CN103855064A - Moving and sending mechanism - Google Patents
Moving and sending mechanism Download PDFInfo
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- CN103855064A CN103855064A CN201310596891.7A CN201310596891A CN103855064A CN 103855064 A CN103855064 A CN 103855064A CN 201310596891 A CN201310596891 A CN 201310596891A CN 103855064 A CN103855064 A CN 103855064A
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- plate workpiece
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- pawl
- transport mechanism
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention provides a moving and sending mechanism. A plate-shaped workpiece can be kept in an aligned state relative to a keeping face of a workbench and is allowed to descend to the keeping face. The moving and sending mechanism is formed by a keeping jaw (46), a guiding pin (47) and a moving part (44); the keeping jaw holds the periphery of the plate-shaped workpiece (W); the guiding pin is connected with the keeping jaw via an extension spring (43); and the moving part (44) allows the keeping jaw to move in a radial direction along the plate-shaped workpiece. When the plate-shaped workpiece is kept, by using the moving part to pull the keeping jaw, the keeping jaw is allowed to contact with the periphery part of the plate-shaped workpiece, and influenced by the keeping jaw, the guiding pin contacts with the periphery part of the plate-shaped workpiece. When the plate-shaped workpiece is released, by using the moving part to push the keeping jaw, the guiding pin is left and the keeping jaw is kept off the periphery of the plate-shaped workpiece, and via the elastic force of the extension spring, the guiding pin is used for guiding the periphery part of the plate-shaped workpiece.
Description
Technical field
The transport mechanism that the present invention relates to keep the peripheral part of plate workpiece and carry out the edge clamping compact form of conveyance.
Background technology
In the past, be known to keep the surface of plate workpiece the transport mechanism that carries out conveyance by conveyance pad as the transport mechanism of conveyance plate workpiece.In this transport mechanism, due to the surface of plate workpiece and contacting of conveyance pad, may pollute the contact-making surface of conveyance pad, therefore, clean the contact-making surface of conveyance pad by wiper mechanism.But, even the conveyance pad after cleaning, if accompany foreign matter between the contact-making surface of conveyance pad and the surface of plate workpiece, may cause damage to plate workpiece.Therefore, not with the Surface Contact of plate workpiece just can conveyance plate workpiece the transport mechanism of edge clamping compact form used (for example,, with reference to patent documentation 1).
Prior art document
Patent documentation 1: TOHKEMY 2007-258450 communique
But, in the transport mechanism of recording at patent documentation 1, being formed with V-shaped valley at multiple maintenance pawls, the peripheral part of plate workpiece is maintained in this V-shaped valley.In the time moving into plate workpiece to holding table, above holding table, multiple maintenance pawls are kept out of the way from the peripheral part of plate workpiece, and thus, plate workpiece drops on the maintenance face of holding table by free fall.Therefore, there is such problem: in the time of conveyance plate workpiece, even if make plate workpiece aim at the maintenance face of holding table, in the dropping process of plate workpiece, plate workpiece also can produce deviation with respect to the position that keeps face.
Summary of the invention
The present invention is the invention completing in view of such aspect, and its object is to provide a kind of transport mechanism of edge clamping compact form, can in maintaining the alignment of plate workpiece with respect to the maintenance face of holding table, plate workpiece be drop on maintenance face.
Transport mechanism of the present invention is such mechanism: keep plate workpiece by the maintaining part of peripheral part that keeps plate workpiece, and by plate workpiece conveyance to having on the holding table of maintenance face, above-mentioned maintenance face is used for the lower surface of the plate workpiece that keeps circular, above-mentioned transport mechanism is characterised in that, above-mentioned maintaining part comprises: keep pawl, it contacts with side and the lower surface at the peripheral part place of plate workpiece, directing pin, itself and above-mentioned maintenance pawl be set up in parallel and with the contacts side surfaces of plate workpiece, extension spring, it radially applies elastic force towards center to above-mentioned directing pin along plate workpiece, and the 1st slide block, it carries out orientation to the above-mentioned directing pin moving by above-mentioned extension spring, and above-mentioned transport mechanism has: the 2nd slide block, the footpath that its movement by above-mentioned maintaining part is oriented in plate workpiece is upwards, and moving part, it makes above-mentioned maintaining part moving radially along plate workpiece, in the time keeping plate workpiece, make at least 3 above-mentioned maintaining parts radially moving towards center along plate workpiece by the work of above-mentioned moving part, thereby make the contacts side surfaces of above-mentioned directing pin and plate workpiece, thereby and make above-mentioned maintenance pawl contact maintenance plate workpiece with side and the lower surface at the peripheral part place of plate workpiece, in the time discharging plate workpiece, make at least 3 above-mentioned maintaining parts radially moving toward the outer side along plate workpiece by the work of above-mentioned moving part, thereby make the outer side shifting of above-mentioned maintenance pawl to plate workpiece, make above-mentioned maintenance pawl leave the peripheral part of plate workpiece, but make the contacts side surfaces of above-mentioned directing pin continuation and plate workpiece by the elastic force of above-mentioned extension spring, thereby maintaining the plate workpiece of above-mentioned transport mechanism maintenance in the position of the direction parallel with respect to above-mentioned maintenance face, by plate workpiece conveyance on above-mentioned holding table.
According to this structure, utilizing at least 3 to keep pawls to keep under the state of plate workpiece, the elastic force of directing pin by extension spring and with the contacts side surfaces of the peripheral part of plate workpiece.In addition, even if keep pawl to leave from the peripheral part of plate workpiece, directing pin also continues the contacts side surfaces with the peripheral part of plate workpiece, thereby is guided along directing pin from the plate workpiece that keeps pawl to fall.Therefore, even the transport mechanism of edge clamping compact form also can, in maintaining the position relationship in parallel direction that is held in the plate workpiece of transport mechanism and the maintenance face of holding table, drop on maintenance face plate workpiece under the state of position alignment.
Invention effect
According to the present invention, in the time discharging plate workpiece, by only making to keep pawl leave and guided the whereabouts of plate workpiece by directing pin from plate workpiece, can be in maintaining the alignment of plate workpiece with respect to the maintenance face of holding table, plate workpiece is drop on maintenance face.
Brief description of the drawings
Fig. 1 is the stereogram of the transport mechanism of present embodiment.
Fig. 2 is the exploded perspective view of the maintaining part of the transport mechanism of present embodiment.
Fig. 3 is the decomposition side view of the maintaining part of the transport mechanism of present embodiment.
Fig. 4 is the key diagram of taking out of action of taking out of plate workpiece of the transport mechanism based on present embodiment.
Fig. 5 is the key diagram of moving into action of moving into plate workpiece of the transport mechanism based on present embodiment.
Label declaration
1 transport mechanism
2 holding tables
4 maintaining parts
21 maintenance faces
41 keep pawl matrix
42 pin matrixes
43 extension springs
44 moving parts
46 keep pawl
47 directing pin
52 times side slides (the 2nd slide block)
Side slide on 55 (the 1st slide block)
64 restriction projections
W plate workpiece
Embodiment
Below, with reference to accompanying drawing, the transport mechanism of present embodiment is described.Fig. 1 is the stereogram of the transport mechanism of present embodiment.In addition, in the present embodiment, to keeping the transport mechanism of the edge clamping compact form of the peripheral part of plate workpiece carry out example and describe at three places, but the invention is not restricted to this structure.Transport mechanism is the structure keeping more than three places of peripheral part of plate workpiece.
As shown in Figure 1, transport mechanism 1 is the transport mechanism that is assembled in the edge clamping compact form in various processing unit (plant)s, this transport mechanism 1 be configured to the peripheral part of plate workpiece W keep and by plate workpiece W conveyance to holding table 2.Plate workpiece W is formed as roughly discoideus, and its surface is marked off multiple regions by the not shown preset lines of cutting apart.Be formed with IC(integrated circuit by cutting apart each region that preset lines marks off), LSI(large scale integrated circuit) etc. circuit.In addition, as plate workpiece W, enumerating the semiconductor wafer such as silicon, GaAs is that example describes, but can be also pottery, glass, sapphire (Al
2o
3) inorganic material substrate etc. that is.
Upper surface at holding table 2 is formed with maintenance face 21 by porous ceramic film material, and above-mentioned maintenance face 21 keeps the lower surface of plate workpiece W.Maintenance face 21 is connected with suction source 25 and compressed-air actuated supply source 26 through transfer valve (not shown) by the stream in holding table 2.In the time that holding table 2 is received plate workpiece W from transport mechanism 1, the connection destination of maintenance face 21 is switched to suction source 25, thereby plate workpiece W is adsorbed to maintenance face 21.In the time joining plate workpiece W from holding table 2 to transport mechanism 1, the connection destination of maintenance face 21 is switched to compressed-air actuated supply source 26, thereby plate workpiece W is floated to the height that can carry out edge clamping by transport mechanism 1 from maintenance face 21.
Transport mechanism 1 disposes 3 maintaining parts 4 to keep the peripheral part of plate workpiece W on the base plate 3 of overlooking as general triangular shape.Central authorities at base plate 3 are supported with connecting plate 32 by 3 post portions 31, and this base plate 3 is supported on not shown arm through this connecting plate 32.Each maintaining part 4 is configured to, and by keeping pawl 46 to keep the peripheral part of plate workpiece W, and can make a pair of directing pin 47 touch the peripheral part of plate workpiece W.Plate workpiece W under the state that pawl 46 keeps, is guided by a pair of directing pin 47 being kept, and above-mentioned a pair of directing pin 47 is set up in parallel in the both sides that keep pawl 46.
Keep pawl 46 to be fixed on and keep on pawl matrix 41, above-mentioned maintenance pawl matrix 41 can be slidably arranged on base plate 3.A pair of directing pin 47 is fixed on pin matrix 42, and above-mentioned pin matrix 42 can be slidably arranged in and keep on pawl matrix 41.In addition, keep pawl matrix 41 to be connected with pin matrix 42 drawn springs 43, pin matrix 42 is drawn to rely on by the elastic force of extension spring 43 to keep pawl matrix 41.In addition, keep pawl matrix 41 to be connected with DYN dynamic moving part 44, by the driving of moving part 44, pin matrix 42 moves along the radially advance and retreat of plate workpiece W together with keeping pawl matrix 41.
The cover 45 that each maintaining part 4 and moving part 44 are opened by lower surface covers, and keeps pawl 46 and a pair of directing pin 47 outstanding from base plate 3 downwards.In addition, Fig. 1 represents the state of the cover 45 of getting next maintaining part 4.In this transport mechanism 1, under the state that makes to keep pawl 46 and a pair of directing pin 47 to contact with the peripheral part of plate workpiece W, can only make to keep pawl 46 to keep out of the way from the peripheral part of plate workpiece W.Thus, even when plate workpiece W is decontroled from each maintenance pawl 46, can make plate workpiece W be guided by a pair of directing pin 47 on one side, fall towards the maintenance face 21 of holding table 2 on one side.
With reference to Fig. 2 and Fig. 3, the detailed structure of the maintaining part to transport mechanism describes.Fig. 2 is the exploded perspective view of the maintaining part of the transport mechanism of present embodiment.Fig. 3 is the decomposition side view of the maintaining part of the transport mechanism of present embodiment.
As shown in FIG. 2 and 3, base plate 3 is formed as extending laterally leg-of-mutton bight and is used as the setting area 33 of maintaining part 4 use and overlooks as general triangular shape.Dispose the guide rail 51 extending along radiation direction in each setting area 33 of base plate 3, on guide rail 51, can be provided with slidably lower side slide 52(the 2nd slide block).Be fixed with and keep pawl matrix 41 at the upper surface of lower side slide 52.Keep pawl matrix 41 to be formed as extending and overlooking as rectangular shape along guide rail 51, keep the roughly first half of pawl matrix 41 to be formed as heavy wall, the roughly latter half of thin-walled that is formed as.
What keep pawl matrix 41 is fixed on lower side slide 52 for the roughly latter half of of thin-walled, keeps the roughly first half for heavy wall of pawl matrix 41 to stretch out laterally than the setting area of base plate 3 33.Be fixed with the maintenance pawl 46 of the peripheral part that keeps plate workpiece W what keep pawl matrix 41 from the outstanding leading section in this setting area 33.Keep pawl 46 from keeping the leading section of pawl matrix 41 to extend downwards and thering is to the inside outstanding pawl point 57 in bottom.Contact with the pawl point 57 of maintenance pawl 46 by the side of peripheral part and the lower surface that make plate workpiece W, can keep plate workpiece W by multiple maintaining parts 4.In addition, keep pawl 46 to be formed at independently of one another and keep pawl matrix 41, but also can form as one.
Be provided with the wall portion 61 of bearing from the actuating force of moving part 44 in the rearward end that keeps pawl matrix 41.Moving part 44 is the DYN dynamic straight moving actuators that make bar 66 flexible after receiving the signal of telecommunication, and position in the inner part, the ratio setting area 33 that is arranged on base plate 3.Moving part 44 positions by locating piece 67, and moving part 44 makes bar 66 outstanding towards setting area 33.Be fixed with the wall portion 61 that keeps pawl matrix 41 at the end of bar 66, keep pawl matrix 41 to move in advance and retreat direction along guide rail 51 by the flexible of bar 66.
Keep the roughly first half of pawl matrix 41 to become base portion 62, this base portion 62 is supported for pin matrix 42 can slide.Dispose the guide rail 54 extending along radiation direction at the upper surface of base portion 62, on guide rail 54, can be provided with slidably side slide 55(the 1st slide block).Be fixed with pin matrix 42 at the upper surface of upper side slide 55.Pin matrix 42 has on the cross section vertical with direction with respect to keeping the base portion 62 of pawl matrix 41 to slide and is down the bend 71 of U-shaped and supports a pair of support portion 72 of a pair of directing pin 47 in two sides of bend 71.
Each directing pin 47 is configured to, and guide portion 77 can be telescopically connected to the bottom of pin main body 75 through contained spring 76, and above-mentioned pin main body 75 is extended downwards from support portion 72.Directing pin 47 is located in the side that keeps pawl 46, and the guide portion 77 of directing pin 47 is than pawl point 57 outstanding (with reference to Fig. 4 (a)) downwards that keeps pawl 46.In the time carrying out conveyance by transport mechanism 1, carry out Height Adjustment taking guide portion 77 as benchmark, make to keep the pawl point 57 of pawl 46 not contact with holding table 2.Now, by contained spring 76, directing pin 47 is provided with stroke, absorbs the error of short transverse by stroke, therefore, can easily carry out the Height Adjustment of transport mechanism 1.
In addition, pin matrix 42 drawn springs 43 are connected with keeping pawl matrix 41.One end of extension spring 43 and engaging pin 73 engagings of bend 71 upper surfaces that are arranged on pin matrix 42, the other end of extension spring 43 and engaging pin 63 engagings that are arranged on wall portion 61 upper surfaces that keep pawl matrix 41.Pin matrix 42 is pulled to wall portion 61 sides by the elastic force of extension spring 43.Be provided with restriction projection 64, the movement to wall portion 61 sides of these restriction projection 64 banking pin matrixes 42 in wall portion 61.Pin matrix 42 touches the end of restriction projection 64 by the elastic force of extension spring 43, thus, and pin matrix 42 and 41 actions integratedly of maintenance pawl matrix.
The length adjustment of restriction projection 64 is that the moment that directing pin 47 is kept out of the way from the peripheral part of plate workpiece W is more late than the moment that keeps pawl 46 to keep out of the way from the peripheral part of plate workpiece W., promote to keep pawl matrix 41 by moving part 44, and only make to keep pawl 46 to keep out of the way (with reference to Fig. 5 (c)) from the peripheral part of plate workpiece W.Further promote to keep pawl matrix 41 by moving part 44 in addition, make pin matrix 42 touch restriction projection 64, thereby make directing pin 47 keep out of the way (with reference to Fig. 5 (f)) from the peripheral part of plate workpiece W.Like this, transport mechanism 1 formation leaves directing pin 47 and only makes the state that keeps pawl 46 to keep out of the way from plate workpiece W.
With reference to Fig. 4 and Fig. 5 to transport mechanism taking out of action and moving into action and describe plate workpiece.Fig. 4 is the key diagram of taking out of action of taking out of plate workpiece of the transport mechanism based on present embodiment.Fig. 5 is the key diagram of moving into action of moving into plate workpiece of the transport mechanism based on present embodiment.In addition, the transport mechanism shown in Fig. 4 and Fig. 5 is the action that represents an example to taking out of action and moving into action of plate workpiece, can carry out suitable change.
First,, with reference to Fig. 4, the action of taking out of of taking out of plate workpiece W based on transport mechanism 1 is described.As shown in Fig. 4 (a), plate workpiece W is maintained on the maintenance face 21 of holding table 2, transport mechanism 1 standby above holding table 2.Now, keep pawl matrix 41 to be pushed to outside by moving part 44, respectively keep pawl 46 and each directing pin 47 to be positioned to the radial outside of plate workpiece W.Directing pin 47 is than keeping the pawl point 57 of pawl 46 by plate workpiece W side (inner side).In addition, the lower end of directing pin 47 is more outstanding slightly downwards than keeping the lower end of pawl 46.
Next,, as shown in Fig. 4 (b), transport mechanism 1 declines and the lower end of directing pin 47 is contacted with holding table 2.Can stretch because directing pin 47 is configured to as mentioned above, therefore absorb the error of the position adjustment of short transverse by stroke.Therefore, the transport mechanism 1 of present embodiment and the upper lower shaft of the arm by not shown are adjusted compared with the structure of height of transport mechanism 1 and are made Height Adjustment become easy.In addition, under the state of height of having adjusted transport mechanism 1, keep the pawl point 57 of pawl 46 to orientate as slightly higher than maintenance face 21.
Next, as shown in Fig. 4 (c), stop the suction of maintenance face 21 to plate workpiece W, compressed air is sprayed at the back side from maintenance face 21 to plate workpiece W.Thus, be formed with compressed air layer in the rear side of plate workpiece W, thereby plate workpiece W is floated from maintenance face 21.In addition, when plate workpiece W is blown afloat from maintenance face 21, further and keep pawl matrix 41 by moving part 44.And the pawl point 57 of maintenance pawl 46 enters into the gap of maintenance face 21 and plate workpiece W and the peripheral part butt of directing pin 47 and plate workpiece W.Thus, the pawl point 57 that the peripheral part of plate workpiece W is kept pawl 46 triggers, thereby is kept the peripheral part of plate workpiece W by transport mechanism 1.
With reference to Fig. 5, the action of moving into of moving into plate workpiece W based on transport mechanism 1 is described.As shown in Fig. 5 (a), transport mechanism 1 is keeping, under the state of plate workpiece W, being located in the top of holding table 2.Now, keep pawl matrix 41 to carry out position adjustment by moving part 44, make to keep pawl 46 to contact with the peripheral part of plate workpiece W.In addition, pin matrix 42 drawn springs 43 and being connected with keeping pawl matrix 41, directing pin 47 is pulled to the peripheral part of plate workpiece W by the elastic force of extension spring 43.Under this state, pin matrix 42 leaves from the end of restriction projection 64.
Next, as shown in Fig. 5 (b), transport mechanism 1 declines and the lower end of directing pin 47 is contacted with holding table 2, and the height and position of transport mechanism 1 is adjusted.Meanwhile, the position relationship of the parallel direction between plate workpiece W and the maintenance face 21 of holding table 2 is adjusted.And, carried out, under the state of position adjustment, keeping the pawl point 57 of pawl 46 to be positioned as slightly higher than maintenance face 21 in the short transverse to transport mechanism 1 and parallel direction.Therefore, keep pawl 46 can not contact with holding table 2 and holding table 2 be caused to damage.
Next, as shown in Fig. 5 (c), keep pawl matrix 41 to be pushed and displacement L1 by moving part 44, thereby keep the pawl point 57 of pawl 46 to keep out of the way from the peripheral part of plate workpiece W.Now, because restriction projection 64 does not contact with pin matrix 42, so the actuating force of moving part 44 can not be delivered to pin matrix 42.Therefore, can only make to keep pawl 46 to keep out of the way from the peripheral part of plate workpiece W, and make directing pin 47 continue to contact with the peripheral part of plate workpiece W by the elastic force of extension spring 43.
Next,, as shown in Fig. 5 (d), by making to keep pawl 46 to leave from the peripheral part of plate workpiece W, and plate workpiece W is fallen towards the maintenance face 21 of holding table 2.Now, guide because the peripheral part of plate workpiece W continues directed pin 47, so can maintain the state of plate workpiece W aligning maintenance face 21, make plate workpiece W land to maintenance face 21 simultaneously.Then, plate workpiece W is loaded onto on maintenance face 21 under alignment, and plate workpiece W suction is remained on maintenance face 21.
Next, as shown in Fig. 5 (e), keep pawl matrix 41 to be pushed and displacement L2 by moving part 44, thereby keep the restriction projection 64 of pawl matrix 41 to touch pin matrix 42.Then,, as shown in Fig. 5 (f), by keeping the restriction projection 64 of pawl matrix 41, pin matrix 42 overcomes the elastic force of extension spring 43 and is pushed, thereby keeps pawl 46 and directing pin 47 to keep out of the way from the peripheral part of plate workpiece W integratedly.
Like this, in the transport mechanism 1 of present embodiment, make to keep pawl 46 and directing pin 47 to be left from plate workpiece W by stages, and the evening in moment that directing pin 47 is left from the peripheral part of plate workpiece W.Thus, can leave directing pin 47 and only make to keep pawl 46 to leave from plate workpiece W, in plate workpiece W being guided by directing pin 47, plate workpiece W being loaded on the maintenance face 21 of holding table 2.
In addition, in the transport mechanism 1 of present embodiment, moving part 44 is made up of DYN dynamic straight moving actuator.Therefore, the plate workpiece W can easily carry out initial setting time, with respect to the aligning of maintenance face 21, can absorb the design error of transport mechanism 1 etc.In this situation, the signal of telecommunication corresponding with correction value is input to moving part 44 from external device (ED), implements the aligning of plate workpiece W with respect to maintenance face 21.
As mentioned above, according to the transport mechanism 1 of present embodiment, keeping pawls 46 keeping under the state of plate workpiece W by 3, directing pin 47 by the elastic force of extension spring 43 with the contacts side surfaces of the peripheral part of plate workpiece W.In addition, even if keep pawl 46 to leave from the peripheral part of plate workpiece W, directing pin 47 also continues the contacts side surfaces with plate workpiece W peripheral part, is guided along directing pin 47 from the plate workpiece W that keeps pawl 46 to fall.Therefore, even the transport mechanism 1 of edge clamping compact form also can be configured to, maintaining plate workpiece W(and remaining on transport mechanism 1) with the position relationship of the parallel direction of the maintenance face 21 of holding table 2, under the state of position alignment, make plate workpiece W drop on maintenance face 21 simultaneously.
In addition, the invention is not restricted to above-mentioned execution mode, can carry out various changes and implement the present invention.In the above-described embodiment, be not limited to this about the illustrated size and shape of accompanying drawing etc., in the scope of performance effect of the present invention, can suitably change.In addition, in the scope that does not depart from the object of the invention, can suitably change to implement the present invention.
For example, in the above-described embodiment, keep the pawl point 57 of pawl 46 for outstanding structure is to catch on the peripheral part of plate workpiece W, but the invention is not restricted to this structure.Keep pawl 46 can keep plate workpiece W, for example, also can keep pawl 46 to be formed with the V-shaped valley of the peripheral part of clamping plate workpiece W.
In addition, in the above-described embodiment, directing pin 47 is configured to and can stretches, but the invention is not restricted to this structure.Directing pin 47 can cannot not be configured to flexiblely yet.
In addition, in the above-described embodiment, be configured to slip on guide rail 51,54 as upper side slide 55 and the lower side slide 52 of the 1st, the 2nd slide block, but the invention is not restricted to this structure.1st, the 2nd slide block is configured to directing pin 47 and keeps footpath that the movement of pawl 46 is oriented in plate workpiece W upwards.
In addition, in the above-described embodiment, moving part 44 is configured to by electric cylinder and drives, but the invention is not restricted to this structure.Moving part 44 is configured to and makes maintaining part 4 along the moving radially of plate workpiece W, and for example, also can drive by air cylinder.
In addition, in the above-described embodiment, restriction projection 64 limits the movement of pin matrix 42, for example, also can form by bolt being screwed into wall portion 61.In addition, restriction projection 64 also can be integrally formed in wall portion 61.
In addition, in the above-described embodiment, transport mechanism 1 is configured to each maintenance pawl 46 and is provided with accordingly a pair of directing pin 47, but the invention is not restricted to this structure.Be provided with accordingly directing pin 47 at transport mechanism 1 and each maintenance pawl 46, the number of directing pin 47 is not particularly limited.
The industrial possibility of utilizing
As mentioned above, the present invention has following effect: can be in maintaining the alignment of plate workpiece with respect to the maintenance face of holding table, plate workpiece is drop on maintenance face, particularly, to keeping the peripheral part of plate workpiece and carry out the transport mechanism of edge clamping compact form of conveyance useful.
Claims (1)
1. a transport mechanism, it keeps plate workpiece by the maintaining part of peripheral part that keeps plate workpiece, and by plate workpiece conveyance to having on the holding table of maintenance face, above-mentioned maintenance face is for keeping the lower surface of circular plate workpiece,
Above-mentioned transport mechanism is characterised in that,
Above-mentioned maintaining part comprises: keep pawl, it contacts with side and the lower surface at the peripheral part place of plate workpiece; Directing pin, itself and above-mentioned maintenance pawl be set up in parallel and with the contacts side surfaces of plate workpiece; Extension spring, it radially applies elastic force towards center to above-mentioned directing pin along plate workpiece; And the 1st slide block, it carries out orientation to the above-mentioned directing pin moving by above-mentioned extension spring,
Above-mentioned transport mechanism has: the 2nd slide block, and the footpath that its movement by above-mentioned maintaining part is oriented in plate workpiece is upwards; And moving part, it makes above-mentioned maintaining part along the moving radially of plate workpiece,
In the time keeping plate workpiece, make at least 3 above-mentioned maintaining parts radially moving towards center along plate workpiece by the work of above-mentioned moving part, thereby make the contacts side surfaces of above-mentioned directing pin and plate workpiece, thereby and make above-mentioned maintenance pawl contact maintenance plate workpiece with side and the lower surface at the peripheral part place of plate workpiece
In the time discharging plate workpiece, make at least 3 above-mentioned maintaining parts radially moving toward the outer side along plate workpiece by the work of above-mentioned moving part, thereby make the outer side shifting of above-mentioned maintenance pawl to plate workpiece, make above-mentioned maintenance pawl leave the peripheral part of plate workpiece, but make the contacts side surfaces of above-mentioned directing pin continuation and plate workpiece by the elastic force of above-mentioned extension spring, thereby maintaining plate workpiece that above-mentioned transport mechanism keeps in the position of the direction parallel with respect to above-mentioned maintenance face, by plate workpiece conveyance to above-mentioned holding table.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-264917 | 2012-12-04 | ||
| JP2012264917A JP6091867B2 (en) | 2012-12-04 | 2012-12-04 | Transport mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103855064A true CN103855064A (en) | 2014-06-11 |
| CN103855064B CN103855064B (en) | 2018-04-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310596891.7A Active CN103855064B (en) | 2012-12-04 | 2013-11-22 | Transport mechanism |
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| Country | Link |
|---|---|
| JP (1) | JP6091867B2 (en) |
| CN (1) | CN103855064B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389810A (en) * | 2017-02-03 | 2018-08-10 | 株式会社迪思科 | Transport mechanism |
| CN112951750A (en) * | 2016-03-31 | 2021-06-11 | 芝浦机械电子株式会社 | Substrate conveying device, substrate processing device and substrate processing method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6975056B2 (en) * | 2018-01-29 | 2021-12-01 | 株式会社ディスコ | Transport mechanism |
| CN117878044B (en) * | 2024-03-12 | 2024-06-04 | 四川富美达微电子股份有限公司 | Lead frame transfer system |
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| JPH0290U (en) * | 1988-05-31 | 1990-01-05 | ||
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112951750A (en) * | 2016-03-31 | 2021-06-11 | 芝浦机械电子株式会社 | Substrate conveying device, substrate processing device and substrate processing method |
| CN112951750B (en) * | 2016-03-31 | 2024-02-27 | 芝浦机械电子株式会社 | Substrate conveying device, substrate processing device and substrate processing method |
| CN108389810A (en) * | 2017-02-03 | 2018-08-10 | 株式会社迪思科 | Transport mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014110364A (en) | 2014-06-12 |
| JP6091867B2 (en) | 2017-03-08 |
| CN103855064B (en) | 2018-04-17 |
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