JP6085188B2 - パターン検査装置 - Google Patents

パターン検査装置 Download PDF

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Publication number
JP6085188B2
JP6085188B2 JP2013028216A JP2013028216A JP6085188B2 JP 6085188 B2 JP6085188 B2 JP 6085188B2 JP 2013028216 A JP2013028216 A JP 2013028216A JP 2013028216 A JP2013028216 A JP 2013028216A JP 6085188 B2 JP6085188 B2 JP 6085188B2
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JP
Japan
Prior art keywords
light
pattern
image
unit
light receiving
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Expired - Fee Related
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JP2013028216A
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English (en)
Japanese (ja)
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JP2014157085A (ja
Inventor
成章 藤原
成章 藤原
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2013028216A priority Critical patent/JP6085188B2/ja
Priority to KR1020130161427A priority patent/KR101577119B1/ko
Priority to TW102147906A priority patent/TWI534424B/zh
Priority to CN201410053709.8A priority patent/CN103995008A/zh
Publication of JP2014157085A publication Critical patent/JP2014157085A/ja
Application granted granted Critical
Publication of JP6085188B2 publication Critical patent/JP6085188B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2013028216A 2013-02-15 2013-02-15 パターン検査装置 Expired - Fee Related JP6085188B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013028216A JP6085188B2 (ja) 2013-02-15 2013-02-15 パターン検査装置
KR1020130161427A KR101577119B1 (ko) 2013-02-15 2013-12-23 패턴 검사 장치 및 패턴 검사 방법
TW102147906A TWI534424B (zh) 2013-02-15 2013-12-24 圖案檢查裝置及圖案檢查方法
CN201410053709.8A CN103995008A (zh) 2013-02-15 2014-02-17 图案检查装置及图案检查方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013028216A JP6085188B2 (ja) 2013-02-15 2013-02-15 パターン検査装置

Publications (2)

Publication Number Publication Date
JP2014157085A JP2014157085A (ja) 2014-08-28
JP6085188B2 true JP6085188B2 (ja) 2017-02-22

Family

ID=51309231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013028216A Expired - Fee Related JP6085188B2 (ja) 2013-02-15 2013-02-15 パターン検査装置

Country Status (4)

Country Link
JP (1) JP6085188B2 (zh)
KR (1) KR101577119B1 (zh)
CN (1) CN103995008A (zh)
TW (1) TWI534424B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101712924B1 (ko) * 2015-02-03 2017-03-08 성우테크론 주식회사 광학 검사장치
JP6496159B2 (ja) * 2015-02-23 2019-04-03 株式会社Ｓｃｒｅｅｎホールディングス パターン検査装置およびパターン検査方法
JP6450697B2 (ja) * 2016-03-22 2019-01-09 Ckd株式会社 基板検査装置
KR101879735B1 (ko) * 2017-03-15 2018-07-18 (주)넥셀 자동적인 학습데이터 생성 방법 및 장치와 이를 이용하는 자가 학습 장치 및 방법
KR102037395B1 (ko) * 2017-09-25 2019-10-28 동우 화인켐 주식회사 투과 광학계 검사 장치 및 이를 이용한 필름 결함 검사 방법
JP2021096112A (ja) * 2019-12-16 2021-06-24 コニカミノルタ株式会社 透明体の検査装置
KR102267705B1 (ko) * 2020-09-17 2021-06-22 주식회사 티에스아이코리아 칩 온 필름 검사장치

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102792A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Simultaneous inspecting apparatus of inside and outside of body to be inspected
JP3418054B2 (ja) * 1996-02-16 2003-06-16 三井金属鉱業株式会社 配線パターン線幅測定装置
JP3378795B2 (ja) * 1998-03-27 2003-02-17 シャープ株式会社 表示装置の検査装置および検査方法
JP4227272B2 (ja) * 1999-08-11 2009-02-18 株式会社エヌテック 異なる波長の光を用いた物品の検査装置
JP2001305074A (ja) * 2000-04-19 2001-10-31 Dainippon Printing Co Ltd 板状ワークの検査方法及び装置
JP4304690B2 (ja) * 2002-12-27 2009-07-29 国際技術開発株式会社 テープ部材の検査装置
JP4403777B2 (ja) * 2003-11-07 2010-01-27 ウシオ電機株式会社 配線パターン検査装置及び方法
JP2008026212A (ja) * 2006-07-24 2008-02-07 Ushio Inc パターン検査装置
CN101887030A (zh) * 2009-05-15 2010-11-17 圣戈本玻璃法国公司 用于检测透明基板表面和/或其内部的缺陷的方法及***
KR101240564B1 (ko) * 2009-09-02 2013-03-14 아주하이텍(주) 광학 검사 장치 및 이를 이용한 검사 방법
CN101806751B (zh) * 2010-03-02 2012-01-11 清华大学 一种皮棉杂质的双光源透反射成像检测装置
JP5585301B2 (ja) 2010-08-24 2014-09-10 オムロン株式会社 シート用の外観検査システム

Also Published As

Publication number Publication date
CN103995008A (zh) 2014-08-20
KR101577119B1 (ko) 2015-12-11
TW201447286A (zh) 2014-12-16
TWI534424B (zh) 2016-05-21
KR20140103026A (ko) 2014-08-25
JP2014157085A (ja) 2014-08-28

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