JPS53102792A - Simultaneous inspecting apparatus of inside and outside of body to be inspected - Google Patents

Simultaneous inspecting apparatus of inside and outside of body to be inspected

Info

Publication number
JPS53102792A
JPS53102792A JP1711777A JP1711777A JPS53102792A JP S53102792 A JPS53102792 A JP S53102792A JP 1711777 A JP1711777 A JP 1711777A JP 1711777 A JP1711777 A JP 1711777A JP S53102792 A JPS53102792 A JP S53102792A
Authority
JP
Japan
Prior art keywords
inspected
outside
simultaneous
inspecting apparatus
visual field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1711777A
Other languages
Japanese (ja)
Inventor
Kazuo Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1711777A priority Critical patent/JPS53102792A/en
Publication of JPS53102792A publication Critical patent/JPS53102792A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To observe the defect as synthesized image in the same visual field, providing the light irradiating mechanism, made dark visual field by irradiating different color light on the inside and outside of the body to be inspected.
JP1711777A 1977-02-21 1977-02-21 Simultaneous inspecting apparatus of inside and outside of body to be inspected Pending JPS53102792A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1711777A JPS53102792A (en) 1977-02-21 1977-02-21 Simultaneous inspecting apparatus of inside and outside of body to be inspected

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1711777A JPS53102792A (en) 1977-02-21 1977-02-21 Simultaneous inspecting apparatus of inside and outside of body to be inspected

Publications (1)

Publication Number Publication Date
JPS53102792A true JPS53102792A (en) 1978-09-07

Family

ID=11935085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1711777A Pending JPS53102792A (en) 1977-02-21 1977-02-21 Simultaneous inspecting apparatus of inside and outside of body to be inspected

Country Status (1)

Country Link
JP (1) JPS53102792A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121150U (en) * 1980-02-18 1981-09-16
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JP2006194898A (en) * 2005-01-13 2006-07-27 Komag Inc Method and device for reducing or removing stray light of optical test head
JP2006220656A (en) * 2005-01-13 2006-08-24 Komag Inc Test head for optically inspecting workpiece
JP2014157085A (en) * 2013-02-15 2014-08-28 Dainippon Screen Mfg Co Ltd Pattern inspection device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121150U (en) * 1980-02-18 1981-09-16
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JPS6321855B2 (en) * 1980-10-15 1988-05-09 Nippon Kogaku Kk
JP2006194898A (en) * 2005-01-13 2006-07-27 Komag Inc Method and device for reducing or removing stray light of optical test head
JP2006220656A (en) * 2005-01-13 2006-08-24 Komag Inc Test head for optically inspecting workpiece
JP2014157085A (en) * 2013-02-15 2014-08-28 Dainippon Screen Mfg Co Ltd Pattern inspection device

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