider (first slider)
64 Restriction protrusion W Plate work

Claims (1)

円形の板状ワークの下面を保持する保持面を有する保持テーブルに、板状ワークの外周部を保持する保持部で保持して板状ワークを搬送させる搬送機構であって、
該保持部は、板状ワークの外周部における側面および下面に接触させる保持爪と、該保持爪に併設され板状ワークの側面に接触させるガイドピンと、該ガイドピンを板状ワークの径方向で中心に向かってバネ力を付与する引張りバネと、該引張りバネによって移動する該ガイドピンを方向付ける第１のスライダーと、で構成され、
該保持部の移動を板状ワークの径方向に方向付ける第２のスライダーと、該保持部を径方向に移動させる移動部と、を備え、
該ガイドピンは内部バネによって上下方向に伸縮代が設けられており、
板状ワークを保持する時は、該移動部の作動で少なくとも３つの該保持部が板状ワークの径方向で中心に向かって移動する事によって、該ガイドピンが板状ワークの側面に接触すると共に、該保持爪が板状ワークの外周部における側面および下面に接触して板状ワークを保持して、
板状ワークを開放する時は、該移動部の作動で少なくとも３つの該保持部が板状ワークの径方向で外側に向かって移動する事によって、該ガイドピンを残して該保持爪を板状ワークの外側に移動させ、板状ワークの外周部から該保持爪を離間させるが、該引張りバネのバネ力によって該ガイドピンを板状ワーク側面に接触し続け、該搬送機構が保持する板状ワークを該保持面に対して平行な方向の位置を維持して該保持テーブルに板状ワークを搬送させた後、該移動部の作動で少なくとも３つの該保持部が板状ワークの径方向で外側に向かって移動する事によって、該保持爪と一体に該ガイドピンを板状ワークの外側に移動させ、板状ワークの外周部から該ガイドピンを離間させる事を特徴とする搬送機構。 A holding mechanism having a holding surface for holding the lower surface of a circular plate-shaped workpiece, a holding mechanism for holding the outer peripheral portion of the plate-shaped workpiece and holding the plate-shaped workpiece to convey the plate-shaped workpiece,
The holding portion includes a holding claw that is in contact with the side surface and the lower surface of the outer peripheral portion of the plate-shaped workpiece, a guide pin that is attached to the holding claw and is in contact with the side surface of the plate-shaped workpiece, and the guide pin is arranged in the radial direction of the plate-shaped workpiece. A tension spring that applies a spring force toward the center, and a first slider that directs the guide pin that is moved by the tension spring;
A second slider for directing the movement of the holding part in the radial direction of the plate-like workpiece; and a moving part for moving the holding part in the radial direction,
The guide pin is provided with an expansion / contraction allowance in the vertical direction by an internal spring,
When holding the plate-like workpiece, the guide pin comes into contact with the side surface of the plate-like workpiece by moving the holding portion toward the center in the radial direction of the plate-like workpiece by the operation of the moving portion. In addition, the holding claw is in contact with the side surface and the lower surface of the outer peripheral portion of the plate-like workpiece to hold the plate-like workpiece,
When releasing the plate-like workpiece, the holding portion moves to the outside in the radial direction of the plate-like workpiece by the operation of the moving portion, leaving the guide pin and the holding claw in the plate-like shape. Move to the outside of the workpiece and move the holding claw away from the outer periphery of the plate-like workpiece, but the plate pin that the guide pin keeps in contact with the side of the plate-like workpiece by the spring force of the tension spring and is held by the transport mechanism After the plate-like workpiece is conveyed to the holding table while maintaining the position of the workpiece in a direction parallel to the holding surface , at least three of the holding portions are moved in the radial direction of the plate-like workpiece by the operation of the moving unit. A transport mechanism characterized by moving the guide pin to the outside of the plate-like workpiece integrally with the holding claw and moving the guide pin away from the outer peripheral portion of the plate-like workpiece by moving toward the outside .
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